[Scan]
initial_time=2016-01-28T18:04:18
final_time=2016-01-28T18:04:38
ip_count=19
run=1026
dataset=3
scan=213
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.80372E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.51474E-10
ql2_vset=
ql2_vmon=-1.3113E-3
ql2_imon=1.44854E-9
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-1.54026E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.63042E-8
mult1=-8.86099E-9
mult2=-2.56059E-9
rf_tmon=-3.94907E-3
rf_agc=3.39875E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.79715E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65786E0
bslens_imon=2.52611E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19938E1
lens5a_imon=1.97167E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12427E2
lens4a_imon=2.04984E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.0918E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02147E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05025E1
cs_ea1_imon=1.25814E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07835E0
lens1_imon=1.42174E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64627E1
os_ef1alow_imon=2.97578E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0364E1
cs_ea2_imon=1.40452E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84513E1
cs_ef1a_imon=3.0046E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.17462E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11073E1
os_restr1_imon=4.30926E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15331E1
os_ea1_imon=2.46845E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63542E1
os_ef1bup_imon=3.08582E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2365E0
cs_ionrep_imon=9.68014E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91844E2
cs_nozzle_imon=1.93465E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.04538E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.88702E-8
tplens_vset=1.4E-1
tplens_vmon=1.5884E0
tplens_imon=-1.31854E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26555E1
iondef3_imon=1.50859E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26172E1
iondef2_imon=1.56961E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98413E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.45134E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27206E0
ionrepsh_imon=9.39937E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33546E1
lens5b_imon=2.18543E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74732E1
cs_ef2b_imon=3.13222E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.37564E0
os_ea2_imon=-8.5437E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71183E1
cs_ef2a_imon=3.17975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07389E0
os_ef2alow_imon=-2.57806E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79543E-1
os_ef2bup_imon=-5.29891E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.36127E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.3195E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.10152E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73187E1
iondef1_imon=1.07246E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67937E1
iondef4_imon=1.08728E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.18306E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.32155E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1239E0
cs_ionaccel_imon=-1.15588E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47294E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5648E1
einzel_imon=7.70281E-6
window_vset=0.0E0
window_vmon=1.97013E-1
window_imon=-1.04734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39204E-4
mask2_vset=0.0E0
mask2_vmon=-1.86537E1
mask2_imon=-7.32966E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.47141E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.61787E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.37407E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35564E0
defgridb_imon=5.88786E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.38328E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06924E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60444E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3053E1
cs_fil1_imon=9.2619E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32568E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62739E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.59903E-2
os_fil2_imon=-2.69369E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92216E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.9832E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33013E-1
cs_fil2_imon=-2.24458E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21603E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.62503E-1
res40_imon=-2.50321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.24E2	0.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80016E1	-1.00136E-3	-8.80002E1	1.43051E-4	4.76837E-3	9.36031E-2	2.73664E1	-3.26573E1	-3.2636E1	2.67955E1	1.20281E-7	2.51758E-3	2.51758E-3	6.3074E-3	3.00916E-1
2.0E0	8.867E3	7.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80015E1	-8.10623E-4	-8.80005E1	4.29153E-4	4.8399E-3	9.35078E-2	2.72812E1	-3.26799E1	-3.26438E1	2.6802E1	1.19841E-7	2.51603E-3	2.51603E-3	6.33388E-3	3.00348E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.13143E-2	-8.80016E1	-8.58307E-4	-8.80005E1	2.14577E-4	4.64916E-3	9.36508E-2	2.73169E1	-3.26649E1	-3.26644E1	2.67833E1	1.19829E-7	2.52066E-3	2.52066E-3	6.3131E-3	3.02154E-1
4.0E0	2.079E3	0.0E0	6.55E2	3.98E2	-7.17007E-2	-8.80016E1	-1.09673E-3	-8.80002E1	4.52995E-4	4.8399E-3	9.36031E-2	2.72809E1	-3.26443E1	-3.25293E1	2.68316E1	1.20042E-7	2.52448E-3	2.52448E-3	6.2863E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80016E1	-1.16825E-3	-8.80003E1	4.76837E-5	4.64916E-3	9.35078E-2	2.72802E1	-3.26689E1	-3.26121E1	2.67856E1	1.20174E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.03185E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.25507E-2	-8.80016E1	-9.29832E-4	-8.80004E1	2.38419E-4	4.43459E-3	9.36031E-2	2.72696E1	-3.2635E1	-3.26314E1	2.67902E1	1.1969E-7	2.52236E-3	2.52236E-3	6.31269E-3	3.02875E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80013E1	-9.53674E-4	-8.8E1	3.09944E-4	4.52995E-3	9.37939E-2	2.73351E1	-3.26518E1	-3.26561E1	2.6822E1	1.19913E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80017E1	-7.86781E-4	-8.80002E1	5.24521E-4	4.60148E-3	9.37939E-2	2.737E1	-3.26531E1	-3.25505E1	2.6807E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.97445E-1
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80016E1	-5.96046E-4	-8.80001E1	3.8147E-4	4.79221E-3	9.36508E-2	2.72378E1	-3.26428E1	-3.2611E1	2.68064E1	1.20158E-7	2.51417E-3	2.51417E-3	6.32896E-3	2.9714E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.30146E-2	-8.80018E1	-6.91414E-4	-8.80001E1	2.6226E-4	5.00679E-3	9.34362E-2	2.73297E1	-3.26434E1	-3.26735E1	2.68082E1	1.20226E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.98222E-1
1.4E1	2.74E2	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80018E1	-9.29832E-4	-8.80002E1	1.43051E-4	4.88758E-3	9.3627E-2	2.73299E1	-3.26425E1	-3.27894E1	2.68016E1	1.20158E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00453E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80017E1	-1.00136E-3	-8.80006E1	0.0E0	4.72069E-3	9.35555E-2	2.72961E1	-3.27041E1	-3.2507E1	2.68298E1	1.20122E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01609E-1
1.6E1	2.9E1	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80015E1	-5.24521E-4	-8.80005E1	7.15256E-5	4.86374E-3	9.36031E-2	2.73135E1	-3.26891E1	-3.25287E1	2.68166E1	1.20004E-7	2.51096E-3	2.51096E-3	6.29128E-3	3.01738E-1
1.7E1	5.7E1	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80015E1	-6.19888E-4	-8.80006E1	3.8147E-4	5.126E-3	9.35555E-2	2.73134E1	-3.26331E1	-3.27216E1	2.67811E1	1.20084E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00942E-1
1.8E1	2.46E2	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80017E1	-6.67572E-4	-8.80001E1	1.19209E-4	4.93526E-3	9.36031E-2	2.72843E1	-3.26327E1	-3.25905E1	2.68106E1	1.20209E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
1.9E1	3.78E2	0.0E0	7.68E2	5.29E2	-7.32464E-2	-8.80016E1	-7.15256E-4	-8.8E1	2.14577E-4	5.05447E-3	9.40084E-2	2.73255E1	-3.26795E1	-3.27792E1	2.68088E1	1.19925E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.01475E-1
2.0E1	2.212E3	1.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80015E1	-8.82149E-4	-8.80003E1	2.6226E-4	4.79221E-3	9.34362E-2	2.73123E1	-3.26741E1	-3.25719E1	2.68082E1	1.20174E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9926E-1
2.1E1	1.0E1	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80014E1	-7.86781E-4	-8.79999E1	5.72205E-4	4.88758E-3	9.35078E-2	2.72974E1	-3.2639E1	-3.26732E1	2.68036E1	1.19953E-7	2.52061E-3	2.52061E-3	6.28056E-3	2.99941E-1
2.2E1	1.71E2	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80017E1	-1.14441E-3	-8.80001E1	3.57628E-4	4.74453E-3	9.33647E-2	2.72821E1	-3.26419E1	-3.26997E1	2.68064E1	1.20106E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80017E1	-1.3113E-3	-8.79999E1	2.38419E-4	4.62532E-3	9.34124E-2	2.73187E1	-3.26172E1	-3.26555E1	2.67937E1	1.19851E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00453E-1
