[Scan]
initial_time=2016-01-28T17:52:27
final_time=2016-01-28T17:52:46
ip_count=19
run=1026
dataset=3
scan=188
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.80315E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-6.19519E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.44302E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.60606E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.62218E-8
mult1=-1.03665E-8
mult2=-2.64276E-9
rf_tmon=-5.2214E-3
rf_agc=3.2931E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.19753E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68596E0
bslens_imon=2.41518E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=3.09334E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02045E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05258E1
cs_ea1_imon=1.23685E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0708E0
lens1_imon=1.56441E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64428E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.40303E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83763E1
cs_ef1a_imon=3.00108E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.16409E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.28265E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15408E1
os_ea1_imon=2.43477E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.0746E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=9.54578E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93474E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01827E1
cs_anode1_imon=2.04026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.88784E-8
tplens_vset=1.4E-1
tplens_vmon=1.61319E0
tplens_imon=-3.20976E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26615E1
iondef3_imon=1.48775E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26633E1
iondef2_imon=1.58184E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.98508E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=8.59952E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30497E0
ionrepsh_imon=9.29704E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3379E1
lens5b_imon=2.17954E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74892E1
cs_ef2b_imon=3.12938E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42273E0
os_ea2_imon=-7.8962E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05576E0
os_ef2alow_imon=-2.59788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69193E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10823E1
os_restr2_imon=3.35968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.29063E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.09504E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.08976E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.0726E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.98994E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.32874E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-1.10944E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47122E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56267E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=1.70491E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-8.06708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.57748E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.61856E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.20977E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38352E0
defgridb_imon=6.04898E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3332E1
os_fil1_imon=9.38324E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07035E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60176E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30908E1
cs_fil1_imon=9.24929E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.37551E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62612E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.60251E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86302E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.41505E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21959E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.2116E-1
res40_imon=-2.54742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.11E2	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80015E1	-4.05312E-4	-8.80005E1	2.6226E-4	4.81606E-3	9.34839E-2	2.73109E1	-3.2666E1	-3.27384E1	2.68001E1	1.19819E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99613E-1
2.0E0	8.953E3	5.0E0	3.16E2	1.6E2	-7.23189E-2	-8.80014E1	-4.76837E-5	-8.80002E1	4.05312E-4	4.76837E-3	9.35316E-2	2.73075E1	-3.26609E1	-3.25893E1	2.67951E1	1.20142E-7	2.51498E-3	2.51498E-3	6.29684E-3	3.01609E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80015E1	-2.38419E-4	-8.80004E1	1.90735E-4	4.673E-3	9.37939E-2	2.73567E1	-3.26712E1	-3.26434E1	2.67972E1	1.20084E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.0201E-1
4.0E0	2.055E3	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80013E1	-4.29153E-4	-8.80003E1	2.38419E-5	4.60148E-3	9.36747E-2	2.72847E1	-3.2629E1	-3.2593E1	2.68274E1	1.20192E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.02115E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80014E1	-5.00679E-4	-8.80002E1	-7.15256E-5	4.52995E-3	9.35793E-2	2.72757E1	-3.265E1	-3.25503E1	2.68256E1	1.19809E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80015E1	-5.96046E-4	-8.80004E1	1.66893E-4	4.76837E-3	9.40084E-2	2.72654E1	-3.26338E1	-3.25046E1	2.68328E1	1.20017E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80016E1	-2.86102E-4	-8.80005E1	2.86102E-4	4.88758E-3	9.37939E-2	2.72774E1	-3.26585E1	-3.2639E1	2.68076E1	1.20122E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80018E1	-5.00679E-4	-8.80003E1	3.57628E-4	4.72069E-3	9.36747E-2	2.73027E1	-3.26554E1	-3.26218E1	2.68058E1	1.19544E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99941E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80016E1	-7.15256E-4	-8.80005E1	4.29153E-4	5.126E-3	9.36031E-2	2.73574E1	-3.26867E1	-3.24614E1	2.68226E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80014E1	-9.53674E-4	-8.80003E1	1.43051E-4	5.14984E-3	9.35793E-2	2.73207E1	-3.26627E1	-3.25671E1	2.67704E1	1.19872E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.00144E-1
1.4E1	2.66E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80016E1	-7.15256E-4	-8.80002E1	-7.15256E-5	4.93526E-3	9.34362E-2	2.73098E1	-3.26596E1	-3.27015E1	2.68292E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0148E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80014E1	-6.91414E-4	-8.80005E1	4.76837E-5	4.93526E-3	9.34124E-2	2.73279E1	-3.26506E1	-3.26861E1	2.6831E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01085E-1
1.6E1	2.3E1	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80012E1	-5.72205E-4	-8.80005E1	2.38419E-5	5.126E-3	9.32455E-2	2.73195E1	-3.26915E1	-3.25317E1	2.68028E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01085E-1
1.7E1	5.1E1	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80012E1	-5.96046E-4	-8.80007E1	3.09944E-4	5.05447E-3	9.34124E-2	2.73116E1	-3.26691E1	-3.26443E1	2.68059E1	1.19861E-7	2.50898E-3	2.50898E-3	6.32386E-3	3.01609E-1
1.8E1	2.13E2	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80016E1	-7.86781E-4	-8.80004E1	4.05312E-4	4.98295E-3	9.3627E-2	2.72903E1	-3.26903E1	-3.27812E1	2.68118E1	1.19953E-7	2.51525E-3	2.51525E-3	6.33977E-3	2.99941E-1
1.9E1	3.37E2	0.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80017E1	-5.48363E-4	-8.80006E1	2.38419E-5	5.07832E-3	9.377E-2	2.72855E1	-3.26334E1	-3.25825E1	2.68166E1	1.198E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.98665E-1
2.0E1	2.248E3	3.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80018E1	-7.86781E-4	-8.80003E1	0.0E0	4.86374E-3	9.36031E-2	2.73204E1	-3.26632E1	-3.25251E1	2.68178E1	1.20383E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80015E1	-7.62939E-4	-8.80006E1	1.19209E-4	4.93526E-3	9.33647E-2	2.73081E1	-3.26621E1	-3.27342E1	2.68123E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
2.2E1	1.5E2	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80013E1	-5.96046E-4	-8.80001E1	4.76837E-5	4.95911E-3	9.34839E-2	2.73187E1	-3.26903E1	-3.26561E1	2.67968E1	1.20055E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80012E1	-4.29153E-4	-8.80005E1	2.38419E-4	4.52995E-3	9.3627E-2	2.73021E1	-3.26633E1	-3.26615E1	2.67944E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.99941E-1
