[Scan]
initial_time=2016-01-28T17:59:48
final_time=2016-01-28T18:00:10
ip_count=19
run=1026
dataset=3
scan=204
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.09279E-2
qbias_imon=-3.76849E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.35087E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.43774E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.58222E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.62489E-8
mult1=-1.05471E-8
mult2=-2.67869E-9
rf_tmon=-4.48238E-3
rf_agc=3.31774E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.41377E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6869E0
bslens_imon=2.57439E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19581E1
lens5a_imon=1.95264E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05267E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=3.11105E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04613E2
lens23_imon=1.02232E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0473E1
cs_ea1_imon=1.22084E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06436E0
lens1_imon=1.60105E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64426E1
os_ef1alow_imon=2.95536E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03803E1
cs_ea2_imon=1.42346E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84671E1
cs_ef1a_imon=2.99955E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=1.15783E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11157E1
os_restr1_imon=4.30549E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.43732E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.07983E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19515E0
cs_ionrep_imon=9.53872E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.93472E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01829E1
cs_anode1_imon=2.0504E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.88369E-8
tplens_vset=1.4E-1
tplens_vmon=1.66858E0
tplens_imon=-4.8467E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26422E1
iondef3_imon=1.48583E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.57681E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98473E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.47805E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31037E0
ionrepsh_imon=9.06596E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33427E1
lens5b_imon=2.1763E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74623E1
cs_ef2b_imon=3.1224E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44279E0
os_ea2_imon=-4.48915E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00539E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71373E1
cs_ef2a_imon=3.1747E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03969E0
os_ef2alow_imon=-2.59833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86612E-1
os_ef2bup_imon=-5.21751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.109E1
os_restr2_imon=3.36364E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.28657E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.017E1
cs_anode2_imon=2.10351E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72943E1
iondef1_imon=1.0965E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68118E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.06029E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.31184E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12609E0
cs_ionaccel_imon=-1.00493E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56067E1
einzel_imon=7.80136E-6
window_vset=0.0E0
window_vmon=1.64785E-1
window_imon=-1.16305E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39157E-4
mask2_vset=0.0E0
mask2_vmon=-1.86749E1
mask2_imon=-7.69768E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.46889E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.33266E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50167E3
multb_neg_imon=6.87694E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44876E0
defgridb_imon=6.16978E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33177E1
os_fil1_imon=9.37622E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08397E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60165E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3069E1
cs_fil1_imon=9.24817E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.321E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62059E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.67147E-2
os_fil2_imon=-2.60065E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01468E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.30131E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34459E-1
cs_fil2_imon=-2.85743E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.53765E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21578E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.56889E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.13E2	0.0E0	1.47E2	4.1E1	-7.13915E-2	-8.80014E1	-5.24521E-4	-8.80002E1	3.09944E-4	4.64916E-3	9.377E-2	2.72819E1	-3.26434E1	-3.26457E1	2.68059E1					
2.0E0	8.904E3	7.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80016E1	-8.34465E-4	-8.80003E1	1.90735E-4	4.55379E-3	9.34839E-2	2.73137E1	-3.26719E1	-3.26168E1	2.68007E1	1.2026E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.9943E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80017E1	-3.57628E-4	-8.80005E1	-4.76837E-5	4.52995E-3	9.34362E-2	2.73086E1	-3.26503E1	-3.26191E1	2.6792E1	1.2033E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.98222E-1
4.0E0	2.082E3	1.0E0	6.55E2	3.98E2	-7.30146E-2	-8.80016E1	-4.05312E-4	-8.80003E1	-7.15256E-5	4.93526E-3	9.3174E-2	2.73075E1	-3.26651E1	-3.26332E1	2.67854E1	1.19902E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80016E1	-2.38419E-4	-8.80004E1	4.76837E-5	4.76837E-3	9.34839E-2	2.72793E1	-3.26416E1	-3.26344E1	2.68395E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80015E1	-1.90735E-4	-8.80002E1	-1.19209E-4	5.14984E-3	9.33647E-2	2.73012E1	-3.26249E1	-3.26864E1	2.68121E1	1.20363E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80016E1	-3.09944E-4	-8.80004E1	7.15256E-5	4.91142E-3	9.34124E-2	2.73165E1	-3.26546E1	-3.25872E1	2.68264E1	1.19967E-7	2.5165E-3	2.5165E-3	6.3074E-3	2.98454E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80017E1	-4.76837E-4	-8.80003E1	9.53674E-5	5.24521E-3	9.3317E-2	2.73291E1	-3.26681E1	-3.26494E1	2.6834E1	1.20281E-7	2.52338E-3	2.52338E-3	6.3074E-3	2.97887E-1
1.2E1	1.0E1	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80018E1	-4.76837E-4	-8.80001E1	0.0E0	5.10216E-3	9.33647E-2	2.72715E1	-3.26697E1	-3.2639E1	2.68053E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.98222E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80018E1	-5.96046E-4	-8.80003E1	2.38419E-5	4.673E-3	9.31978E-2	2.72929E1	-3.26462E1	-3.2607E1	2.68132E1	1.19902E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.99686E-1
1.4E1	2.87E2	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80018E1	-5.72205E-4	-8.80003E1	1.19209E-4	4.673E-3	9.35078E-2	2.72979E1	-3.26897E1	-3.26194E1	2.68052E1	1.20137E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.0201E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.21643E-2	-8.8002E1	-6.67572E-4	-8.80005E1	9.53674E-5	4.93526E-3	9.34601E-2	2.7337E1	-3.26891E1	-3.2741E1	2.6813E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80018E1	-6.67572E-4	-8.80008E1	2.38419E-5	5.05447E-3	9.34124E-2	2.73015E1	-3.26879E1	-3.25725E1	2.68024E1	1.20174E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.01609E-1
1.7E1	5.6E1	0.0E0	6.87E2	4.7E2	-7.12368E-2	-8.80014E1	-7.62939E-4	-8.80006E1	-1.19209E-4	5.00679E-3	9.3174E-2	2.73128E1	-3.26638E1	-3.26431E1	2.6804E1	1.20209E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01223E-1
1.8E1	2.36E2	0.0E0	7.27E2	5.0E2	-7.12368E-2	-8.80013E1	-1.00136E-3	-8.80004E1	7.15256E-5	4.74453E-3	9.35793E-2	2.72886E1	-3.2672E1	-3.26402E1	2.67986E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01223E-1
1.9E1	3.57E2	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80012E1	-7.15256E-4	-8.80005E1	1.66893E-4	4.81606E-3	9.37939E-2	2.73161E1	-3.26511E1	-3.2596E1	2.68004E1	1.20069E-7	2.51116E-3	2.51116E-3	6.29645E-3	3.00302E-1
2.0E1	2.18E3	2.0E0	8.08E2	5.58E2	-7.10051E-2	-8.80013E1	-9.05991E-4	-8.80002E1	9.53674E-5	4.55379E-3	9.35793E-2	2.72892E1	-3.26664E1	-3.25887E1	2.68124E1	1.20017E-7	2.51225E-3	2.51225E-3	6.29645E-3	2.9874E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80013E1	-5.96046E-4	-8.80002E1	2.86102E-4	4.57764E-3	9.35793E-2	2.73181E1	-3.26773E1	-3.26555E1	2.67992E1	1.20031E-7	2.51804E-3	2.51804E-3	6.30182E-3	2.99613E-1
2.2E1	1.54E2	0.0E0	8.89E2	6.17E2	-7.10051E-2	-8.80015E1	-6.19888E-4	-8.80003E1	1.19209E-4	4.72069E-3	9.40561E-2	2.73222E1	-3.26732E1	-3.26189E1	2.67966E1	1.198E-7	2.52169E-3	2.52169E-3	6.32356E-3	2.9714E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.09279E-2	-8.80016E1	-6.67572E-4	-8.80005E1	2.14577E-4	4.673E-3	9.35793E-2	2.72943E1	-3.26609E1	-3.26422E1	2.68118E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31817E-3	2.99941E-1
