[Scan]
initial_time=2016-01-28T17:57:21
final_time=2016-01-28T17:57:40
ip_count=19
run=1026
dataset=3
scan=199
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.88162E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.98192E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.43324E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.59311E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.63149E-8
mult1=-1.01498E-8
mult2=-2.65873E-9
rf_tmon=-5.54584E-3
rf_agc=3.28349E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.40519E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64416E0
bslens_imon=2.65956E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20315E1
lens5a_imon=1.99303E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05134E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5348E1
cs_ef1b_imon=3.09711E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04552E2
lens23_imon=1.02005E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05125E1
cs_ea1_imon=1.23656E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09575E0
lens1_imon=1.54279E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.96524E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03764E1
cs_ea2_imon=1.40425E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84579E1
cs_ef1a_imon=2.99812E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.15047E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11375E1
os_restr1_imon=4.30841E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14884E1
os_ea1_imon=2.46502E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63602E1
os_ef1bup_imon=3.07932E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24242E0
cs_ionrep_imon=9.75639E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.934E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0181E1
cs_anode1_imon=2.05055E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.87099E-8
tplens_vset=1.4E-1
tplens_vmon=1.61639E0
tplens_imon=-3.08263E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26807E1
iondef3_imon=1.50431E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.57501E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98322E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.36456E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2908E0
ionrepsh_imon=9.32607E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33908E1
lens5b_imon=2.18497E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74691E1
cs_ef2b_imon=3.11825E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42684E0
os_ea2_imon=-7.07844E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00609E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.19307E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06854E0
os_ef2alow_imon=-2.7106E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84189E-1
os_ef2bup_imon=-5.39829E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10933E1
os_restr2_imon=3.36286E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.30748E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01905E1
cs_anode2_imon=2.09921E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73291E1
iondef1_imon=1.10029E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68038E1
iondef4_imon=1.08856E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.99979E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.29212E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11448E0
cs_ionaccel_imon=-1.19059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.4726E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56165E1
einzel_imon=7.54691E-6
window_vset=0.0E0
window_vmon=1.74385E-1
window_imon=-9.12093E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.38923E-4
mask2_vset=0.0E0
mask2_vmon=-1.86551E1
mask2_imon=-5.73196E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.14716E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.60755E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.36915E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43306E0
defgridb_imon=6.15333E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33244E1
os_fil1_imon=9.40793E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06641E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60021E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30857E1
cs_fil1_imon=9.25587E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32114E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62246E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.73555E-2
os_fil2_imon=-2.64422E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93033E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.45345E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33871E-1
cs_fil2_imon=-2.70014E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15859E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21782E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.99495E-1
res40_imon=-2.43545E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=232
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.91E2	1.0E0	1.47E2	4.1E1	-7.37874E-2	-8.80017E1	-5.48363E-4	-8.80007E1	4.52995E-4	4.76837E-3	9.34601E-2	2.73407E1	-3.26784E1	-3.26566E1	2.67795E1	1.20016E-7	2.51752E-3	2.51752E-3	6.31761E-3	3.01121E-1
2.0E0	8.798E3	8.0E0	3.16E2	1.6E2	-7.40967E-2	-8.80015E1	-7.39098E-4	-8.80004E1	9.53674E-5	4.74453E-3	9.35793E-2	2.72989E1	-3.26347E1	-3.25162E1	2.68088E1	1.2006E-7	2.51758E-3	2.51758E-3	6.31902E-3	3.0147E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80017E1	-9.05991E-4	-8.80003E1	1.19209E-4	4.91142E-3	9.32455E-2	2.72797E1	-3.26862E1	-3.26614E1	2.68076E1	1.19829E-7	2.51838E-3	2.51838E-3	6.3245E-3	3.03246E-1
4.0E0	2.008E3	3.0E0	6.55E2	3.98E2	-7.44059E-2	-8.80017E1	-7.39098E-4	-8.80007E1	2.14577E-4	4.57764E-3	9.33647E-2	2.73273E1	-3.26524E1	-3.26284E1	2.67598E1	1.2026E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80015E1	-8.34465E-4	-8.80004E1	4.29153E-4	4.57764E-3	9.34601E-2	2.72817E1	-3.26723E1	-3.24938E1	2.67992E1	1.20158E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80016E1	-6.91414E-4	-8.80004E1	4.76837E-5	4.52995E-3	9.34839E-2	2.73255E1	-3.26651E1	-3.27047E1	2.681E1	1.20084E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.02277E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80015E1	-9.53674E-4	-8.80005E1	-7.15256E-5	4.62532E-3	9.33647E-2	2.72835E1	-3.26771E1	-3.26002E1	2.6798E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02396E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80015E1	-3.57628E-4	-8.80006E1	1.90735E-4	4.76837E-3	9.34124E-2	2.72845E1	-3.26413E1	-3.2613E1	2.67878E1	1.1983E-7	2.52406E-3	2.52406E-3	6.32644E-3	2.98445E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80018E1	-5.24521E-4	-8.80004E1	1.19209E-4	5.05447E-3	9.34601E-2	2.72831E1	-3.26468E1	-3.26419E1	2.68082E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80017E1	-7.62939E-4	-8.80005E1	4.05312E-4	4.8399E-3	9.33647E-2	2.73629E1	-3.27015E1	-3.27104E1	2.68112E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9926E-1
1.4E1	2.83E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80019E1	-4.76837E-4	-8.80003E1	-2.38419E-5	4.48227E-3	9.34124E-2	2.72795E1	-3.26553E1	-3.26223E1	2.68119E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.0071E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80016E1	-3.33786E-4	-8.80002E1	2.38419E-4	4.48227E-3	9.34362E-2	2.73346E1	-3.26201E1	-3.25198E1	2.67998E1	1.19742E-7	2.51736E-3	2.51736E-3	6.32174E-3	3.01609E-1
1.6E1	3.8E1	0.0E0	6.47E2	4.41E2	-7.33239E-2	-8.80016E1	-5.24521E-4	-8.80002E1	-2.14577E-4	4.48227E-3	9.34362E-2	2.72865E1	-3.26621E1	-3.25617E1	2.68082E1	1.19653E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01609E-1
1.7E1	3.9E1	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80017E1	-1.90735E-4	-8.80003E1	1.43051E-4	4.79221E-3	9.34839E-2	2.7358E1	-3.26753E1	-3.2653E1	2.6814E1	1.20174E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.02922E-1
1.8E1	1.98E2	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80018E1	-1.90735E-4	-8.80004E1	3.09944E-4	4.50611E-3	9.36747E-2	2.72787E1	-3.26591E1	-3.26206E1	2.68001E1	1.20106E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.01223E-1
1.9E1	3.03E2	1.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80015E1	-2.6226E-4	-8.80003E1	3.09944E-4	4.50611E-3	9.34601E-2	2.73198E1	-3.26638E1	-3.24555E1	2.68036E1	1.20137E-7	2.51915E-3	2.51915E-3	6.29067E-3	3.00942E-1
2.0E1	2.224E3	1.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80019E1	-4.76837E-4	-8.80003E1	2.38419E-5	4.41074E-3	9.33647E-2	2.72867E1	-3.26787E1	-3.25342E1	2.68166E1	1.19902E-7	2.5131E-3	2.5131E-3	6.30202E-3	2.98665E-1
2.1E1	7.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80015E1	-4.76837E-4	-8.80006E1	9.53674E-5	4.64916E-3	9.32455E-2	2.73126E1	-3.26561E1	-3.26011E1	2.67932E1	1.20114E-7	2.51538E-3	2.51538E-3	6.30469E-3	3.0012E-1
2.2E1	1.78E2	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80014E1	-5.00679E-4	-8.80004E1	3.57628E-4	4.79221E-3	9.33647E-2	2.72564E1	-3.26374E1	-3.26092E1	2.67937E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80014E1	-1.66893E-4	-8.80005E1	2.14577E-4	4.62532E-3	9.35078E-2	2.73291E1	-3.26549E1	-3.26807E1	2.68038E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00041E-1
