[Scan]
initial_time=2016-01-28T18:08:56
final_time=2016-01-28T18:09:16
ip_count=19
run=1026
dataset=3
scan=223
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.78411E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.77295E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.44258E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.53334E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.62786E-8
mult1=-1.17873E-8
mult2=-2.71861E-9
rf_tmon=-4.66864E-3
rf_agc=3.27748E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=5.60665E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70574E0
bslens_imon=2.64236E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19777E1
lens5a_imon=1.98014E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12443E2
lens4a_imon=2.05189E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=3.10055E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02273E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04917E1
cs_ea1_imon=1.23403E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08728E0
lens1_imon=1.40711E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.98847E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0415E1
cs_ea2_imon=1.41454E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84556E1
cs_ef1a_imon=3.00108E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.16523E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=4.31076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=2.45407E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.05118E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=9.74242E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93424E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01491E1
cs_anode1_imon=2.0536E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.88838E-8
tplens_vset=1.4E-1
tplens_vmon=1.66857E0
tplens_imon=-2.52875E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2653E1
iondef3_imon=1.48923E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26488E1
iondef2_imon=1.56674E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98519E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.80086E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26154E0
ionrepsh_imon=9.28229E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3305E1
lens5b_imon=2.17481E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.08758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41845E0
os_ea2_imon=-6.49289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00488E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.23858E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08279E0
os_ef2alow_imon=-2.70239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.64388E-1
os_ef2bup_imon=-5.00893E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1176E1
os_restr2_imon=3.36436E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.09324E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.09423E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67848E1
iondef4_imon=1.03223E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.15967E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.30379E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09951E0
cs_ionaccel_imon=-1.04817E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47169E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56075E1
einzel_imon=7.54729E-6
window_vset=0.0E0
window_vmon=1.98722E-1
window_imon=-1.14909E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39127E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.3427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.62066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.04893E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34945E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33204E1
os_fil1_imon=9.41021E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06698E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60277E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30535E1
cs_fil1_imon=9.24983E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2698E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60829E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49651E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.27747E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.29965E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-3.03838E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.88704E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21585E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19493E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.85411E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.91E2	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80017E1	-6.4373E-4	-8.80005E1	-9.53674E-5	5.14984E-3	9.36985E-2	2.73141E1	-3.26585E1	-3.26284E1	2.6819E1	1.19902E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00966E-1
2.0E0	8.397E3	1.2E1	3.16E2	1.6E2	-7.30146E-2	-8.80017E1	-2.86102E-4	-8.80004E1	-1.90735E-4	4.98295E-3	9.36031E-2	2.72855E1	-3.26487E1	-3.26389E1	2.67914E1	1.19697E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.03027E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.8002E1	-4.52995E-4	-8.80002E1	-2.38419E-5	4.86374E-3	9.37939E-2	2.72796E1	-3.26915E1	-3.25941E1	2.6792E1	1.201E-7	2.51498E-3	2.51498E-3	6.3245E-3	3.00794E-1
4.0E0	1.896E3	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80018E1	-4.29153E-4	-8.80002E1	2.38419E-4	5.07832E-3	9.35793E-2	2.72973E1	-3.26723E1	-3.26344E1	2.68136E1	1.1974E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80017E1	-5.48363E-4	-8.80004E1	4.05312E-4	4.93526E-3	9.38892E-2	2.73227E1	-3.26727E1	-3.2663E1	2.68708E1	1.19972E-7	2.5199E-3	2.5199E-3	6.32342E-3	2.99513E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.15461E-2	-8.80017E1	-6.91414E-4	-8.80004E1	3.57628E-4	4.74453E-3	9.32932E-2	2.72861E1	-3.26615E1	-3.26327E1	2.68315E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80021E1	-1.19209E-3	-8.80003E1	2.6226E-4	4.93526E-3	9.37223E-2	2.72959E1	-3.26334E1	-3.2604E1	2.6829E1	1.19819E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.01475E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.8002E1	-9.53674E-4	-8.80003E1	1.66893E-4	5.07832E-3	9.38654E-2	2.73261E1	-3.26512E1	-3.25996E1	2.68022E1	1.20244E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00942E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80018E1	-9.53674E-4	-8.80002E1	4.52995E-4	5.17368E-3	9.41277E-2	2.73129E1	-3.26645E1	-3.26314E1	2.6816E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.01871E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80017E1	-6.19888E-4	-8.80002E1	1.19209E-4	5.03063E-3	9.39369E-2	2.7254E1	-3.26561E1	-3.2626E1	2.68244E1	1.20226E-7	2.51334E-3	2.51334E-3	6.30192E-3	2.9926E-1
1.4E1	2.56E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80016E1	-7.62939E-4	-8.80002E1	1.43051E-4	5.05447E-3	9.39131E-2	2.73098E1	-3.26425E1	-3.26561E1	2.68274E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.97394E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80016E1	-1.14441E-3	-8.80005E1	-1.90735E-4	4.98295E-3	9.37462E-2	2.73175E1	-3.2675E1	-3.26425E1	2.68448E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01347E-1
1.6E1	2.6E1	0.0E0	6.47E2	4.41E2	-7.40192E-2	-8.80016E1	-9.77516E-4	-8.80002E1	-2.38419E-5	4.88758E-3	9.36985E-2	2.72787E1	-3.26765E1	-3.25785E1	2.681E1	1.1969E-7	2.52236E-3	2.52236E-3	6.28103E-3	3.01862E-1
1.7E1	3.8E1	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80016E1	-1.04904E-3	-8.80003E1	0.0E0	4.72069E-3	9.38416E-2	2.73514E1	-3.27089E1	-3.26398E1	2.6774E1	1.19757E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
1.8E1	2.08E2	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80017E1	-1.12057E-3	-8.80004E1	9.53674E-5	5.05447E-3	9.35793E-2	2.72892E1	-3.26762E1	-3.25552E1	2.67995E1	1.20174E-7	2.52538E-3	2.52538E-3	6.31288E-3	2.9978E-1
1.9E1	3.3E2	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80018E1	-1.04904E-3	-8.80006E1	2.6226E-4	4.88758E-3	9.38892E-2	2.7324E1	-3.26543E1	-3.26018E1	2.67866E1	1.19965E-7	2.51552E-3	2.51552E-3	6.34588E-3	2.9926E-1
2.0E1	2.107E3	0.0E0	8.08E2	5.58E2	-7.16233E-2	-8.80015E1	-1.07288E-3	-8.80008E1	1.66893E-4	4.91142E-3	9.36031E-2	2.72973E1	-3.27059E1	-3.27179E1	2.68046E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00966E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80016E1	-7.15256E-4	-8.80004E1	-1.43051E-4	5.29289E-3	9.40084E-2	2.73092E1	-3.26655E1	-3.25794E1	2.68134E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01347E-1
2.2E1	1.38E2	1.0E0	8.89E2	6.17E2	-7.12368E-2	-8.80019E1	-5.00679E-4	-8.80004E1	-9.53674E-5	4.91142E-3	9.34839E-2	2.72925E1	-3.26573E1	-3.26807E1	2.6798E1	1.198E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80018E1	-7.15256E-4	-8.80003E1	9.53674E-5	4.91142E-3	9.36985E-2	2.73099E1	-3.26488E1	-3.2653E1	2.67848E1	1.19493E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00966E-1
