[Scan]
initial_time=2016-01-28T17:56:00
final_time=2016-01-28T17:56:20
ip_count=19
run=1026
dataset=3
scan=196
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.81442E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-5.76341E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.41058E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.63647E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.62712E-8
mult1=-1.03183E-8
mult2=-2.66472E-9
rf_tmon=-4.55448E-3
rf_agc=3.31653E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.89693E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6497E0
bslens_imon=2.36983E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19801E1
lens5a_imon=1.98545E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12429E2
lens4a_imon=2.05033E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53959E1
cs_ef1b_imon=3.0919E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04579E2
lens23_imon=1.02248E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05224E1
cs_ea1_imon=1.23403E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05366E0
lens1_imon=1.38587E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.9636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.41419E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=3.00721E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.1573E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10997E1
os_restr1_imon=4.29202E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15329E1
os_ea1_imon=2.43743E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25269E0
cs_ionrep_imon=9.72118E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.04747E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.88117E-8
tplens_vset=1.4E-1
tplens_vmon=1.63435E0
tplens_imon=-2.63493E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26008E1
iondef3_imon=1.49241E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26404E1
iondef2_imon=1.56922E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=8.61037E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28631E0
ionrepsh_imon=9.45572E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74483E1
cs_ef2b_imon=3.12866E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42435E0
os_ea2_imon=-6.74064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00371E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06237E0
os_ef2alow_imon=-2.7961E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80005E-1
os_ef2bup_imon=-5.45943E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11021E1
os_restr2_imon=3.36869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.29787E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01983E1
cs_anode2_imon=2.09504E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7257E1
iondef1_imon=1.10378E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.08161E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.02353E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.32899E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.14188E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56261E1
einzel_imon=7.54729E-6
window_vset=0.0E0
window_vmon=1.68088E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82659E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-8.24728E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92669E3
multa_neg_imon=7.18696E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.41183E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50134E3
multb_neg_imon=7.00291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4026E0
defgridb_imon=6.14284E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33304E1
os_fil1_imon=9.40678E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07353E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60107E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30851E1
cs_fil1_imon=9.2577E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31184E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62008E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.62314E-2
os_fil2_imon=-2.76207E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.61098E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36902E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13021E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21816E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34099E-3
inlet_lpb_pmon=3.03081E-1
chamber_ion_pmon=1.19925E-7
chamber_cvt_pmon=2.51581E-3
foreline_cvt_pmon=2.51581E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.26276E-1
res40_imon=-2.62671E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.19E2	1.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80018E1	-5.72205E-4	-8.80005E1	3.57628E-4	4.62532E-3	9.33886E-2	2.72927E1	-3.26773E1	-3.26997E1	2.68262E1	1.19991E-7	2.51498E-3	2.51498E-3	6.31269E-3	2.99845E-1
2.0E0	8.915E3	5.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80015E1	-6.67572E-4	-8.80004E1	4.76837E-5	4.45843E-3	9.34601E-2	2.73135E1	-3.26627E1	-3.25058E1	2.68163E1	1.19861E-7	2.50789E-3	2.50789E-3	6.31288E-3	2.99E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80014E1	-4.29153E-4	-8.80004E1	3.33786E-4	4.79221E-3	9.3627E-2	2.72859E1	-3.2626E1	-3.25467E1	2.67989E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00041E-1
4.0E0	2.043E3	3.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80011E1	-7.86781E-4	-8.80006E1	9.53674E-5	4.74453E-3	9.35316E-2	2.7301E1	-3.26585E1	-3.25576E1	2.68022E1	1.19913E-7	2.51662E-3	2.51662E-3	6.28006E-3	3.01347E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.34782E-2	-8.80012E1	-8.34465E-4	-8.80002E1	-2.38419E-5	4.55379E-3	9.36031E-2	2.73075E1	-3.26903E1	-3.24656E1	2.68052E1	1.20106E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.03286E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80011E1	-1.07288E-3	-8.80001E1	2.38419E-5	4.8399E-3	9.36031E-2	2.72896E1	-3.2657E1	-3.24628E1	2.6797E1	1.20435E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.03449E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.49466E-2	-8.80012E1	-7.39098E-4	-8.80001E1	1.43051E-4	4.72069E-3	9.32217E-2	2.73187E1	-3.27105E1	-3.24668E1	2.68185E1	1.2011E-7	2.51112E-3	2.51112E-3	6.32564E-3	3.00197E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.46377E-2	-8.80011E1	-7.62939E-4	-8.80004E1	1.90735E-4	4.69685E-3	9.34362E-2	2.73155E1	-3.26891E1	-3.2506E1	2.68184E1	1.19942E-7	2.51532E-3	2.51532E-3	6.32118E-3	2.98499E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80011E1	-7.15256E-4	-8.80003E1	-1.66893E-4	4.88758E-3	9.34601E-2	2.72827E1	-3.26652E1	-3.25365E1	2.67989E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01609E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.39421E-2	-8.80014E1	-9.29832E-4	-8.80004E1	1.90735E-4	4.76837E-3	9.39369E-2	2.73051E1	-3.26714E1	-3.27239E1	2.68007E1	1.1988E-7	2.51679E-3	2.51679E-3	6.31779E-3	3.01485E-1
1.4E1	2.4E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80013E1	-8.10623E-4	-8.80002E1	2.38419E-5	4.86374E-3	9.34362E-2	2.73267E1	-3.26891E1	-3.25683E1	2.68064E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80013E1	-6.19888E-4	-8.80004E1	0.0E0	4.98295E-3	9.35078E-2	2.72953E1	-3.2645E1	-3.26572E1	2.68454E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00824E-1
1.6E1	3.2E1	0.0E0	6.47E2	4.41E2	-7.43285E-2	-8.80013E1	-7.86781E-4	-8.80006E1	4.76837E-5	5.00679E-3	9.32217E-2	2.72998E1	-3.2667E1	-3.26457E1	2.67985E1	1.20226E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00041E-1
1.7E1	4.5E1	0.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80012E1	-5.00679E-4	-8.80006E1	4.29153E-4	4.98295E-3	9.36985E-2	2.73297E1	-3.26797E1	-3.25667E1	2.67982E1	1.20038E-7	2.52581E-3	2.52581E-3	6.31234E-3	3.01138E-1
1.8E1	2.1E2	2.0E0	7.27E2	5.0E2	-7.30918E-2	-8.80012E1	-4.05312E-4	-8.80006E1	2.38419E-5	5.36442E-3	9.34124E-2	2.72578E1	-3.26788E1	-3.27437E1	2.67881E1	1.20055E-7	2.51833E-3	2.51833E-3	6.32087E-3	2.99686E-1
1.9E1	3.68E2	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80013E1	-4.05312E-4	-8.80003E1	5.24521E-4	4.8399E-3	9.32932E-2	2.71784E1	-3.2626E1	-3.27295E1	2.6792E1	1.19773E-7	2.52058E-3	2.52058E-3	6.33297E-3	2.98696E-1
2.0E1	2.253E3	1.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80011E1	-3.33786E-4	-8.80003E1	3.8147E-4	4.93526E-3	9.34839E-2	2.73315E1	-3.26766E1	-3.26596E1	2.68001E1	1.19958E-7	2.51709E-3	2.51709E-3	6.34982E-3	3.006E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80012E1	-3.57628E-4	-8.80006E1	9.53674E-5	4.86374E-3	9.34362E-2	2.73267E1	-3.26626E1	-3.26945E1	2.67967E1	1.1986E-7	2.51723E-3	2.51723E-3	6.31242E-3	3.00532E-1
2.2E1	1.64E2	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80014E1	-5.00679E-4	-8.80001E1	2.14577E-4	4.79221E-3	9.34839E-2	2.72964E1	-3.26223E1	-3.24987E1	2.68142E1	1.20002E-7	2.52084E-3	2.52084E-3	6.32622E-3	3.01946E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80015E1	-5.48363E-4	-8.80002E1	2.6226E-4	4.8399E-3	9.32693E-2	2.7257E1	-3.26404E1	-3.26008E1	2.67956E1	1.19925E-7	2.51581E-3	2.51581E-3	6.34099E-3	3.03081E-1
