[Scan]
initial_time=2016-01-28T18:05:42
final_time=2016-01-28T18:06:02
ip_count=19
run=1026
dataset=3
scan=216
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.82818E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-5.95403E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.45903E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.58442E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=1.63187E-8
mult1=-1.00896E-8
mult2=-2.86433E-9
rf_tmon=-3.61719E-3
rf_agc=3.41387E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=5.99051E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65932E0
bslens_imon=2.61284E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1989E1
lens5a_imon=1.98758E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05273E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.08469E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02202E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0511E1
cs_ea1_imon=1.25078E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0794E0
lens1_imon=1.38974E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.96576E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03843E1
cs_ea2_imon=1.40174E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84628E1
cs_ef1a_imon=3.01225E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.14986E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15336E1
os_ea1_imon=2.45552E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.08505E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21353E0
cs_ionrep_imon=9.69433E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93288E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01701E1
cs_anode1_imon=2.03702E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.87141E-8
tplens_vset=1.4E-1
tplens_vmon=1.62674E0
tplens_imon=-2.52073E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25888E1
iondef3_imon=1.48218E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.58906E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98493E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=8.57699E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26863E0
ionrepsh_imon=9.26827E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33376E1
lens5b_imon=2.18335E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42044E0
os_ea2_imon=-6.3039E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00553E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71023E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07618E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.49972E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10721E1
os_restr2_imon=3.35139E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23066E2
cs_ionfoca_imon=6.30846E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.1109E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73454E1
iondef1_imon=1.08844E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6825E1
iondef4_imon=1.10359E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.18857E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.25944E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.22116E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=2.46775E-1
window_imon=-1.18512E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82673E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.59707E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.63475E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.42076E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38516E0
defgridb_imon=6.16828E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33196E1
os_fil1_imon=9.39591E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0671E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59922E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30561E1
cs_fil1_imon=9.238E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35269E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60163E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.76506E-2
os_fil2_imon=-2.53382E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.46783E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34054E-1
cs_fil2_imon=-1.98121E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55067E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2146E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.79114E-1
res40_imon=-2.65194E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.6E2	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80014E1	-6.4373E-4	-8.80002E1	1.90735E-4	4.57764E-3	9.38177E-2	2.73165E1	-3.26452E1	-3.26224E1	2.68472E1	1.19809E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
2.0E0	8.36E3	1.6E1	3.16E2	1.6E2	-7.30918E-2	-8.80015E1	-4.76837E-4	-8.80002E1	-2.14577E-4	4.60148E-3	9.38654E-2	2.7299E1	-3.26817E1	-3.25685E1	2.68107E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9926E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80021E1	-7.62939E-4	-8.80001E1	2.6226E-4	4.88758E-3	9.36747E-2	2.73196E1	-3.26619E1	-3.26868E1	2.6814E1	1.20297E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.99613E-1
4.0E0	1.985E3	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80019E1	-8.82149E-4	-8.80002E1	5.72205E-4	4.64916E-3	9.36985E-2	2.73093E1	-3.26494E1	-3.26488E1	2.6795E1	1.19991E-7	2.51393E-3	2.51393E-3	6.32328E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80019E1	-9.29832E-4	-8.79997E1	4.52995E-4	4.81606E-3	9.40084E-2	2.73219E1	-3.26627E1	-3.25725E1	2.67932E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02922E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80019E1	-8.34465E-4	-8.79999E1	2.14577E-4	4.88758E-3	9.38177E-2	2.72991E1	-3.26759E1	-3.26224E1	2.6804E1	1.19872E-7	2.5225E-3	2.5225E-3	6.29067E-3	3.01742E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80019E1	-7.39098E-4	-8.80003E1	2.38419E-5	5.19753E-3	9.36031E-2	2.72692E1	-3.26978E1	-3.25762E1	2.68082E1	1.19876E-7	2.51632E-3	2.51632E-3	6.33436E-3	2.98029E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80017E1	-8.34465E-4	-8.80003E1	2.14577E-4	4.76837E-3	9.35793E-2	2.72782E1	-3.26787E1	-3.2615E1	2.6813E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80019E1	-1.23978E-3	-8.80002E1	2.38419E-4	5.19753E-3	9.34601E-2	2.73364E1	-3.26756E1	-3.26461E1	2.6789E1	1.19653E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.99E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.15461E-2	-8.80017E1	-1.04904E-3	-8.80006E1	3.8147E-4	5.45979E-3	9.36031E-2	2.73061E1	-3.26714E1	-3.25956E1	2.68293E1	1.20383E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9952E-1
1.4E1	2.42E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80022E1	-8.58307E-4	-8.80003E1	1.19209E-4	5.22137E-3	9.37223E-2	2.72845E1	-3.26378E1	-3.26784E1	2.68016E1	1.20269E-7	2.51453E-3	2.51453E-3	6.31638E-3	3.00753E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80018E1	-7.15256E-4	-8.80002E1	1.19209E-4	5.07832E-3	9.35316E-2	2.73189E1	-3.26813E1	-3.26164E1	2.67986E1	1.20073E-7	2.5277E-3	2.5277E-3	6.31429E-3	3.00787E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80017E1	-7.39098E-4	-8.80002E1	1.90735E-4	5.26905E-3	9.36747E-2	2.7321E1	-3.26352E1	-3.26578E1	2.68101E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32936E-3	2.9978E-1
1.7E1	5.1E1	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.8002E1	-7.62939E-4	-8.80002E1	1.19209E-4	4.98295E-3	9.36747E-2	2.73021E1	-3.26632E1	-3.26673E1	2.68053E1	1.20088E-7	2.51809E-3	2.51809E-3	6.31283E-3	3.00249E-1
1.8E1	2.27E2	0.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80017E1	-8.82149E-4	-8.8E1	3.09944E-4	5.65052E-3	9.377E-2	2.72855E1	-3.26395E1	-3.26132E1	2.68225E1					
1.9E1	3.47E2	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80018E1	-9.53674E-4	-8.8E1	5.00679E-4	5.126E-3	9.36031E-2	2.73027E1	-3.26496E1	-3.26349E1	2.68024E1	1.19819E-7	2.52139E-3	2.52139E-3	6.32978E-3	2.99083E-1
2.0E1	2.07E3	1.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80017E1	-4.76837E-4	-8.80004E1	2.86102E-4	5.17368E-3	9.37223E-2	2.73219E1	-3.26296E1	-3.26224E1	2.68028E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.9943E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.8002E1	-7.15256E-4	-8.80004E1	3.33786E-4	4.76837E-3	9.36508E-2	2.7269E1	-3.2653E1	-3.26627E1	2.68082E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.99E-1
2.2E1	1.59E2	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80016E1	-5.24521E-4	-8.80003E1	3.09944E-4	4.79221E-3	9.37939E-2	2.7301E1	-3.26626E1	-3.26526E1	2.67968E1	1.20278E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80017E1	-6.91414E-4	-8.80004E1	1.43051E-4	5.10216E-3	9.39369E-2	2.73454E1	-3.26458E1	-3.25888E1	2.6825E1	1.20106E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.01738E-1
