[Scan]
initial_time=2016-01-28T18:00:49
final_time=2016-01-28T18:01:11
ip_count=19
run=1026
dataset=3
scan=206
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.82209E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-6.03211E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.4293E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.56558E-9
ql4_vset=
ql4_vmon=-1.66893E-4
ql4_imon=1.62891E-8
mult1=-1.22448E-8
mult2=-2.68268E-9
rf_tmon=-4.74675E-3
rf_agc=3.31293E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=5.60486E-10
bslens_vset=-6.2E0
bslens_vmon=-6.82115E0
bslens_imon=2.59904E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18355E1
lens5a_imon=1.89944E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.05536E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.10235E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04727E2
lens23_imon=1.02633E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04748E1
cs_ea1_imon=1.15682E-5
lens1_vset=-2.7E0
lens1_vmon=-2.93741E0
lens1_imon=1.71222E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=2.97874E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.05072E1
cs_ea2_imon=1.48379E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.00144E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.1609E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=4.30716E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15816E1
os_ea1_imon=2.40521E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.07568E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.11271E0
cs_ionrep_imon=9.04109E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.94098E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.05468E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.87302E-8
tplens_vset=1.4E-1
tplens_vmon=1.73456E0
tplens_imon=-6.86289E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26386E1
iondef3_imon=1.40952E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.61573E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03026E2
lens6_imon=2.9884E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.51417E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24008E0
ionrepsh_imon=8.69501E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.32546E1
lens5b_imon=2.18675E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.12109E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52127E0
os_ea2_imon=-1.15493E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00114E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.19173E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64388E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.36688E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22941E2
cs_ionfoca_imon=6.25422E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.10297E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.16943E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.09062E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.1165E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.29709E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15056E0
cs_ionaccel_imon=-1.06619E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56309E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=1.82504E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82629E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-6.22906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92675E3
multa_neg_imon=8.40662E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93653E3
defgrida_imon=5.68127E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50163E3
multb_neg_imon=6.92859E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43164E0
defgridb_imon=6.73392E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33225E1
os_fil1_imon=9.41225E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07191E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60391E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30601E1
cs_fil1_imon=9.25878E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.25718E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62012E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.75727E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.21011E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21388E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.87233E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.04E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80012E1	-7.86781E-4	-8.80001E1	-2.14577E-4	4.86374E-3	9.37939E-2	2.73399E1	-3.27711E1	-3.26891E1	2.68106E1	1.20226E-7	2.52318E-3	2.52318E-3	6.34037E-3	2.9926E-1
2.0E0	8.948E3	3.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80013E1	-6.19888E-4	-8.80001E1	3.09944E-4	4.93526E-3	9.36985E-2	2.72897E1	-3.26545E1	-3.2601E1	2.6792E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.04063E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80013E1	-3.57628E-4	-8.80001E1	1.66893E-4	4.74453E-3	9.34601E-2	2.73063E1	-3.26666E1	-3.26497E1	2.68132E1	1.19891E-7	2.51182E-3	2.51182E-3	6.32328E-3	3.00097E-1
4.0E0	2.089E3	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80016E1	-4.05312E-4	-8.8E1	2.38419E-5	4.93526E-3	9.35555E-2	2.72962E1	-3.26402E1	-3.26378E1	2.67986E1	1.19819E-7	2.51359E-3	2.51359E-3	6.3074E-3	3.01475E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80016E1	-5.00679E-4	-8.80001E1	-1.19209E-4	4.76837E-3	9.36508E-2	2.73393E1	-3.26681E1	-3.25846E1	2.67978E1	1.20174E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80018E1	-7.39098E-4	-8.79998E1	2.38419E-5	4.76837E-3	9.34362E-2	2.72614E1	-3.26402E1	-3.26337E1	2.6798E1	1.19697E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80019E1	-7.86781E-4	-8.80002E1	-2.38419E-4	4.91142E-3	9.34124E-2	2.7269E1	-3.26701E1	-3.26132E1	2.68124E1	1.20106E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.02769E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80018E1	-9.53674E-4	-8.8E1	-1.43051E-4	5.05447E-3	9.35078E-2	2.73255E1	-3.26585E1	-3.26711E1	2.6792E1	1.20084E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.0041E-1
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80015E1	-6.19888E-4	-8.79997E1	1.19209E-4	4.98295E-3	9.34124E-2	2.72833E1	-3.26296E1	-3.26172E1	2.68052E1	1.19861E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.9874E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80015E1	-7.39098E-4	-8.8E1	0.0E0	4.88758E-3	9.32217E-2	2.72845E1	-3.26461E1	-3.25883E1	2.67955E1	1.20004E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.9841E-1
1.4E1	2.94E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80016E1	-1.04904E-3	-8.80001E1	0.0E0	4.673E-3	9.33886E-2	2.73195E1	-3.26597E1	-3.2653E1	2.682E1	1.19851E-7	2.5131E-3	2.5131E-3	6.32896E-3	2.9943E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80014E1	-8.82149E-4	-8.80001E1	2.38419E-4	4.86374E-3	9.35316E-2	2.72997E1	-3.26717E1	-3.26621E1	2.68157E1	1.19757E-7	2.51007E-3	2.51007E-3	6.32936E-3	3.00824E-1
1.6E1	3.8E1	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80018E1	-9.29832E-4	-8.80002E1	9.53674E-5	4.72069E-3	9.35555E-2	2.73151E1	-3.26691E1	-3.2629E1	2.68124E1	1.19953E-7	2.52707E-3	2.52707E-3	6.26985E-3	3.01223E-1
1.7E1	5.7E1	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80017E1	-9.29832E-4	-8.80001E1	-9.53674E-5	4.69685E-3	9.38654E-2	2.73104E1	-3.26284E1	-3.2659E1	2.68283E1	1.19653E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
1.8E1	1.87E2	1.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80017E1	-6.67572E-4	-8.80001E1	2.38419E-5	4.64916E-3	9.36985E-2	2.73222E1	-3.26695E1	-3.26438E1	2.68009E1	1.20004E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.99175E-1
1.9E1	3.3E2	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80016E1	-6.67572E-4	-8.80003E1	-1.43051E-4	5.03063E-3	9.35555E-2	2.73045E1	-3.26795E1	-3.26242E1	2.67992E1	1.19925E-7	2.52697E-3	2.52697E-3	6.3074E-3	2.99613E-1
2.0E1	2.195E3	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80016E1	-7.15256E-4	-8.80003E1	2.38419E-5	5.07832E-3	9.35555E-2	2.72871E1	-3.26957E1	-3.26753E1	2.68088E1	1.19819E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.00942E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80015E1	-9.29832E-4	-8.80006E1	1.19209E-4	4.72069E-3	9.37223E-2	2.72799E1	-3.26488E1	-3.26464E1	2.67968E1	1.20062E-7	2.51701E-3	2.51701E-3	6.32644E-3	3.00896E-1
2.2E1	1.58E2	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80016E1	-6.19888E-4	-8.80001E1	2.14577E-4	4.86374E-3	9.36747E-2	2.72697E1	-3.26679E1	-3.2662E1	2.68117E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80017E1	-7.15256E-4	-8.80001E1	-1.66893E-4	4.98295E-3	9.377E-2	2.73057E1	-3.26458E1	-3.26386E1	2.68124E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1
