[Scan]
initial_time=2016-01-28T17:46:41
final_time=2016-01-28T17:47:00
ip_count=19
run=1026
dataset=3
scan=175
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.7972E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.50394E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.48867E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.75513E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.60841E-8
mult1=-1.01136E-8
mult2=-2.74256E-9
rf_tmon=-3.51505E-3
rf_agc=3.40546E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=5.69236E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67218E0
bslens_imon=2.61284E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19847E1
lens5a_imon=1.98574E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.05052E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53755E1
cs_ef1b_imon=3.09817E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.02154E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0511E1
cs_ea1_imon=1.2427E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09777E0
lens1_imon=1.38607E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64403E1
os_ef1alow_imon=2.95408E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04137E1
cs_ea2_imon=1.41607E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83677E1
cs_ef1a_imon=3.00011E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=1.21858E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11279E1
os_restr1_imon=4.28157E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14945E1
os_ea1_imon=2.42026E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63642E1
os_ef1bup_imon=3.08844E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23618E0
cs_ionrep_imon=9.57312E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93361E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.05436E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=3.92767E-8
tplens_vset=1.4E-1
tplens_vmon=1.62368E0
tplens_imon=-1.34538E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26723E1
iondef3_imon=1.49834E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.57547E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98449E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=8.52525E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2772E0
ionrepsh_imon=9.32336E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.1738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74763E1
cs_ef2b_imon=3.12287E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45166E0
os_ea2_imon=-8.06692E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71994E1
cs_ef2a_imon=3.19472E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04146E0
os_ef2alow_imon=-2.76893E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74553E-1
os_ef2bup_imon=-5.41493E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.37961E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.30773E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01796E1
cs_anode2_imon=2.10376E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72865E1
iondef1_imon=1.09652E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67878E1
iondef4_imon=1.08541E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.22602E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.6304E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11891E0
cs_ionaccel_imon=-9.72491E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47114E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56318E1
einzel_imon=7.71778E-6
window_vset=0.0E0
window_vmon=2.03874E-1
window_imon=-1.08851E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.3905E-4
mask2_vset=0.0E0
mask2_vmon=-1.86438E1
mask2_imon=-7.70391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=8.29493E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.72657E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.16733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33614E0
defgridb_imon=5.97729E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33306E1
os_fil1_imon=9.44884E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07254E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61622E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30859E1
cs_fil1_imon=9.26514E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30135E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64216E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.27885E-2
os_fil2_imon=-2.69993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79741E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.44083E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34492E-1
cs_fil2_imon=-2.34438E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10503E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22188E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19705E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56266E-1
res40_imon=-2.49946E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.01E2	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80015E1	-7.39098E-4	-8.80005E1	2.38419E-4	5.05447E-3	9.32932E-2	2.72945E1	-3.26649E1	-3.2593E1	2.6803E1	1.20316E-7	2.51952E-3	2.51952E-3	6.34164E-3	2.9863E-1
2.0E0	9.444E3	1.2E1	3.16E2	1.6E2	-7.35556E-2	-8.80014E1	-7.86781E-4	-8.80005E1	4.05312E-4	4.8399E-3	9.34839E-2	2.73406E1	-3.26603E1	-3.27142E1	2.67851E1	1.20363E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00453E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80013E1	-1.04904E-3	-8.80006E1	2.38419E-5	4.86374E-3	9.3317E-2	2.72989E1	-3.2678E1	-3.27401E1	2.6745E1	1.20031E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.99083E-1
4.0E0	2.037E3	1.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80014E1	-1.09673E-3	-8.80005E1	-1.90735E-4	4.673E-3	9.33647E-2	2.73238E1	-3.26522E1	-3.26859E1	2.68478E1	1.19967E-7	2.51956E-3	2.51956E-3	6.3023E-3	2.99421E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.80014E1	-9.77516E-4	-8.80005E1	4.52995E-4	4.55379E-3	9.35316E-2	2.73057E1	-3.26673E1	-3.26585E1	2.6834E1	1.20191E-7	2.52139E-3	2.52139E-3	6.31299E-3	3.01475E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80015E1	-8.82149E-4	-8.80004E1	2.14577E-4	4.673E-3	9.38416E-2	2.72769E1	-3.26711E1	-3.26188E1	2.67968E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.45602E-2	-8.80017E1	-9.05991E-4	-8.80002E1	3.57628E-4	4.3869E-3	9.3317E-2	2.73069E1	-3.26651E1	-3.26164E1	2.68094E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80015E1	-6.91414E-4	-8.80001E1	5.00679E-4	4.74453E-3	9.34124E-2	2.72947E1	-3.26615E1	-3.26358E1	2.68094E1	1.19965E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00041E-1
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.40967E-2	-8.80014E1	-6.67572E-4	-8.80003E1	5.24521E-4	5.03063E-3	9.35078E-2	2.72921E1	-3.26661E1	-3.26349E1	2.68076E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.80016E1	-7.15256E-4	-8.80005E1	5.00679E-4	5.17368E-3	9.35078E-2	2.73081E1	-3.26717E1	-3.26993E1	2.6798E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
1.4E1	3.04E2	0.0E0	5.66E2	3.82E2	-7.42513E-2	-8.80015E1	-7.39098E-4	-8.80005E1	3.57628E-4	4.95911E-3	9.34362E-2	2.72865E1	-3.26753E1	-3.26861E1	2.6819E1	1.20069E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.51013E-2	-8.80018E1	-9.29832E-4	-8.80005E1	5.24521E-4	5.05447E-3	9.35316E-2	2.72841E1	-3.26771E1	-3.27492E1	2.67974E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
1.6E1	3.7E1	1.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80018E1	-1.00136E-3	-8.80008E1	5.00679E-4	4.673E-3	9.35078E-2	2.73151E1	-3.26649E1	-3.2649E1	2.67589E1	1.19697E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
1.7E1	5.5E1	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80017E1	-8.10623E-4	-8.80006E1	4.76837E-4	4.64916E-3	9.3627E-2	2.73105E1	-3.26464E1	-3.27263E1	2.6804E1	1.19809E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00563E-1
1.8E1	2.06E2	0.0E0	7.27E2	5.0E2	-7.44059E-2	-8.80016E1	-8.82149E-4	-8.80006E1	4.52995E-4	4.69685E-3	9.38177E-2	2.72913E1	-3.26597E1	-3.28345E1	2.68166E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99941E-1
1.9E1	3.64E2	0.0E0	7.68E2	5.29E2	-7.50241E-2	-8.80017E1	-7.86781E-4	-8.80005E1	3.33786E-4	4.95911E-3	9.34124E-2	2.73311E1	-3.2675E1	-3.28189E1	2.68047E1	1.2033E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.02133E-1
2.0E1	2.319E3	1.0E0	8.08E2	5.58E2	-7.44831E-2	-8.80016E1	-9.53674E-4	-8.80005E1	5.72205E-4	5.29289E-3	9.37462E-2	2.73207E1	-3.26645E1	-3.25924E1	2.68064E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00453E-1
2.1E1	7.0E0	0.0E0	8.49E2	5.88E2	-7.47149E-2	-8.80017E1	-1.19209E-3	-8.80006E1	4.29153E-4	4.74453E-3	9.36031E-2	2.73305E1	-3.26791E1	-3.26644E1	2.67926E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
2.2E1	1.7E2	1.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80017E1	-7.15256E-4	-8.80006E1	1.19209E-4	4.72069E-3	9.3627E-2	2.7298E1	-3.26602E1	-3.2554E1	2.68099E1	1.19544E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80018E1	-8.82149E-4	-8.80003E1	2.6226E-4	4.48227E-3	9.33409E-2	2.72865E1	-3.26663E1	-3.26723E1	2.67878E1	1.19705E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01609E-1
