[Scan]
initial_time=2016-01-28T17:45:47
final_time=2016-01-28T17:46:07
ip_count=19
run=1026
dataset=3
scan=173
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.45602E-2
qbias_imon=-3.85893E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.3982E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.41306E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.78375E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.61021E-8
mult1=-1.18475E-8
mult2=-2.71262E-9
rf_tmon=-4.47637E-3
rf_agc=3.29731E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.49853E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67335E0
bslens_imon=2.66032E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.96397E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=3.09226E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02034E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0494E1
cs_ea1_imon=1.23901E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08341E0
lens1_imon=1.4058E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6444E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.40412E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84166E1
cs_ef1a_imon=3.00541E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.23945E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11358E1
os_restr1_imon=4.2931E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1536E1
os_ea1_imon=2.41026E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63521E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22446E0
cs_ionrep_imon=9.56741E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93373E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.04387E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.9343E-8
tplens_vset=1.4E-1
tplens_vmon=1.59938E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26038E1
iondef3_imon=1.50542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.57391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98216E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.75294E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2509E0
ionrepsh_imon=9.17447E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33814E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7479E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46659E0
os_ea2_imon=-7.49965E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.63392E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86612E-1
os_ef2bup_imon=-5.41258E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.3795E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.10297E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73129E1
iondef1_imon=1.08364E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68202E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.275E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.71422E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12173E0
cs_ionaccel_imon=-1.29685E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47172E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56381E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.63884E-1
window_imon=-1.05538E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-7.63461E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92716E3
multa_neg_imon=6.85288E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.76997E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.85506E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3354E0
defgridb_imon=6.15712E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33298E1
os_fil1_imon=9.44727E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06795E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61981E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30924E1
cs_fil1_imon=9.24905E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35269E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64882E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18979E-2
os_fil2_imon=-2.58788E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79694E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.17248E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.86419E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25635E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22215E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.6681E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.18E2	1.0E0	1.47E2	4.1E1	-7.37103E-2	-8.80015E1	-6.67572E-4	-8.80004E1	3.09944E-4	4.95911E-3	9.35078E-2	2.72751E1	-3.26464E1	-3.26795E1	2.67926E1	1.20137E-7	2.5225E-3	2.5225E-3	6.32418E-3	3.0201E-1
2.0E0	9.576E3	5.0E0	3.16E2	1.6E2	-7.40967E-2	-8.80013E1	-4.52995E-4	-8.80003E1	1.43051E-4	5.36442E-3	9.36031E-2	2.73057E1	-3.26639E1	-3.26224E1	2.67968E1	1.20055E-7	2.51739E-3	2.51739E-3	6.33977E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80014E1	-3.8147E-4	-8.80004E1	2.14577E-4	4.91142E-3	9.37223E-2	2.73109E1	-3.26735E1	-3.27048E1	2.6825E1	1.20069E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00563E-1
4.0E0	2.193E3	2.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80013E1	-2.86102E-4	-8.80003E1	1.90735E-4	4.91142E-3	9.39846E-2	2.73192E1	-3.26676E1	-3.26517E1	2.68331E1	1.19749E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02769E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80013E1	-4.05312E-4	-8.80005E1	3.57628E-4	5.126E-3	9.36747E-2	2.72781E1	-3.26416E1	-3.25858E1	2.68005E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.02396E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.47149E-2	-8.80013E1	-5.72205E-4	-8.80003E1	5.48363E-4	4.673E-3	9.33886E-2	2.72727E1	-3.26679E1	-3.27115E1	2.68318E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.41738E-2	-8.80012E1	-7.15256E-4	-8.80002E1	1.90735E-4	4.93526E-3	9.35555E-2	2.72955E1	-3.26506E1	-3.2641E1	2.68208E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80013E1	-7.86781E-4	-8.80004E1	3.57628E-4	4.88758E-3	9.37223E-2	2.72594E1	-3.26765E1	-3.25167E1	2.68118E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99175E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80013E1	-7.86781E-4	-8.80006E1	3.8147E-4	4.673E-3	9.34839E-2	2.72939E1	-3.26449E1	-3.27782E1	2.67854E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80014E1	-5.00679E-4	-8.80006E1	2.38419E-4	4.62532E-3	9.3627E-2	2.73E1	-3.26767E1	-3.26573E1	2.68048E1	1.19705E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01609E-1
1.4E1	2.62E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.8001E1	-4.29153E-4	-8.80008E1	-4.76837E-5	4.72069E-3	9.36985E-2	2.73089E1	-3.2689E1	-3.25242E1	2.67829E1	1.1988E-7	2.51679E-3	2.51679E-3	6.323E-3	3.00494E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.8001E1	-4.05312E-4	-8.80004E1	2.14577E-4	4.72069E-3	9.36031E-2	2.73291E1	-3.26915E1	-3.26585E1	2.6798E1	1.19785E-7	2.5257E-3	2.5257E-3	6.33065E-3	3.00639E-1
1.6E1	3.6E1	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80015E1	-4.52995E-4	-8.80007E1	2.86102E-4	4.60148E-3	9.37462E-2	2.72865E1	-3.26837E1	-3.27197E1	2.68018E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99686E-1
1.7E1	5.2E1	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80014E1	-6.91414E-4	-8.80008E1	9.53674E-5	4.86374E-3	9.36508E-2	2.72921E1	-3.26555E1	-3.26219E1	2.68328E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
1.8E1	1.92E2	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80014E1	-6.19888E-4	-8.80006E1	2.14577E-4	4.60148E-3	9.34601E-2	2.72684E1	-3.26499E1	-3.25158E1	2.67998E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01085E-1
1.9E1	3.73E2	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80011E1	-9.29832E-4	-8.80003E1	0.0E0	4.95911E-3	9.34362E-2	2.73375E1	-3.26705E1	-3.26999E1	2.67907E1	1.19757E-7	2.51771E-3	2.51771E-3	6.3514E-3	3.01085E-1
2.0E1	2.334E3	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80013E1	-4.29153E-4	-8.80006E1	0.0E0	4.81606E-3	9.29832E-2	2.73099E1	-3.26518E1	-3.27294E1	2.6796E1	1.20174E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.43285E-2	-8.80014E1	-1.0252E-3	-8.80005E1	-9.53674E-5	4.98295E-3	9.30548E-2	2.73222E1	-3.26756E1	-3.27458E1	2.68286E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.97704E-1
2.2E1	1.75E2	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80014E1	-6.91414E-4	-8.80007E1	9.53674E-5	4.8399E-3	9.35555E-2	2.7288E1	-3.26649E1	-3.25027E1	2.67812E1	1.19851E-7	2.51417E-3	2.51417E-3	6.33977E-3	2.9892E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.45602E-2	-8.80017E1	-7.62939E-4	-8.80004E1	1.66893E-4	4.76837E-3	9.34601E-2	2.73129E1	-3.26759E1	-3.26038E1	2.68202E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.9892E-1
