[Scan]
initial_time=2016-01-28T17:44:27
final_time=2016-01-28T17:44:47
ip_count=19
run=1026
dataset=3
scan=170
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.74251E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.47724E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.41151E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.76419E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.60981E-8
mult1=-1.03063E-8
mult2=-2.60483E-9
rf_tmon=-6.1707E-3
rf_agc=3.2168E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=5.44429E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64655E0
bslens_imon=2.55506E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19845E1
lens5a_imon=1.98415E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05027E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53792E1
cs_ef1b_imon=3.10965E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05067E1
cs_ea1_imon=1.24571E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04953E0
lens1_imon=1.35244E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64587E1
os_ef1alow_imon=2.96919E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03755E1
cs_ea2_imon=1.4274E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84789E1
cs_ef1a_imon=3.00727E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.25522E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11215E1
os_restr1_imon=4.28115E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15069E1
os_ea1_imon=2.4081E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63642E1
os_ef1bup_imon=3.08385E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25138E0
cs_ionrep_imon=9.76208E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93217E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02027E1
cs_anode1_imon=2.05155E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.94721E-8
tplens_vset=1.4E-1
tplens_vmon=1.60466E0
tplens_imon=-2.69785E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.28002E1
iondef3_imon=1.49619E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26597E1
iondef2_imon=1.56367E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98307E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.75378E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29896E0
ionrepsh_imon=9.27757E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33385E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74452E1
cs_ef2b_imon=3.12785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44388E0
os_ea2_imon=-7.54291E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00419E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71272E1
cs_ef2a_imon=3.17523E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07501E0
os_ef2alow_imon=-2.5844E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70864E-1
os_ef2bup_imon=-5.309E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1087E1
os_restr2_imon=3.39819E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30015E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01723E1
cs_anode2_imon=2.09766E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72979E1
iondef1_imon=1.07397E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67986E1
iondef4_imon=1.08271E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.33885E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.70479E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12309E0
cs_ionaccel_imon=-1.11211E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47222E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56567E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.67723E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39164E-4
mask2_vset=0.0E0
mask2_vmon=-1.86563E1
mask2_imon=-7.22877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92572E3
multa_neg_imon=7.20977E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.32295E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50168E3
multb_neg_imon=7.05404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36487E0
defgridb_imon=5.91199E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33297E1
os_fil1_imon=9.44888E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07125E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62351E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.309E1
cs_fil1_imon=9.25109E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32012E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64869E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17431E-2
os_fil2_imon=-2.70671E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84134E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.95438E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33908E-1
cs_fil2_imon=-2.56568E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.24904E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22323E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01085E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40064E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.26697E-1
res40_imon=-2.66902E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.34E2	0.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80013E1	-7.15256E-4	-8.80006E1	4.52995E-4	4.43459E-3	9.35555E-2	2.73364E1	-3.26563E1	-3.25875E1	2.68093E1					
2.0E0	9.145E3	1.1E1	3.16E2	1.6E2	-7.22418E-2	-8.80014E1	-5.72205E-4	-8.80006E1	3.8147E-4	4.43459E-3	9.3317E-2	2.73135E1	-3.26623E1	-3.25936E1	2.68458E1	1.20003E-7	2.52525E-3	2.52525E-3	6.31242E-3	2.96968E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.80014E1	-8.58307E-4	-8.80006E1	1.19209E-4	4.8399E-3	9.36508E-2	2.73387E1	-3.26699E1	-3.27444E1	2.67821E1	1.20245E-7	2.51675E-3	2.51675E-3	6.32518E-3	3.00197E-1
4.0E0	2.16E3	1.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80013E1	-7.15256E-4	-8.80005E1	2.14577E-4	4.60148E-3	9.32932E-2	2.72886E1	-3.26484E1	-3.2816E1	2.68046E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.17779E-2	-8.80012E1	-4.76837E-4	-8.80004E1	3.57628E-4	4.76837E-3	9.35793E-2	2.72781E1	-3.26494E1	-3.26699E1	2.68088E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.80009E1	-9.53674E-4	-8.80006E1	2.38419E-5	4.55379E-3	9.33647E-2	2.72895E1	-3.26807E1	-3.27312E1	2.67992E1	1.19913E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80013E1	-7.15256E-4	-8.80006E1	1.90735E-4	4.41074E-3	9.31978E-2	2.73098E1	-3.26885E1	-3.26649E1	2.6829E1	1.19705E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.10825E-2	-8.80013E1	-5.00679E-4	-8.80003E1	6.67572E-4	4.48227E-3	9.31978E-2	2.72678E1	-3.26657E1	-3.25749E1	2.68088E1	1.20209E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01223E-1
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.14689E-2	-8.80015E1	-4.29153E-4	-8.80007E1	8.58307E-4	4.31538E-3	9.35316E-2	2.72786E1	-3.26944E1	-3.26325E1	2.67917E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80013E1	-5.96046E-4	-8.80003E1	6.19888E-4	4.52995E-3	9.31978E-2	2.72961E1	-3.26717E1	-3.26464E1	2.68232E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99686E-1
1.4E1	3.28E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80013E1	-7.39098E-4	-8.80004E1	5.24521E-4	4.57764E-3	9.3627E-2	2.73104E1	-3.27015E1	-3.26384E1	2.67932E1	1.19809E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9978E-1
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80012E1	-7.15256E-4	-8.80004E1	2.14577E-4	4.52995E-3	9.38892E-2	2.72949E1	-3.26879E1	-3.26212E1	2.68082E1	1.19851E-7	2.51525E-3	2.51525E-3	6.35059E-3	3.0071E-1
1.6E1	2.6E1	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.80013E1	-1.0252E-3	-8.80007E1	3.33786E-4	4.29153E-3	9.34839E-2	2.73333E1	-3.26723E1	-3.25281E1	2.68005E1	1.20435E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
1.7E1	4.5E1	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80013E1	-9.77516E-4	-8.80006E1	4.52995E-4	4.50611E-3	9.35793E-2	2.72945E1	-3.27263E1	-3.25004E1	2.67982E1	1.20069E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1
1.8E1	1.85E2	0.0E0	7.27E2	5.0E2	-7.36328E-2	-8.80011E1	-7.62939E-4	-8.80006E1	4.29153E-4	4.43459E-3	9.36508E-2	2.72799E1	-3.26783E1	-3.25828E1	2.68148E1	1.2026E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00197E-1
1.9E1	3.78E2	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80015E1	-6.19888E-4	-8.80007E1	5.96046E-4	4.64916E-3	9.36031E-2	2.73151E1	-3.2649E1	-3.25358E1	2.67842E1	1.20055E-7	2.52169E-3	2.52169E-3	6.28592E-3	3.0148E-1
2.0E1	2.314E3	1.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80013E1	-2.86102E-4	-8.80003E1	4.29153E-4	4.93526E-3	9.35555E-2	2.73261E1	-3.26645E1	-3.27378E1	2.68118E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00302E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80012E1	-5.24521E-4	-8.80003E1	6.4373E-4	4.86374E-3	9.36985E-2	2.72752E1	-3.26502E1	-3.27887E1	2.68082E1	1.19913E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.98481E-1
2.2E1	2.0E2	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80015E1	-7.15256E-4	-8.80004E1	4.05312E-4	4.43459E-3	9.35078E-2	2.72793E1	-3.26554E1	-3.27071E1	2.68064E1	1.20092E-7	2.52084E-3	2.52084E-3	6.29333E-3	2.99483E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80013E1	-7.15256E-4	-8.80002E1	3.57628E-4	4.98295E-3	9.36031E-2	2.72979E1	-3.26597E1	-3.28002E1	2.67986E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
