[Scan]
initial_time=2016-01-28T17:50:40
final_time=2016-01-28T17:51:00
ip_count=19
run=1026
dataset=3
scan=184
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.81778E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.68824E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.43837E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.67967E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.62171E-8
mult1=-9.6561E-9
mult2=-2.65873E-9
rf_tmon=-4.66864E-3
rf_agc=3.27628E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.32937E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.69277E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20301E1
lens5a_imon=1.991E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04934E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=3.08794E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05391E1
cs_ea1_imon=1.24514E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06719E0
lens1_imon=1.31567E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64981E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03967E1
cs_ea2_imon=1.39727E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84106E1
cs_ef1a_imon=2.9964E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.16335E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10823E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15222E1
os_ea1_imon=2.43621E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24429E0
cs_ionrep_imon=9.60346E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93532E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02079E1
cs_anode1_imon=2.04098E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.88658E-8
tplens_vset=1.4E-1
tplens_vmon=1.6174E0
tplens_imon=-4.0389E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24968E1
iondef3_imon=1.48847E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.58581E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.984E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.65507E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31879E0
ionrepsh_imon=9.36553E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33586E1
lens5b_imon=2.18062E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.10524E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42213E0
os_ea2_imon=-7.8241E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00612E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.17371E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07378E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.4877E-1
os_ef2bup_imon=-5.45222E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.34958E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01461E1
cs_anode2_imon=2.10369E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73736E1
iondef1_imon=1.09373E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.05088E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.32851E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13735E0
cs_ionaccel_imon=-1.04097E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.46999E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.39592E-6
window_vset=0.0E0
window_vmon=1.48267E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39048E-4
mask2_vset=0.0E0
mask2_vmon=-1.86086E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=7.57387E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.71589E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=6.87812E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46773E0
defgridb_imon=6.09224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3331E1
os_fil1_imon=9.39957E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07041E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60212E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30924E1
cs_fil1_imon=9.24875E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29502E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62513E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.53802E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.41505E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3742E-1
cs_fil2_imon=-2.68999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.3978E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21737E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.07055E-1
res40_imon=-2.39966E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.15E2	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80012E1	-6.67572E-4	-8.80005E1	1.66893E-4	4.76837E-3	9.35316E-2	2.73252E1	-3.26747E1	-3.26221E1	2.67696E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00197E-1
2.0E0	9.014E3	1.0E1	3.16E2	1.6E2	-7.23964E-2	-8.80012E1	-6.4373E-4	-8.80005E1	-9.53674E-5	5.00679E-3	9.34839E-2	2.72765E1	-3.26794E1	-3.24931E1	2.68088E1	1.20028E-7	2.51886E-3	2.51886E-3	6.29703E-3	3.00989E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80012E1	-7.15256E-4	-8.80008E1	-2.38419E-5	5.17368E-3	9.34124E-2	2.7393E1	-3.26773E1	-3.25824E1	2.67885E1	1.20171E-7	2.51758E-3	2.51758E-3	6.29581E-3	3.00363E-1
4.0E0	2.111E3	1.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80014E1	-8.82149E-4	-8.80004E1	3.8147E-4	4.81606E-3	9.33886E-2	2.73285E1	-3.26843E1	-3.26891E1	2.6807E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80013E1	-7.39098E-4	-8.80002E1	3.33786E-4	4.62532E-3	9.36031E-2	2.73261E1	-3.26771E1	-3.2486E1	2.6825E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99686E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80017E1	-9.29832E-4	-8.80003E1	-4.76837E-5	4.8399E-3	9.3627E-2	2.73111E1	-3.26609E1	-3.26729E1	2.68148E1	1.19925E-7	2.52362E-3	2.52362E-3	6.31299E-3	2.98819E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80014E1	-6.91414E-4	-8.80006E1	1.66893E-4	4.69685E-3	9.377E-2	2.72955E1	-3.26861E1	-3.24908E1	2.68028E1	1.20017E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9926E-1
8.0E0	3.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80014E1	-7.15256E-4	-8.80005E1	0.0E0	4.64916E-3	9.35793E-2	2.73171E1	-3.2653E1	-3.26014E1	2.68046E1	1.19913E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.99E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.44059E-2	-8.80016E1	-2.6226E-4	-8.80006E1	2.14577E-4	4.72069E-3	9.3317E-2	2.72715E1	-3.26651E1	-3.26014E1	2.6816E1	1.20383E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.02659E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80019E1	-4.76837E-4	-8.80007E1	4.05312E-4	4.48227E-3	9.33647E-2	2.72809E1	-3.26856E1	-3.2577E1	2.68172E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.02133E-1
1.4E1	3.02E2	0.0E0	5.66E2	3.82E2	-7.40967E-2	-8.80015E1	-7.15256E-4	-8.80005E1	9.53674E-5	4.48227E-3	9.34362E-2	2.72919E1	-3.27077E1	-3.26909E1	2.67995E1	1.19697E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.02769E-1
1.5E1	9.0E0	0.0E0	6.06E2	4.11E2	-7.38649E-2	-8.80014E1	-5.00679E-4	-8.80005E1	1.66893E-4	5.17368E-3	9.34601E-2	2.72715E1	-3.26337E1	-3.26773E1	2.6807E1	1.19965E-7	2.52647E-3	2.52647E-3	6.31288E-3	3.00824E-1
1.6E1	2.6E1	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80016E1	-3.8147E-4	-8.80005E1	1.43051E-4	5.10216E-3	9.35316E-2	2.73021E1	-3.26679E1	-3.2659E1	2.68094E1	1.19902E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.0148E-1
1.7E1	4.7E1	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80012E1	-4.76837E-4	-8.80005E1	1.43051E-4	4.95911E-3	9.34839E-2	2.73129E1	-3.26867E1	-3.2611E1	2.67896E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.98665E-1
1.8E1	2.05E2	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80017E1	-4.05312E-4	-8.80003E1	4.05312E-4	4.95911E-3	9.32455E-2	2.72991E1	-3.26464E1	-3.26422E1	2.68298E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01347E-1
1.9E1	3.34E2	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80017E1	-3.8147E-4	-8.79999E1	1.43051E-4	5.14984E-3	9.29832E-2	2.7346E1	-3.26549E1	-3.27354E1	2.68304E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01871E-1
2.0E1	2.185E3	2.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80017E1	-4.29153E-4	-8.80002E1	-2.38419E-5	5.126E-3	9.34362E-2	2.7324E1	-3.26419E1	-3.25535E1	2.68012E1	1.19705E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.00041E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80018E1	-4.05312E-4	-8.80002E1	7.15256E-5	5.22137E-3	9.34124E-2	2.72931E1	-3.26759E1	-3.27113E1	2.67992E1	1.198E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.04842E-1
2.2E1	1.55E2	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80016E1	-3.8147E-4	-8.79999E1	1.90735E-4	4.52995E-3	9.36747E-2	2.72886E1	-3.26419E1	-3.26124E1	2.68148E1	1.20226E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01871E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80013E1	-3.8147E-4	-8.80003E1	3.09944E-4	4.76837E-3	9.36031E-2	2.73736E1	-3.26657E1	-3.24968E1	2.68034E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01995E-1
