[Scan]
initial_time=2016-01-28T17:55:07
final_time=2016-01-28T17:55:26
ip_count=19
run=1026
dataset=3
scan=194
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.80393E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-5.92864E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.43867E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-1.62841E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.62732E-8
mult1=-1.10953E-8
mult2=-2.66838E-9
rf_tmon=-4.60386E-3
rf_agc=3.32442E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=5.53739E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66253E0
bslens_imon=2.39716E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20319E1
lens5a_imon=1.97514E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5382E1
cs_ef1b_imon=3.08577E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02236E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04363E1
cs_ea1_imon=1.24658E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06839E0
lens1_imon=1.15706E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.9672E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04051E1
cs_ea2_imon=1.4052E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84064E1
cs_ef1a_imon=2.99423E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.15578E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15197E1
os_ea1_imon=2.45424E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63954E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=9.76568E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91885E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=2.04495E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.87537E-8
tplens_vset=1.4E-1
tplens_vmon=1.63422E0
tplens_imon=-4.18309E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25859E1
iondef3_imon=1.49352E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26455E1
iondef2_imon=1.5703E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98306E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=8.28779E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22506E0
ionrepsh_imon=9.39437E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33862E1
lens5b_imon=2.16837E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.13082E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40591E0
os_ea2_imon=-5.30063E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71017E1
cs_ef2a_imon=3.17119E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05756E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.58381E-1
os_ef2bup_imon=-5.37293E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.35931E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.30397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.09504E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72738E1
iondef1_imon=1.08003E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67902E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.94007E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.28945E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.14909E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.67703E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-1.14188E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.00429E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93746E3
defgrida_imon=6.25446E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.46572E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.23643E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.37645E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06897E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60184E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30905E1
cs_fil1_imon=9.23385E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34248E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62163E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56381E-2
os_fil2_imon=-2.65395E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.50528E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.38366E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43054E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21776E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.96533E-1
res40_imon=-2.5294E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.63E2	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80014E1	-9.53674E-4	-8.80002E1	9.53674E-5	5.126E-3	9.34124E-2	2.72827E1	-3.26567E1	-3.26508E1	2.68118E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9978E-1
2.0E0	9.033E3	8.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80016E1	-8.82149E-4	-8.80004E1	4.76837E-5	4.74453E-3	9.35555E-2	2.73259E1	-3.26468E1	-3.26474E1	2.67901E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80017E1	-6.91414E-4	-8.80007E1	4.29153E-4	4.98295E-3	9.31978E-2	2.72802E1	-3.26648E1	-3.25605E1	2.67875E1	1.19872E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.00942E-1
4.0E0	2.026E3	2.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80015E1	-6.19888E-4	-8.80004E1	2.14577E-4	4.98295E-3	9.34124E-2	2.72823E1	-3.26981E1	-3.24956E1	2.68064E1	1.1974E-7	2.51393E-3	2.51393E-3	6.30212E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80017E1	-7.86781E-4	-8.80006E1	1.90735E-4	5.07832E-3	9.35316E-2	2.73231E1	-3.26621E1	-3.265E1	2.68011E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80016E1	-4.05312E-4	-8.80004E1	-2.38419E-5	5.14984E-3	9.34124E-2	2.72803E1	-3.26585E1	-3.27452E1	2.68196E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80016E1	-8.58307E-4	-8.80004E1	3.33786E-4	5.19753E-3	9.35316E-2	2.73057E1	-3.26284E1	-3.25119E1	2.6816E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.03027E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80018E1	-1.12057E-3	-8.80004E1	3.33786E-4	4.79221E-3	9.37939E-2	2.72829E1	-3.26597E1	-3.25948E1	2.68238E1	1.20017E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01347E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80017E1	-1.07288E-3	-8.80004E1	3.33786E-4	4.76837E-3	9.35078E-2	2.73175E1	-3.26708E1	-3.27157E1	2.68134E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.99E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80018E1	-1.0252E-3	-8.80006E1	1.43051E-4	4.81606E-3	9.36031E-2	2.72696E1	-3.26621E1	-3.25425E1	2.68238E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.9892E-1
1.4E1	2.99E2	0.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80016E1	-9.53674E-4	-8.80006E1	1.66893E-4	4.91142E-3	9.37462E-2	2.73452E1	-3.26909E1	-3.25942E1	2.68004E1	1.19913E-7	2.52318E-3	2.52318E-3	6.29098E-3	2.98222E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80017E1	-8.82149E-4	-8.80005E1	-1.19209E-4	4.57764E-3	9.35793E-2	2.72603E1	-3.26473E1	-3.27094E1	2.68116E1	1.20055E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.01738E-1
1.6E1	3.0E1	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80015E1	-7.39098E-4	-8.80005E1	0.0E0	4.91142E-3	9.34839E-2	2.73021E1	-3.26767E1	-3.25086E1	2.68016E1	1.20161E-7	2.51244E-3	2.51244E-3	6.3023E-3	3.02097E-1
1.7E1	6.2E1	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.80015E1	-8.58307E-4	-8.80005E1	-2.38419E-5	4.43459E-3	9.34124E-2	2.72993E1	-3.26792E1	-3.27013E1	2.68069E1	1.19902E-7	2.51417E-3	2.51417E-3	6.34518E-3	2.98665E-1
1.8E1	2.16E2	0.0E0	7.27E2	5.0E2	-7.42513E-2	-8.80012E1	-1.04904E-3	-8.80003E1	-1.90735E-4	5.07832E-3	9.34839E-2	2.73175E1	-3.26809E1	-3.25995E1	2.68028E1	1.20132E-7	2.50968E-3	2.50968E-3	6.31332E-3	2.99634E-1
1.9E1	3.33E2	0.0E0	7.68E2	5.29E2	-7.47149E-2	-8.80013E1	-6.19888E-4	-8.80005E1	-9.53674E-5	4.673E-3	9.35316E-2	2.73308E1	-3.26713E1	-3.26707E1	2.68088E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.97901E-1
2.0E1	2.196E3	0.0E0	8.08E2	5.58E2	-7.41738E-2	-8.80012E1	-7.62939E-4	-8.80005E1	2.38419E-5	4.79221E-3	9.36985E-2	2.72889E1	-3.267E1	-3.26063E1	2.681E1	1.20084E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.99348E-1
2.1E1	7.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80012E1	-5.72205E-4	-8.80005E1	-2.38419E-5	4.64916E-3	9.37462E-2	2.73129E1	-3.26771E1	-3.26753E1	2.67944E1	1.1969E-7	2.51498E-3	2.51498E-3	6.32858E-3	3.03129E-1
2.2E1	1.67E2	0.0E0	8.89E2	6.17E2	-7.44831E-2	-8.80012E1	-7.39098E-4	-8.80007E1	1.19209E-4	4.88758E-3	9.31978E-2	2.72799E1	-3.26735E1	-3.25647E1	2.67816E1	1.20297E-7	2.52362E-3	2.52362E-3	6.30182E-3	3.03887E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80015E1	-6.67572E-4	-8.80009E1	0.0E0	4.98295E-3	9.37223E-2	2.72738E1	-3.26455E1	-3.25859E1	2.67902E1	1.19851E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01738E-1
