[Scan]
initial_time=2016-01-28T18:07:33
final_time=2016-01-28T18:07:53
ip_count=19
run=1026
dataset=3
scan=220
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.73704E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.90956E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.4424E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.47922E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.62503E-8
mult1=-1.26422E-8
mult2=-2.96613E-9
rf_tmon=-4.87292E-3
rf_agc=3.26486E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=6.0612E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6373E0
bslens_imon=2.54136E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20253E1
lens5a_imon=1.98451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12444E2
lens4a_imon=2.04862E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.538E1
cs_ef1b_imon=3.09894E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05096E1
cs_ea1_imon=1.2491E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08702E0
lens1_imon=1.49592E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64562E1
os_ef1alow_imon=2.95993E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03546E1
cs_ea2_imon=1.4052E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=3.00094E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.16362E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11355E1
os_restr1_imon=4.29512E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=2.4582E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.0833E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=9.80534E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93258E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.04802E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.88164E-8
tplens_vset=1.4E-1
tplens_vmon=1.55972E0
tplens_imon=-2.34457E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2611E1
iondef3_imon=1.50289E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.56562E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.9845E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=9.07898E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28214E0
ionrepsh_imon=9.30425E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3358E1
lens5b_imon=2.1799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12327E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38668E0
os_ea2_imon=-5.91347E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00515E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71484E1
cs_ef2a_imon=3.18408E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06093E0
os_ef2alow_imon=-2.67884E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85067E-1
os_ef2bup_imon=-5.36869E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=3.35993E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0167E1
cs_anode2_imon=2.09529E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72913E1
iondef1_imon=1.10166E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67986E1
iondef4_imon=1.07843E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.27092E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=7.30739E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.07327E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47157E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56121E1
einzel_imon=7.78167E-6
window_vset=0.0E0
window_vmon=1.73087E-1
window_imon=-1.08022E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86657E1
mask2_imon=-6.59718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.31071E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.55727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.28548E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=6.00572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33209E1
os_fil1_imon=9.39848E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07567E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60236E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30584E1
cs_fil1_imon=9.25415E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32448E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60526E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55092E-2
os_fil2_imon=-2.7329E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96448E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.25909E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32648E-1
cs_fil2_imon=-2.5881E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.62454E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21508E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.51676E-1
res40_imon=-2.47032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.06E2	0.0E0	1.47E2	4.1E1	-7.03094E-2	-8.80017E1	-7.86781E-4	-8.80004E1	-1.19209E-4	4.72069E-3	9.33886E-2	2.73015E1	-3.26885E1	-3.26422E1	2.67716E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.98156E-1
2.0E0	8.52E3	4.0E0	3.16E2	1.6E2	-7.10051E-2	-8.80016E1	-7.62939E-4	-8.80004E1	9.53674E-5	5.00679E-3	9.34839E-2	2.7321E1	-3.26679E1	-3.26372E1	2.67782E1	1.19913E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00563E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.17007E-2	-8.80017E1	-8.10623E-4	-8.80004E1	2.14577E-4	4.8399E-3	9.34601E-2	2.72983E1	-3.26909E1	-3.25708E1	2.68157E1	1.20004E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.0148E-1
4.0E0	2.006E3	2.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80018E1	-6.91414E-4	-8.80005E1	1.90735E-4	4.673E-3	9.36031E-2	2.73466E1	-3.26669E1	-3.26561E1	2.67995E1	1.20042E-7	2.52236E-3	2.52236E-3	6.32858E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27053E-2	-8.80018E1	-6.91414E-4	-8.80006E1	-1.19209E-4	5.17368E-3	9.34362E-2	2.7319E1	-3.26693E1	-3.25853E1	2.68129E1	1.20106E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.8002E1	-6.67572E-4	-8.80005E1	9.53674E-5	5.05447E-3	9.3174E-2	2.7252E1	-3.26738E1	-3.26549E1	2.68059E1	1.19958E-7	2.51521E-3	2.51521E-3	6.32622E-3	2.98592E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80018E1	-4.52995E-4	-8.80005E1	2.38419E-5	4.55379E-3	9.35555E-2	2.72979E1	-3.26687E1	-3.25707E1	2.67866E1	1.20055E-7	2.51847E-3	2.51847E-3	6.29128E-3	2.99941E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80018E1	-5.72205E-4	-8.80005E1	2.86102E-4	5.29289E-3	9.34839E-2	2.73315E1	-3.26795E1	-3.26224E1	2.68268E1	1.20226E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.01347E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.8002E1	-5.00679E-4	-8.80006E1	1.90735E-4	5.05447E-3	9.32217E-2	2.72606E1	-3.26494E1	-3.26158E1	2.68118E1	1.19705E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80018E1	-5.96046E-4	-8.80003E1	1.90735E-4	4.88758E-3	9.30548E-2	2.73092E1	-3.26691E1	-3.26997E1	2.67992E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02659E-1
1.4E1	3.02E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80017E1	-6.4373E-4	-8.80004E1	7.15256E-5	4.98295E-3	9.32455E-2	2.73167E1	-3.26799E1	-3.2563E1	2.67878E1	1.20158E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.02769E-1
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80018E1	-9.77516E-4	-8.80007E1	1.19209E-4	4.62532E-3	9.32217E-2	2.73243E1	-3.26524E1	-3.2593E1	2.68034E1	1.19819E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.02277E-1
1.6E1	4.0E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80015E1	-8.82149E-4	-8.80007E1	9.53674E-5	5.10216E-3	9.33647E-2	2.73122E1	-3.26968E1	-3.26113E1	2.6816E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02396E-1
1.7E1	5.8E1	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80017E1	-7.86781E-4	-8.80005E1	1.19209E-4	4.79221E-3	9.34601E-2	2.73027E1	-3.26993E1	-3.2632E1	2.67992E1	1.19953E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
1.8E1	1.88E2	1.0E0	7.27E2	5.0E2	-7.286E-2	-8.80019E1	-9.29832E-4	-8.80002E1	3.57628E-4	4.8399E-3	9.38416E-2	2.73434E1	-3.26785E1	-3.2649E1	2.68036E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
1.9E1	3.14E2	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80016E1	-8.82149E-4	-8.80004E1	4.76837E-5	4.95911E-3	9.34839E-2	2.72762E1	-3.26354E1	-3.26638E1	2.68118E1	1.19851E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1
2.0E1	2.195E3	3.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80017E1	-5.48363E-4	-8.80003E1	2.14577E-4	5.126E-3	9.34124E-2	2.7157E1	-3.25158E1	-3.2694E1	2.68208E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99941E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.80015E1	-7.86781E-4	-8.80006E1	3.09944E-4	5.07832E-3	9.34839E-2	2.72703E1	-3.26673E1	-3.26207E1	2.6801E1	1.20084E-7	2.51248E-3	2.51248E-3	6.33538E-3	3.0041E-1
2.2E1	1.49E2	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80018E1	-6.19888E-4	-8.80004E1	2.14577E-4	5.22137E-3	9.34362E-2	2.73181E1	-3.26862E1	-3.26425E1	2.67995E1	1.198E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.02769E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80016E1	-5.96046E-4	-8.80005E1	4.05312E-4	5.03063E-3	9.33886E-2	2.72913E1	-3.26591E1	-3.2611E1	2.67986E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
