[Scan]
initial_time=2016-01-28T17:49:21
final_time=2016-01-28T17:49:40
ip_count=19
run=1026
dataset=3
scan=181
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.82873E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.55115E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.42274E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.68293E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.6127E-8
mult1=-1.03708E-8
mult2=-2.68328E-9
rf_tmon=-4.8889E-3
rf_agc=3.30529E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.30517E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64793E0
bslens_imon=2.50432E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1986E1
lens5a_imon=1.97696E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53627E1
cs_ef1b_imon=3.08261E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04782E1
cs_ea1_imon=1.23191E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06722E0
lens1_imon=1.29739E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64371E1
os_ef1alow_imon=2.97209E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.39932E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84209E1
cs_ef1a_imon=2.99538E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.19275E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1117E1
os_restr1_imon=4.31493E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.43177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64209E1
os_ef1bup_imon=3.05967E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25151E0
cs_ionrep_imon=9.54421E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93332E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.013E1
cs_anode1_imon=2.06019E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.90482E-8
tplens_vset=1.4E-1
tplens_vmon=1.6314E0
tplens_imon=-3.62597E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26493E1
iondef3_imon=1.48356E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26921E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02927E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.53157E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26685E0
ionrepsh_imon=9.29999E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34312E1
lens5b_imon=2.19109E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74779E1
cs_ef2b_imon=3.10033E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44677E0
os_ea2_imon=-6.03276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71345E1
cs_ef2a_imon=3.21397E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06093E0
os_ef2alow_imon=-2.8109E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75221E-1
os_ef2bup_imon=-5.36521E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11332E1
os_restr2_imon=3.37453E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23014E2
cs_ionfoca_imon=6.30353E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01838E1
cs_anode2_imon=2.09459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72922E1
iondef1_imon=1.08149E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68178E1
iondef4_imon=1.04368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.10015E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.46972E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13709E0
cs_ionaccel_imon=-1.21923E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.4724E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56741E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.7077E-1
window_imon=-1.20186E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39154E-4
mask2_vset=0.0E0
mask2_vmon=-1.86002E1
mask2_imon=-8.43906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.66124E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.5888E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.10556E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33309E1
os_fil1_imon=9.40022E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.073E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61127E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30902E1
cs_fil1_imon=9.22953E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29378E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63094E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57249E-2
os_fil2_imon=-2.86612E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.79977E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34396E-1
cs_fil2_imon=-3.27156E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=2.28884E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21951E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.82751E-1
res40_imon=-2.66146E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.05E2	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80017E1	-4.52995E-4	-8.80003E1	3.09944E-4	4.57764E-3	9.31501E-2	2.72862E1	-3.26785E1	-3.2606E1	2.67793E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99686E-1
2.0E0	9.09E3	3.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80015E1	-5.24521E-4	-8.80005E1	7.15256E-5	4.673E-3	9.34362E-2	2.73002E1	-3.2667E1	-3.25489E1	2.67972E1	1.20055E-7	2.52169E-3	2.52169E-3	6.28592E-3	3.0148E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80014E1	-4.29153E-4	-8.80008E1	2.86102E-4	4.8399E-3	9.31501E-2	2.73207E1	-3.26828E1	-3.27906E1	2.67862E1	1.2035E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.01742E-1
4.0E0	2.035E3	2.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80014E1	-6.67572E-4	-8.80004E1	2.14577E-4	5.07832E-3	9.35555E-2	2.73075E1	-3.26825E1	-3.26332E1	2.67956E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31009E-3	3.01095E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80018E1	-7.39098E-4	-8.80006E1	2.6226E-4	4.76837E-3	9.33886E-2	2.73159E1	-3.26603E1	-3.265E1	2.68082E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80014E1	-7.15256E-4	-8.80004E1	1.19209E-4	5.05447E-3	9.3317E-2	2.72762E1	-3.2672E1	-3.26248E1	2.68004E1	1.20069E-7	2.51662E-3	2.51662E-3	6.35692E-3	3.00824E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80016E1	-7.86781E-4	-8.80004E1	2.6226E-4	4.86374E-3	9.34362E-2	2.73009E1	-3.26759E1	-3.25864E1	2.68076E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80015E1	-7.62939E-4	-8.80003E1	4.29153E-4	4.69685E-3	9.3627E-2	2.72644E1	-3.26667E1	-3.2554E1	2.67958E1	1.20278E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80017E1	-6.67572E-4	-8.80006E1	5.24521E-4	4.60148E-3	9.35555E-2	2.73099E1	-3.26717E1	-3.2611E1	2.68034E1	1.2014E-7	2.51647E-3	2.51647E-3	6.31012E-3	3.01544E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80015E1	-8.34465E-4	-8.80003E1	4.52995E-4	4.60148E-3	9.35078E-2	2.73027E1	-3.26398E1	-3.25034E1	2.68016E1					
1.4E1	3.08E2	1.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80014E1	-1.00136E-3	-8.80004E1	2.14577E-4	4.62532E-3	9.37223E-2	2.72859E1	-3.27035E1	-3.25659E1	2.681E1	1.19965E-7	2.51334E-3	2.51334E-3	6.28552E-3	2.9952E-1
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80011E1	-5.48363E-4	-8.80004E1	4.05312E-4	4.64916E-3	9.35555E-2	2.73201E1	-3.26428E1	-3.26729E1	2.68106E1	1.19601E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.9978E-1
1.6E1	3.8E1	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80011E1	-5.96046E-4	-8.80003E1	5.72205E-4	4.72069E-3	9.36031E-2	2.7308E1	-3.26472E1	-3.2741E1	2.68172E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9952E-1
1.7E1	4.5E1	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.8001E1	-5.48363E-4	-8.80002E1	6.4373E-4	5.00679E-3	9.36031E-2	2.73104E1	-3.26655E1	-3.25617E1	2.68343E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9841E-1
1.8E1	1.91E2	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80013E1	-3.8147E-4	-8.80001E1	1.19209E-4	4.673E-3	9.38416E-2	2.71855E1	-3.25737E1	-3.26524E1	2.68088E1	1.20158E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00453E-1
1.9E1	3.29E2	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80012E1	-6.4373E-4	-8.80005E1	2.14577E-4	4.41074E-3	9.36985E-2	2.73231E1	-3.26452E1	-3.25119E1	2.68232E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
2.0E1	2.284E3	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80015E1	-4.05312E-4	-8.80004E1	2.38419E-5	4.74453E-3	9.37223E-2	2.73228E1	-3.26974E1	-3.26526E1	2.67944E1	1.19809E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00041E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80016E1	-7.62939E-4	-8.80003E1	3.57628E-4	4.45843E-3	9.3627E-2	2.72992E1	-3.26832E1	-3.26425E1	2.68157E1	1.20055E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.04322E-1
2.2E1	1.59E2	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.80015E1	-6.19888E-4	-8.80006E1	1.19209E-4	4.50611E-3	9.36508E-2	2.73329E1	-3.26619E1	-3.26573E1	2.6792E1	1.19902E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80017E1	-7.62939E-4	-8.80003E1	4.76837E-5	4.64916E-3	9.35316E-2	2.72922E1	-3.26921E1	-3.26493E1	2.68178E1	1.19697E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.00453E-1
