[Scan]
initial_time=2016-01-28T18:03:21
final_time=2016-01-28T18:03:42
ip_count=19
run=1026
dataset=3
scan=211
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.74724E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-5.9247E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.45842E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.55085E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.6242E-8
mult1=-1.04628E-8
mult2=-2.82041E-9
rf_tmon=-4.2781E-3
rf_agc=3.3646E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=5.61059E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64203E0
bslens_imon=2.58219E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.195E1
lens5a_imon=1.96351E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05288E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53546E1
cs_ef1b_imon=3.10902E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04647E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04787E1
cs_ea1_imon=1.24571E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07194E0
lens1_imon=1.50621E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64724E1
os_ef1alow_imon=2.97175E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04192E1
cs_ea2_imon=1.40357E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84284E1
cs_ef1a_imon=3.00163E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.16928E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11199E1
os_restr1_imon=4.30207E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15005E1
os_ea1_imon=2.41726E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.08191E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23853E0
cs_ionrep_imon=9.6964E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01798E1
cs_anode1_imon=2.04455E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.88219E-8
tplens_vset=1.4E-1
tplens_vmon=1.60014E0
tplens_imon=-3.80294E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25846E1
iondef3_imon=1.47684E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26939E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98208E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=8.43072E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26979E0
ionrepsh_imon=9.346E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33345E1
lens5b_imon=2.20596E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.12918E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44028E0
os_ea2_imon=-6.95301E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71148E1
cs_ef2a_imon=3.19451E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0563E0
os_ef2alow_imon=-2.57458E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77538E-1
os_ef2bup_imon=-5.35826E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10892E1
os_restr2_imon=3.36132E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.29574E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01693E1
cs_anode2_imon=2.10537E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72931E1
iondef1_imon=1.10626E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.09094E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.10454E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.32472E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12898E0
cs_ionaccel_imon=-1.06285E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47247E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56289E1
einzel_imon=7.68089E-6
window_vset=0.0E0
window_vmon=2.01468E-1
window_imon=-9.86392E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39088E-4
mask2_vset=0.0E0
mask2_vmon=-1.86593E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.50197E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.6242E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.01707E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.72742E0
defgridb_imon=6.16761E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33183E1
os_fil1_imon=9.38348E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06906E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60043E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30522E1
cs_fil1_imon=9.25218E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29957E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62092E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39521E-2
os_fil2_imon=-2.56493E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87181E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.0959E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34022E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06092E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21491E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.89325E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.43E2	1.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80018E1	-9.29832E-4	-8.80002E1	3.57628E-4	4.79221E-3	9.3627E-2	2.72953E1	-3.26634E1	-3.26358E1	2.68076E1	1.20209E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00197E-1
2.0E0	8.792E3	1.5E1	3.16E2	1.6E2	-7.23964E-2	-8.80018E1	-3.8147E-4	-8.80004E1	-4.76837E-5	4.76837E-3	9.32693E-2	2.73099E1	-3.27017E1	-3.26158E1	2.68013E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.00563E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80018E1	-5.96046E-4	-8.80003E1	-9.53674E-5	4.48227E-3	9.33409E-2	2.73228E1	-3.26767E1	-3.26071E1	2.68099E1	1.20084E-7	2.51359E-3	2.51359E-3	6.3074E-3	3.00144E-1
4.0E0	2.011E3	1.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80019E1	-7.15256E-4	-8.80003E1	0.0E0	4.64916E-3	9.377E-2	2.72833E1	-3.26449E1	-3.26425E1	2.6801E1	1.19891E-7	2.51498E-3	2.51498E-3	6.32328E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80018E1	-7.39098E-4	-8.80004E1	-2.38419E-5	4.55379E-3	9.34601E-2	2.72841E1	-3.26476E1	-3.25695E1	2.68099E1	1.20043E-7	2.51716E-3	2.51716E-3	6.32112E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80019E1	-6.19888E-4	-8.80002E1	2.6226E-4	4.88758E-3	9.3317E-2	2.73027E1	-3.26693E1	-3.25996E1	2.67836E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80019E1	-9.29832E-4	-8.80003E1	2.14577E-4	4.3869E-3	9.34839E-2	2.7348E1	-3.26602E1	-3.26306E1	2.68059E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80018E1	-1.0252E-3	-8.80002E1	-1.43051E-4	4.8399E-3	9.36031E-2	2.72769E1	-3.26591E1	-3.26119E1	2.6825E1	1.20209E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.0148E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80015E1	-1.00136E-3	-8.80004E1	-2.38419E-4	5.26905E-3	9.35078E-2	2.72624E1	-3.26897E1	-3.26597E1	2.67866E1	1.19766E-7	2.51804E-3	2.51804E-3	6.29624E-3	3.01475E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80016E1	-1.14441E-3	-8.80004E1	-2.38419E-5	5.31673E-3	9.32455E-2	2.73411E1	-3.26765E1	-3.26188E1	2.67992E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9978E-1
1.4E1	2.96E2	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80017E1	-1.04904E-3	-8.80002E1	0.0E0	4.62532E-3	9.33886E-2	2.7257E1	-3.26494E1	-3.26062E1	2.67926E1	1.20363E-7	2.52492E-3	2.52492E-3	6.29665E-3	3.00197E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.23189E-2	-8.80015E1	-7.86781E-4	-8.80003E1	3.33786E-4	4.8399E-3	9.34124E-2	2.73281E1	-3.2682E1	-3.26006E1	2.6801E1	1.19925E-7	2.5225E-3	2.5225E-3	6.32978E-3	3.01209E-1
1.6E1	3.7E1	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80015E1	-8.58307E-4	-8.8E1	4.52995E-4	5.126E-3	9.35078E-2	2.73111E1	-3.26843E1	-3.26266E1	2.67972E1	1.19985E-7	2.51809E-3	2.51809E-3	6.33188E-3	3.01674E-1
1.7E1	5.4E1	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80019E1	-8.34465E-4	-8.80002E1	4.29153E-4	4.88758E-3	9.3627E-2	2.72829E1	-3.26512E1	-3.26488E1	2.68004E1					
1.8E1	1.94E2	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80019E1	-6.67572E-4	-8.80003E1	-4.76837E-5	4.95911E-3	9.38416E-2	2.73275E1	-3.26467E1	-3.26231E1	2.68088E1	1.198E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.02769E-1
1.9E1	3.37E2	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80019E1	-8.34465E-4	-8.80003E1	4.76837E-5	4.3869E-3	9.35793E-2	2.73315E1	-3.26543E1	-3.26494E1	2.68136E1	1.20017E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.99E-1
2.0E1	2.186E3	2.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80017E1	-1.12057E-3	-8.80004E1	1.90735E-4	4.55379E-3	9.32693E-2	2.72919E1	-3.26579E1	-3.26813E1	2.68328E1	1.19913E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.97187E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80019E1	-9.29832E-4	-8.80003E1	7.15256E-5	4.52995E-3	9.32693E-2	2.73129E1	-3.26416E1	-3.25521E1	2.68028E1	1.20055E-7	2.51847E-3	2.51847E-3	6.34518E-3	2.97901E-1
2.2E1	1.55E2	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80018E1	-6.91414E-4	-8.80002E1	2.38419E-4	4.43459E-3	9.34839E-2	2.73322E1	-3.26797E1	-3.2652E1	2.68065E1	1.19925E-7	2.51804E-3	2.51804E-3	6.33538E-3	2.97499E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80019E1	-8.82149E-4	-8.80005E1	1.19209E-4	4.69685E-3	9.32217E-2	2.72931E1	-3.26939E1	-3.25846E1	2.67956E1	1.2026E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.01223E-1
