[Scan]
initial_time=2016-01-28T17:47:34
final_time=2016-01-28T17:47:54
ip_count=19
run=1026
dataset=3
scan=177
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.82678E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.24502E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.43522E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.73663E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.61547E-8
mult1=-8.88551E-9
mult2=-2.71462E-9
rf_tmon=-4.1339E-3
rf_agc=3.31894E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.46968E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64331E0
bslens_imon=2.62157E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20038E1
lens5a_imon=1.94238E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53567E1
cs_ef1b_imon=3.10618E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04853E1
cs_ea1_imon=1.24969E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05142E0
lens1_imon=1.47384E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64865E1
os_ef1alow_imon=2.95982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04001E1
cs_ea2_imon=1.40339E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84171E1
cs_ef1a_imon=3.00685E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.21147E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11096E1
os_restr1_imon=4.27873E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15266E1
os_ea1_imon=2.44E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63588E1
os_ef1bup_imon=3.08591E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27102E0
cs_ionrep_imon=9.68638E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93497E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01889E1
cs_anode1_imon=2.03905E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.91422E-8
tplens_vset=1.4E-1
tplens_vmon=1.60966E0
tplens_imon=-5.78279E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25996E1
iondef3_imon=1.48491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26801E1
iondef2_imon=1.57211E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98171E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=8.569E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27508E0
ionrepsh_imon=9.41465E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33834E1
lens5b_imon=2.15692E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74623E1
cs_ef2b_imon=3.12929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45623E0
os_ea2_imon=-6.59391E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06053E2
lens4b_imon=2.00448E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71197E1
cs_ef2a_imon=3.16659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06132E0
os_ef2alow_imon=-2.51319E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82558E-1
os_ef2bup_imon=-5.44862E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10765E1
os_restr2_imon=3.36121E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.31753E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01653E1
cs_anode2_imon=2.0873E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.08665E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.09679E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.19729E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.5657E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.26441E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47453E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56216E1
einzel_imon=7.60675E-6
window_vset=0.0E0
window_vmon=1.91814E-1
window_imon=-9.60327E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.3893E-4
mask2_vset=0.0E0
mask2_vmon=-1.86344E1
mask2_imon=-5.79208E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.41525E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.60819E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50168E3
multb_neg_imon=6.95697E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51284E0
defgridb_imon=5.97553E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33323E1
os_fil1_imon=9.40494E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06998E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61655E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.25594E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.37033E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64098E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.66116E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.27629E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22406E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22065E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.33914E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=171
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.07E2	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80013E1	-3.8147E-4	-8.80006E1	1.19209E-4	4.86374E-3	9.34601E-2	2.73005E1	-3.26845E1	-3.27007E1	2.68041E1	1.20092E-7	2.51347E-3	2.51347E-3	6.31949E-3	2.99738E-1
2.0E0	8.979E3	6.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80013E1	-5.00679E-4	-8.80003E1	2.38419E-5	4.62532E-3	9.34601E-2	2.72639E1	-3.27021E1	-3.26347E1	2.67945E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9943E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.17779E-2	-8.80013E1	-5.72205E-4	-8.80006E1	1.90735E-4	4.95911E-3	9.3317E-2	2.73277E1	-3.2677E1	-3.25316E1	2.68111E1	1.20137E-7	2.52362E-3	2.52362E-3	6.32978E-3	3.00144E-1
4.0E0	2.144E3	2.0E0	6.55E2	3.98E2	-7.16233E-2	-8.80013E1	-9.53674E-5	-8.80005E1	9.53674E-5	4.88758E-3	9.33647E-2	2.72702E1	-3.26224E1	-3.25846E1	2.68052E1	1.20209E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80013E1	7.15256E-5	-8.80003E1	4.76837E-5	5.17368E-3	9.36747E-2	2.73051E1	-3.26675E1	-3.25281E1	2.68094E1	1.20004E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80016E1	-6.19888E-4	-8.80005E1	-4.76837E-5	4.8399E-3	9.34124E-2	2.72763E1	-3.26621E1	-3.25125E1	2.67698E1	1.19705E-7	2.52428E-3	2.52428E-3	6.34037E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80014E1	-7.86781E-4	-8.80005E1	1.19209E-4	4.95911E-3	9.33647E-2	2.72951E1	-3.26703E1	-3.24998E1	2.68024E1	1.20122E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80014E1	-9.29832E-4	-8.80005E1	2.14577E-4	4.88758E-3	9.36031E-2	2.72526E1	-3.2662E1	-3.27387E1	2.6807E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.13915E-2	-8.80017E1	-8.10623E-4	-8.80006E1	-1.43051E-4	4.8399E-3	9.34124E-2	2.7344E1	-3.26484E1	-3.27062E1	2.67956E1	1.2014E-7	2.51755E-3	2.51755E-3	6.31283E-3	2.9806E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80016E1	-7.86781E-4	-8.80005E1	0.0E0	5.38826E-3	9.32455E-2	2.73039E1	-3.2647E1	-3.2593E1	2.6792E1					
1.4E1	3.04E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80014E1	-7.39098E-4	-8.80003E1	2.38419E-5	4.8399E-3	9.36508E-2	2.73399E1	-3.26831E1	-3.27396E1	2.68124E1	1.20106E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.00453E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.8001E1	-8.10623E-4	-8.80004E1	1.43051E-4	4.69685E-3	9.3627E-2	2.73098E1	-3.26832E1	-3.28484E1	2.68018E1	1.2033E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.02922E-1
1.6E1	2.7E1	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80013E1	-8.10623E-4	-8.80005E1	-1.43051E-4	4.57764E-3	9.36747E-2	2.72941E1	-3.26634E1	-3.26095E1	2.67926E1	1.20096E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01871E-1
1.7E1	5.6E1	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80017E1	-8.34465E-4	-8.80007E1	1.43051E-4	4.69685E-3	9.35555E-2	2.73405E1	-3.26626E1	-3.25175E1	2.67842E1					
1.8E1	2.09E2	0.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80014E1	-8.10623E-4	-8.80007E1	5.00679E-4	4.55379E-3	9.37223E-2	2.72793E1	-3.26434E1	-3.25821E1	2.67944E1	1.198E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
1.9E1	3.53E2	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80015E1	-8.82149E-4	-8.80007E1	2.86102E-4	4.673E-3	9.36985E-2	2.72945E1	-3.26644E1	-3.24939E1	2.68304E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01085E-1
2.0E1	2.307E3	2.0E0	8.08E2	5.58E2	-7.286E-2	-8.80016E1	-5.48363E-4	-8.80003E1	1.19209E-4	4.52995E-3	9.34362E-2	2.73225E1	-3.2641E1	-3.25719E1	2.6798E1	1.19965E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00824E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80016E1	-6.91414E-4	-8.80004E1	4.76837E-5	4.57764E-3	9.35078E-2	2.72567E1	-3.27033E1	-3.26832E1	2.68082E1	1.20055E-7	2.52384E-3	2.52384E-3	6.29665E-3	3.01223E-1
2.2E1	1.71E2	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80017E1	-4.76837E-4	-8.80004E1	-4.76837E-5	4.76837E-3	9.33647E-2	2.73234E1	-3.26596E1	-3.25953E1	2.68124E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.80014E1	-7.15256E-4	-8.80003E1	-1.19209E-4	4.52995E-3	9.32932E-2	2.73183E1	-3.26801E1	-3.25996E1	2.68136E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99175E-1
