[Scan]
initial_time=2016-01-28T17:56:27
final_time=2016-01-28T17:56:47
ip_count=19
run=1026
dataset=3
scan=197
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.42513E-2
qbias_imon=-3.80289E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.63812E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.44042E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.5811E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.63435E-8
mult1=-1.10782E-8
mult2=-2.79703E-9
rf_tmon=-2.69321E-3
rf_agc=3.49193E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=5.59103E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66973E0
bslens_imon=2.28228E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19945E1
lens5a_imon=1.98354E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04759E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5346E1
cs_ef1b_imon=3.09118E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02349E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04859E1
cs_ea1_imon=1.2192E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07879E0
lens1_imon=1.4632E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64939E1
os_ef1alow_imon=2.97117E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03427E1
cs_ea2_imon=1.40211E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83805E1
cs_ef1a_imon=2.99315E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.151E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.29202E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15496E1
os_ea1_imon=2.44817E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63383E1
os_ef1bup_imon=3.08217E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23435E0
cs_ionrep_imon=9.70168E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=2.03954E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.86836E-8
tplens_vset=1.4E-1
tplens_vmon=1.63103E0
tplens_imon=-3.843E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27575E1
iondef3_imon=1.50054E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2681E1
iondef2_imon=1.56152E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98555E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=8.73506E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28883E0
ionrepsh_imon=9.11033E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34019E1
lens5b_imon=2.19621E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74339E1
cs_ef2b_imon=3.11425E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39106E0
os_ea2_imon=-9.09535E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00689E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05456E0
os_ef2alow_imon=-2.706E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64388E-1
os_ef2bup_imon=-5.4378E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.35463E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.2923E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.09504E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73109E1
iondef1_imon=1.08256E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68134E1
iondef4_imon=1.06863E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.03664E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.31191E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08749E0
cs_ionaccel_imon=-1.11665E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0212E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56015E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=1.57276E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39052E-4
mask2_vset=0.0E0
mask2_vmon=-1.86584E1
mask2_imon=-6.4453E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9261E3
multa_neg_imon=7.87621E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.40335E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.03877E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28711E0
defgridb_imon=5.99565E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33299E1
os_fil1_imon=9.41609E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06795E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60134E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30842E1
cs_fil1_imon=9.24875E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2722E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62163E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.62051E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.44681E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.8762E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.35886E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21843E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.70705E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.97E2	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80019E1	-4.05312E-4	-8.80004E1	2.38419E-5	4.95911E-3	9.35793E-2	2.73552E1	-3.26797E1	-3.25452E1	2.68142E1	1.20137E-7	2.52139E-3	2.52139E-3	6.32978E-3	3.01209E-1
2.0E0	8.832E3	1.1E1	3.16E2	1.6E2	-7.21643E-2	-8.80019E1	-6.91414E-4	-8.80003E1	2.38419E-5	4.8399E-3	9.38654E-2	2.72788E1	-3.26156E1	-3.25997E1	2.67939E1	1.20106E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80018E1	-4.52995E-4	-8.80007E1	4.76837E-5	4.8399E-3	9.35555E-2	2.7311E1	-3.26632E1	-3.25995E1	2.67908E1	1.20297E-7	2.52027E-3	2.52027E-3	6.29067E-3	2.99879E-1
4.0E0	2.079E3	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80016E1	-2.6226E-4	-8.80003E1	0.0E0	5.126E-3	9.34839E-2	2.72678E1	-3.26188E1	-3.27552E1	2.68274E1	1.20158E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.0071E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80018E1	-4.76837E-4	-8.80005E1	-9.53674E-5	5.07832E-3	9.36747E-2	2.73339E1	-3.2641E1	-3.27576E1	2.68148E1	1.19757E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.03449E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80018E1	-5.72205E-4	-8.80003E1	3.09944E-4	5.07832E-3	9.39131E-2	2.72907E1	-3.26651E1	-3.26567E1	2.68022E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.03027E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80018E1	-7.86781E-4	-8.80003E1	3.57628E-4	4.98295E-3	9.37939E-2	2.73107E1	-3.26663E1	-3.26159E1	2.68132E1	1.20031E-7	2.51693E-3	2.51693E-3	6.34099E-3	2.97762E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80016E1	-7.39098E-4	-8.80005E1	1.19209E-4	4.95911E-3	9.38892E-2	2.73103E1	-3.26189E1	-3.24871E1	2.68063E1	1.20113E-7	2.51956E-3	2.51956E-3	6.3074E-3	2.99179E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80018E1	-8.58307E-4	-8.80007E1	3.09944E-4	4.74453E-3	9.35078E-2	2.73128E1	-3.26508E1	-3.25753E1	2.68233E1	1.19895E-7	2.52222E-3	2.52222E-3	6.3016E-3	3.00087E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80017E1	-6.91414E-4	-8.80005E1	0.0E0	4.86374E-3	9.3317E-2	2.73228E1	-3.26767E1	-3.24762E1	2.68058E1	1.20226E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
1.4E1	2.99E2	1.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80017E1	-5.96046E-4	-8.80001E1	9.53674E-5	4.62532E-3	9.36985E-2	2.73198E1	-3.26603E1	-3.24522E1	2.68004E1	1.19749E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.98665E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80021E1	-4.52995E-4	-8.80003E1	3.57628E-4	4.93526E-3	9.35793E-2	2.73105E1	-3.26416E1	-3.24872E1	2.68028E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32936E-3	2.98481E-1
1.6E1	3.4E1	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80021E1	-7.39098E-4	-8.80003E1	1.19209E-4	4.74453E-3	9.33409E-2	2.73081E1	-3.26272E1	-3.25167E1	2.67988E1	1.20278E-7	2.52647E-3	2.52647E-3	6.34037E-3	3.01347E-1
1.7E1	5.0E1	0.0E0	6.87E2	4.7E2	-7.10825E-2	-8.80019E1	-6.91414E-4	-8.80006E1	4.05312E-4	4.76837E-3	9.35316E-2	2.73009E1	-3.26735E1	-3.2629E1	2.68024E1	1.19978E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.01475E-1
1.8E1	1.97E2	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80017E1	-7.62939E-4	-8.80007E1	4.52995E-4	4.88758E-3	9.35555E-2	2.73157E1	-3.26408E1	-3.27841E1	2.68238E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.02922E-1
1.9E1	3.39E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80018E1	-8.10623E-4	-8.80003E1	2.38419E-5	4.72069E-3	9.35555E-2	2.73586E1	-3.27966E1	-3.26645E1	2.6822E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00197E-1
2.0E1	2.216E3	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80019E1	-6.4373E-4	-8.80006E1	1.90735E-4	4.95911E-3	9.35078E-2	2.73263E1	-3.26573E1	-3.26484E1	2.68123E1	1.20122E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9874E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80016E1	-5.00679E-4	-8.80006E1	-9.53674E-5	5.126E-3	9.34601E-2	2.73115E1	-3.26718E1	-3.26747E1	2.67872E1	1.20243E-7	2.51814E-3	2.51814E-3	6.32328E-3	2.99093E-1
2.2E1	1.84E2	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80014E1	-6.67572E-4	-8.80008E1	4.76837E-5	5.03063E-3	9.34601E-2	2.72727E1	-3.2648E1	-3.27123E1	2.68004E1	1.20055E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.42513E-2	-8.80016E1	-8.82149E-4	-8.80007E1	-2.38419E-5	4.93526E-3	9.32693E-2	2.73109E1	-3.2681E1	-3.27575E1	2.68134E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9874E-1
