[Scan]
initial_time=2016-01-28T18:02:50
final_time=2016-01-28T18:03:13
ip_count=19
run=1026
dataset=3
scan=210
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.77077E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.91302E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=1.44167E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.58325E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.62768E-8
mult1=-1.21238E-8
mult2=-2.74481E-9
rf_tmon=-4.72184E-3
rf_agc=3.42412E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.5269E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62946E0
bslens_imon=2.38505E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20018E1
lens5a_imon=2.0092E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05081E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.10688E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04568E2
lens23_imon=1.02078E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05033E1
cs_ea1_imon=1.27102E-5
lens1_vset=-2.7E0
lens1_vmon=-3.13388E0
lens1_imon=1.51683E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64544E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03775E1
cs_ea2_imon=1.37497E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84362E1
cs_ef1a_imon=3.00451E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=1.16684E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11234E1
os_restr1_imon=4.30142E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14774E1
os_ea1_imon=2.45616E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63609E1
os_ef1bup_imon=3.08197E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26832E0
cs_ionrep_imon=9.8447E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93292E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02003E1
cs_anode1_imon=2.04545E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.88294E-8
tplens_vset=1.4E-1
tplens_vmon=1.64014E0
tplens_imon=-4.33739E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26714E1
iondef3_imon=1.50579E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26555E1
iondef2_imon=1.57159E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02893E2
lens6_imon=2.98225E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.59666E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24431E0
ionrepsh_imon=9.50988E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33924E1
lens5b_imon=2.18596E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74735E1
cs_ef2b_imon=3.11817E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.35462E0
os_ea2_imon=-7.9582E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00463E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.17811E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08375E0
os_ef2alow_imon=-2.6345E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.53744E-1
os_ef2bup_imon=-5.40191E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10929E1
os_restr2_imon=3.36533E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23102E2
cs_ionfoca_imon=6.32926E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01873E1
cs_anode2_imon=2.09722E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7252E1
iondef1_imon=1.08959E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.09301E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.21417E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8176E-1
olens1_imon=7.32817E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.099E0
cs_ionaccel_imon=-1.14764E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47285E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5621E1
einzel_imon=7.71119E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-1.18267E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86591E1
mask2_imon=-7.62307E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92593E3
multa_neg_imon=7.45808E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.6872E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.18555E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.61462E0
defgridb_imon=5.85013E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33202E1
os_fil1_imon=9.42355E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06908E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60153E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3057E1
cs_fil1_imon=9.25041E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30819E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62113E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.62314E-2
os_fil2_imon=-2.57443E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89521E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.22119E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35385E-1
cs_fil2_imon=-2.40576E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21488E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.19705E-7
chamber_cvt_pmon=2.5188E-3
foreline_cvt_pmon=2.5188E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.39276E-1
res40_imon=-2.49827E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.42E2	0.0E0	1.47E2	4.1E1	-7.201E-2	-8.80019E1	-5.72205E-4	-8.80001E1	2.38419E-4	5.10216E-3	9.34124E-2	2.72555E1	-3.26425E1	-3.26284E1	2.68262E1	1.20132E-7	2.51557E-3	2.51557E-3	6.31925E-3	3.00761E-1
2.0E0	8.841E3	6.0E0	3.16E2	1.6E2	-7.22418E-2	-8.80018E1	-4.76837E-4	-8.80001E1	3.57628E-4	5.07832E-3	9.36031E-2	2.73002E1	-3.26842E1	-3.26003E1	2.68051E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.03027E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80019E1	-8.34465E-4	-8.80001E1	1.19209E-4	5.126E-3	9.3317E-2	2.72866E1	-3.26984E1	-3.26214E1	2.68151E1	1.19978E-7	2.5225E-3	2.5225E-3	6.34099E-3	3.0041E-1
4.0E0	2.011E3	1.0E0	6.55E2	3.98E2	-7.21643E-2	-8.8002E1	-8.58307E-4	-8.80002E1	9.53674E-5	5.126E-3	9.34601E-2	2.73143E1	-3.26643E1	-3.26052E1	2.68106E1	1.20243E-7	2.51814E-3	2.51814E-3	6.29157E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.8002E1	-7.86781E-4	-8.80002E1	5.24521E-4	5.38826E-3	9.36985E-2	2.73019E1	-3.26309E1	-3.26001E1	2.68093E1	1.20058E-7	2.51886E-3	2.51886E-3	6.30117E-3	3.00791E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80017E1	-8.58307E-4	-8.80003E1	3.57628E-4	5.29289E-3	9.36985E-2	2.73092E1	-3.26564E1	-3.25976E1	2.68028E1	1.20085E-7	2.52187E-3	2.52187E-3	6.31234E-3	3.01138E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80015E1	-9.77516E-4	-8.80003E1	1.43051E-4	4.79221E-3	9.34839E-2	2.73075E1	-3.26856E1	-3.26172E1	2.68064E1	1.20172E-7	2.51456E-3	2.51456E-3	6.3074E-3	3.02216E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80015E1	-7.39098E-4	-8.80002E1	0.0E0	5.126E-3	9.31978E-2	2.73118E1	-3.26909E1	-3.26554E1	2.67914E1					
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80014E1	-1.12057E-3	-8.80002E1	2.6226E-4	4.95911E-3	9.35078E-2	2.73119E1	-3.26596E1	-3.25702E1	2.68024E1	1.19902E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.45602E-2	-8.80017E1	-7.86781E-4	-8.80003E1	7.15256E-5	4.98295E-3	9.30548E-2	2.72921E1	-3.26638E1	-3.26301E1	2.67989E1	1.20276E-7	2.51679E-3	2.51679E-3	6.3126E-3	3.02977E-1
1.4E1	2.92E2	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80017E1	-8.34465E-4	-8.80002E1	0.0E0	4.98295E-3	9.38654E-2	2.73039E1	-3.26597E1	-3.2611E1	2.68004E1	1.20069E-7	2.52538E-3	2.52538E-3	6.34588E-3	3.00302E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80017E1	-6.91414E-4	-8.80001E1	3.57628E-4	4.98295E-3	9.34601E-2	2.72927E1	-3.26773E1	-3.26213E1	2.68196E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0071E-1
1.6E1	2.7E1	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80015E1	-1.09673E-3	-8.80003E1	4.29153E-4	4.79221E-3	9.36747E-2	2.73027E1	-3.26729E1	-3.26645E1	2.67962E1	1.19953E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00966E-1
1.7E1	3.3E1	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80014E1	-1.0252E-3	-8.80002E1	3.33786E-4	4.88758E-3	9.37223E-2	2.73478E1	-3.26801E1	-3.25948E1	2.68094E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
1.8E1	2.05E2	0.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80017E1	-6.91414E-4	-8.80004E1	2.38419E-4	4.72069E-3	9.36985E-2	2.72721E1	-3.26744E1	-3.26319E1	2.6789E1	1.19766E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.00144E-1
1.9E1	3.07E2	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80015E1	-8.58307E-4	-8.80005E1	1.90735E-4	5.03063E-3	9.33409E-2	2.73192E1	-3.26499E1	-3.26358E1	2.68154E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.9943E-1
2.0E1	2.232E3	3.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80015E1	-7.62939E-4	-8.80005E1	2.6226E-4	4.86374E-3	9.32932E-2	2.72668E1	-3.26779E1	-3.25906E1	2.68053E1	1.19861E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.9874E-1
2.1E1	4.0E0	1.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80016E1	-1.0252E-3	-8.80005E1	1.19209E-4	4.86374E-3	9.34601E-2	2.72913E1	-3.26759E1	-3.26218E1	2.67842E1	1.19705E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.00563E-1
2.2E1	1.28E2	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80017E1	-1.00136E-3	-8.80003E1	4.29153E-4	4.50611E-3	9.36747E-2	2.73517E1	-3.26508E1	-3.26655E1	2.67842E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80018E1	-8.34465E-4	-8.79999E1	3.09944E-4	4.673E-3	9.35555E-2	2.7252E1	-3.26555E1	-3.26714E1	2.6807E1	1.19705E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
