[Scan]
initial_time=2016-01-28T18:03:50
final_time=2016-01-28T18:04:10
ip_count=19
run=1026
dataset=3
scan=212
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.76708E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.39927E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.4652E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.5305E-9
ql4_vset=
ql4_vmon=-2.6226E-4
ql4_imon=1.62409E-8
mult1=-9.06196E-9
mult2=-2.70758E-9
rf_tmon=-5.04629E-3
rf_agc=3.18992E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.44906E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62588E0
bslens_imon=2.38274E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19977E1
lens5a_imon=1.9773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53796E1
cs_ef1b_imon=3.11064E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02308E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0503E1
cs_ea1_imon=1.24261E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09303E0
lens1_imon=1.35893E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64674E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.39907E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8419E1
cs_ef1a_imon=2.99027E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.16764E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.30067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15348E1
os_ea1_imon=2.44342E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24429E0
cs_ionrep_imon=9.78371E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93229E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02163E1
cs_anode1_imon=2.04351E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.8862E-8
tplens_vset=1.4E-1
tplens_vmon=1.60538E0
tplens_imon=-2.81321E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26419E1
iondef3_imon=1.50578E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26549E1
iondef2_imon=1.57643E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.98743E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25811E0
ionrepsh_imon=9.25378E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.17558E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40771E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.18272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.01371E0
os_ef2alow_imon=-2.58346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10829E1
os_restr2_imon=3.37553E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.09504E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73252E1
iondef1_imon=1.0876E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68059E1
iondef4_imon=1.11585E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.16732E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.35369E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11152E0
cs_ionaccel_imon=-1.01213E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55877E1
einzel_imon=7.5581E-6
window_vset=0.0E0
window_vmon=1.72293E-1
window_imon=-1.13827E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86638E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.30711E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93691E3
defgrida_imon=6.56449E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.1593E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5339E0
defgridb_imon=6.09945E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.39693E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07317E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6024E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30547E1
cs_fil1_imon=9.24893E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30103E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62155E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.53802E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.18561E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.45574E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.53906E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21514E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.87523E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.06E2	0.0E0	1.47E2	4.1E1	-7.37103E-2	-8.80019E1	-7.15256E-4	-8.80003E1	9.53674E-5	4.45843E-3	9.35555E-2	2.72945E1	-3.26738E1	-3.25894E1	2.67931E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9978E-1
2.0E0	8.914E3	9.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80019E1	-6.91414E-4	-8.80003E1	7.15256E-5	4.50611E-3	9.38177E-2	2.72714E1	-3.26731E1	-3.2615E1	2.68051E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99175E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.40192E-2	-8.80017E1	-8.34465E-4	-8.80001E1	4.29153E-4	4.86374E-3	9.33409E-2	2.73275E1	-3.26608E1	-3.26136E1	2.68088E1	1.20137E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.98819E-1
4.0E0	2.027E3	2.0E0	6.55E2	3.98E2	-7.286E-2	-8.80019E1	-7.39098E-4	-8.79999E1	3.8147E-4	4.673E-3	9.33409E-2	2.72756E1	-3.26402E1	-3.26195E1	2.67938E1	1.1974E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.02368E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80017E1	-7.39098E-4	-8.79998E1	1.90735E-4	4.52995E-3	9.34362E-2	2.72744E1	-3.26673E1	-3.26048E1	2.68204E1	1.19902E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.00453E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80016E1	-7.86781E-4	-8.80002E1	2.38419E-4	4.673E-3	9.3627E-2	2.72955E1	-3.27095E1	-3.2617E1	2.68118E1	1.19861E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80015E1	-1.0252E-3	-8.80001E1	-9.53674E-5	4.95911E-3	9.32455E-2	2.73381E1	-3.26849E1	-3.27233E1	2.67872E1	1.20069E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80018E1	-9.77516E-4	-8.80001E1	1.19209E-4	5.05447E-3	9.33647E-2	2.73069E1	-3.26386E1	-3.25828E1	2.68238E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00041E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80021E1	-1.04904E-3	-8.8E1	0.0E0	4.79221E-3	9.35078E-2	2.72889E1	-3.26741E1	-3.25575E1	2.6825E1	1.2033E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00563E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80018E1	-6.19888E-4	-8.80002E1	-4.76837E-5	4.81606E-3	9.33647E-2	2.72992E1	-3.26543E1	-3.25706E1	2.68018E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01085E-1
1.4E1	3.05E2	1.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80018E1	-5.96046E-4	-8.8E1	-2.38419E-5	4.3869E-3	9.33886E-2	2.73057E1	-3.26494E1	-3.28159E1	2.67998E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80017E1	-7.15256E-4	-8.80002E1	3.09944E-4	4.41074E-3	9.34601E-2	2.73069E1	-3.26741E1	-3.2644E1	2.6792E1	1.19985E-7	2.51972E-3	2.51972E-3	6.31555E-3	3.02064E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.8002E1	-6.67572E-4	-8.8E1	0.0E0	4.72069E-3	9.3174E-2	2.7275E1	-3.26758E1	-3.25014E1	2.68024E1					
1.7E1	6.1E1	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80023E1	-5.24521E-4	-8.80001E1	2.38419E-5	4.95911E-3	9.34601E-2	2.72938E1	-3.26914E1	-3.26118E1	2.68013E1	1.20055E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00453E-1
1.8E1	2.0E2	0.0E0	7.27E2	5.0E2	-7.37874E-2	-8.80022E1	-5.48363E-4	-8.8E1	0.0E0	4.79221E-3	9.34124E-2	2.73229E1	-3.26544E1	-3.27436E1	2.67644E1	1.19918E-7	2.5196E-3	2.5196E-3	6.34284E-3	3.01081E-1
1.9E1	3.4E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80019E1	-8.82149E-4	-8.80002E1	-2.14577E-4	4.91142E-3	9.32217E-2	2.72793E1	-3.2632E1	-3.27474E1	2.67788E1	1.20009E-7	2.51384E-3	2.51384E-3	6.34546E-3	3.02517E-1
2.0E1	2.268E3	2.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80016E1	-8.34465E-4	-8.80002E1	2.38419E-5	4.81606E-3	9.3317E-2	2.73364E1	-3.26831E1	-3.25555E1	2.68004E1	1.198E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.03027E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80016E1	-6.19888E-4	-8.80002E1	-9.53674E-5	4.48227E-3	9.31978E-2	2.73614E1	-3.26611E1	-3.26498E1	2.68011E1	1.20424E-7	2.5199E-3	2.5199E-3	6.3126E-3	3.00247E-1
2.2E1	1.42E2	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80017E1	-5.96046E-4	-8.8E1	-2.6226E-4	4.48227E-3	9.3174E-2	2.72898E1	-3.26608E1	-3.2511E1	2.67938E1	1.19794E-7	2.52858E-3	2.52858E-3	6.31332E-3	3.00761E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80015E1	-8.10623E-4	-8.8E1	-2.6226E-4	4.86374E-3	9.34839E-2	2.73252E1	-3.26549E1	-3.26419E1	2.68059E1	1.19953E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0148E-1
