[Scan]
initial_time=2016-01-28T17:54:40
final_time=2016-01-28T17:55:00
ip_count=19
run=1026
dataset=3
scan=193
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.84137E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.95069E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.46834E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.61979E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.62436E-8
mult1=-9.02999E-9
mult2=-1.87426E-9
rf_tmon=-9.72759E-3
rf_agc=2.7079E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.35214E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66473E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.202E1
lens5a_imon=1.9859E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05025E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53618E1
cs_ef1b_imon=3.08993E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04645E2
lens23_imon=1.02263E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0482E1
cs_ea1_imon=1.24654E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05589E0
lens1_imon=1.38056E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64615E1
os_ef1alow_imon=2.96605E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04071E1
cs_ea2_imon=1.40227E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84407E1
cs_ef1a_imon=3.00385E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.16337E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11092E1
os_restr1_imon=4.29654E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15468E1
os_ea1_imon=2.44711E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63573E1
os_ef1bup_imon=3.07683E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.234E0
cs_ionrep_imon=9.74003E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91849E2
cs_nozzle_imon=1.93311E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01846E1
cs_anode1_imon=2.0364E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.8815E-8
tplens_vset=1.4E-1
tplens_vmon=1.63644E0
tplens_imon=-3.86419E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26236E1
iondef3_imon=1.50485E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25473E1
iondef2_imon=1.57485E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98263E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=8.59201E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25335E0
ionrepsh_imon=9.32824E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.16934E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12773E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40184E0
os_ea2_imon=-5.77343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.18425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07889E0
os_ef2alow_imon=-2.68285E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55216E-1
os_ef2bup_imon=-5.38125E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10868E1
os_restr2_imon=3.36539E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0194E1
cs_anode2_imon=2.09179E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72534E1
iondef1_imon=1.07658E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67938E1
iondef4_imon=1.07231E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.01472E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.27818E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12328E0
cs_ionaccel_imon=-1.14839E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47181E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56068E1
einzel_imon=7.63544E-6
window_vset=0.0E0
window_vmon=1.86409E-1
window_imon=-1.16336E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86531E1
mask2_imon=-6.65599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.75218E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.50556E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.14197E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40874E0
defgridb_imon=6.02263E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33259E1
os_fil1_imon=9.39919E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07092E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6027E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30872E1
cs_fil1_imon=9.242E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.21465E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62307E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55885E-2
os_fil2_imon=-2.81844E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9284E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.13847E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-2.42547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.03018E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21798E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=3.02875E-1
chamber_ion_pmon=1.20344E-7
chamber_cvt_pmon=2.51077E-3
foreline_cvt_pmon=2.51077E-3
chamber_tmon=1.40058E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.66246E-1
res40_imon=-2.58929E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.93E2	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80013E1	-6.19888E-4	-8.80005E1	1.66893E-4	4.95911E-3	9.3627E-2	2.73151E1	-3.26467E1	-3.2767E1	2.6783E1	1.19991E-7	2.51952E-3	2.51952E-3	6.31879E-3	3.00251E-1
2.0E0	8.954E3	1.3E1	3.16E2	1.6E2	-7.31692E-2	-8.80016E1	-4.29153E-4	-8.80009E1	0.0E0	4.93526E-3	9.3627E-2	2.72812E1	-3.2626E1	-3.26548E1	2.67902E1	1.198E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.0071E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80014E1	-1.90735E-4	-8.80008E1	1.66893E-4	4.98295E-3	9.34839E-2	2.73427E1	-3.26915E1	-3.26101E1	2.68169E1	1.19766E-7	2.51359E-3	2.51359E-3	6.29067E-3	3.00942E-1
4.0E0	1.996E3	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80014E1	-3.09944E-4	-8.80006E1	0.0E0	5.00679E-3	9.34362E-2	2.72961E1	-3.26759E1	-3.2635E1	2.68142E1	1.20142E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80014E1	-5.96046E-4	-8.80006E1	2.14577E-4	5.03063E-3	9.35078E-2	2.72937E1	-3.26554E1	-3.26987E1	2.67902E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80013E1	-4.29153E-4	-8.80007E1	4.76837E-5	4.88758E-3	9.3627E-2	2.73187E1	-3.26301E1	-3.27257E1	2.68268E1	1.20017E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.02396E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80015E1	-1.66893E-4	-8.80008E1	1.90735E-4	4.98295E-3	9.35316E-2	2.72738E1	-3.26463E1	-3.25768E1	2.67926E1	1.19913E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80015E1	-5.00679E-4	-8.80004E1	-4.76837E-5	4.81606E-3	9.35078E-2	2.73267E1	-3.2619E1	-3.24752E1	2.68232E1	1.20325E-7	2.51783E-3	2.51783E-3	6.33341E-3	3.01733E-1
1.2E1	7.0E0	0.0E0	4.85E2	3.23E2	-7.42513E-2	-8.80014E1	-4.52995E-4	-8.80006E1	9.53674E-5	4.76837E-3	9.3317E-2	2.72925E1	-3.26254E1	-3.25689E1	2.68298E1	1.20171E-7	2.51874E-3	2.51874E-3	6.29002E-3	3.02303E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80015E1	-5.00679E-4	-8.80007E1	2.86102E-4	4.98295E-3	9.33886E-2	2.73434E1	-3.26785E1	-3.25859E1	2.67962E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01085E-1
1.4E1	3.06E2	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.80016E1	-9.05991E-4	-8.80008E1	5.00679E-4	5.00679E-3	9.33647E-2	2.72996E1	-3.26805E1	-3.27007E1	2.67896E1	1.20209E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99175E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80015E1	-6.4373E-4	-8.80007E1	1.19209E-4	4.93526E-3	9.35078E-2	2.73039E1	-3.26567E1	-3.26831E1	2.68154E1	1.19713E-7	2.5147E-3	2.5147E-3	6.29624E-3	3.00144E-1
1.6E1	3.3E1	0.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80014E1	-8.10623E-4	-8.80007E1	4.76837E-5	5.14984E-3	9.34839E-2	2.72895E1	-3.26939E1	-3.24752E1	2.68316E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
1.7E1	5.0E1	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80015E1	-7.62939E-4	-8.8001E1	7.15256E-5	5.05447E-3	9.33647E-2	2.73134E1	-3.2662E1	-3.25918E1	2.68105E1	1.19757E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.01347E-1
1.8E1	1.89E2	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80012E1	-5.72205E-4	-8.80009E1	7.15256E-5	4.81606E-3	9.35078E-2	2.72986E1	-3.26502E1	-3.26467E1	2.68088E1	1.20106E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.00966E-1
1.9E1	3.0E2	0.0E0	7.68E2	5.29E2	-7.39421E-2	-8.80012E1	-5.72205E-4	-8.80007E1	-7.15256E-5	5.14984E-3	9.35078E-2	2.73243E1	-3.26585E1	-3.25587E1	2.67944E1	1.19953E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.9892E-1
2.0E1	2.245E3	1.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80013E1	-4.76837E-4	-8.80007E1	-2.6226E-4	5.05447E-3	9.3317E-2	2.73147E1	-3.26422E1	-3.25287E1	2.68196E1	1.19757E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.97963E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80016E1	-5.00679E-4	-8.80005E1	-2.38419E-5	5.10216E-3	9.35078E-2	2.72775E1	-3.26549E1	-3.26825E1	2.67896E1	1.20122E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.01085E-1
2.2E1	1.58E2	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80017E1	-6.67572E-4	-8.80005E1	0.0E0	4.72069E-3	9.34839E-2	2.7326E1	-3.26747E1	-3.24858E1	2.67862E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02396E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80016E1	-4.29153E-4	-8.80007E1	3.33786E-4	4.86374E-3	9.3317E-2	2.72534E1	-3.25473E1	-3.26236E1	2.67938E1	1.20344E-7	2.51077E-3	2.51077E-3	6.32858E-3	3.02875E-1
