[Scan]
initial_time=2016-01-28T18:09:24
final_time=2016-01-28T18:09:44
ip_count=19
run=1026
dataset=3
scan=224
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.7838E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.83172E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.45538E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.51656E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.62482E-8
mult1=-1.01767E-8
mult2=-2.71111E-9
rf_tmon=-4.50594E-3
rf_agc=3.38371E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=5.43499E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65866E0
bslens_imon=2.74713E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20194E1
lens5a_imon=1.97689E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05049E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53639E1
cs_ef1b_imon=3.09909E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.01957E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05228E1
cs_ea1_imon=1.25856E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08781E0
lens1_imon=1.48958E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64764E1
os_ef1alow_imon=2.96987E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04073E1
cs_ea2_imon=1.40651E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84342E1
cs_ef1a_imon=2.99828E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.15991E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11474E1
os_restr1_imon=4.31037E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15008E1
os_ea1_imon=2.44136E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63428E1
os_ef1bup_imon=3.07846E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26897E0
cs_ionrep_imon=9.77852E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01932E1
cs_anode1_imon=2.05791E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.88608E-8
tplens_vset=1.4E-1
tplens_vmon=1.6012E0
tplens_imon=-3.09151E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26967E1
iondef3_imon=1.49528E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26357E1
iondef2_imon=1.58015E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98513E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=8.57914E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27676E0
ionrepsh_imon=9.17505E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33846E1
lens5b_imon=2.19336E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74696E1
cs_ef2b_imon=3.1205E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42016E0
os_ea2_imon=-6.05046E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00638E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71115E1
cs_ef2a_imon=3.19407E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02666E0
os_ef2alow_imon=-2.61503E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.60231E-1
os_ef2bup_imon=-5.4058E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10987E1
os_restr2_imon=3.36299E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.2985E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01906E1
cs_anode2_imon=2.09099E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73109E1
iondef1_imon=1.09115E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67589E1
iondef4_imon=1.08367E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.17191E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.34232E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10938E0
cs_ionaccel_imon=-1.12818E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.473E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56185E1
einzel_imon=7.68395E-6
window_vset=0.0E0
window_vmon=1.68569E-1
window_imon=-1.1204E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39069E-4
mask2_vset=0.0E0
mask2_vmon=-1.86882E1
mask2_imon=-6.45539E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.71894E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.6833E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=7.30235E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59838E0
defgridb_imon=6.1032E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33192E1
os_fil1_imon=9.41616E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06752E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60558E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3061E1
cs_fil1_imon=9.2436E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32116E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.60835E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56742E-2
os_fil2_imon=-2.40576E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96657E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.98453E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34826E-1
cs_fil2_imon=-2.30197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32434E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21495E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31251E-3
inlet_lpb_pmon=3.02097E-1
chamber_ion_pmon=1.19822E-7
chamber_cvt_pmon=2.51956E-3
foreline_cvt_pmon=2.51956E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.23058E-1
res40_imon=-2.38928E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.01E2	1.0E0	1.47E2	4.1E1	-7.12368E-2	-8.80016E1	-6.19888E-4	-8.80005E1	2.38419E-4	4.48227E-3	9.35793E-2	2.72998E1	-3.26425E1	-3.26378E1	2.68128E1	1.20188E-7	2.52621E-3	2.52621E-3	6.30149E-3	3.03312E-1
2.0E0	8.542E3	9.0E0	3.16E2	1.6E2	-7.26282E-2	-8.80017E1	-7.39098E-4	-8.80003E1	5.48363E-4	4.76837E-3	9.35555E-2	2.72537E1	-3.26811E1	-3.26848E1	2.67974E1	1.19902E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.03545E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.18554E-2	-8.8002E1	-7.39098E-4	-8.80004E1	1.66893E-4	5.17368E-3	9.34839E-2	2.72929E1	-3.2659E1	-3.26272E1	2.68052E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01609E-1
4.0E0	2.039E3	0.0E0	6.55E2	3.98E2	-7.16233E-2	-8.80017E1	-8.82149E-4	-8.8E1	3.33786E-4	4.98295E-3	9.36031E-2	2.73093E1	-3.265E1	-3.2608E1	2.67884E1	1.19953E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80017E1	-1.09673E-3	-8.80003E1	2.14577E-4	5.03063E-3	9.36985E-2	2.73092E1	-3.26667E1	-3.26166E1	2.68059E1	1.20004E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.14689E-2	-8.80017E1	-9.05991E-4	-8.80004E1	-2.38419E-5	5.10216E-3	9.35555E-2	2.73129E1	-3.2623E1	-3.26296E1	2.68124E1	1.20004E-7	2.52707E-3	2.52707E-3	6.32356E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.14689E-2	-8.80016E1	-8.58307E-4	-8.80003E1	1.66893E-4	4.62532E-3	9.36985E-2	2.72288E1	-3.2653E1	-3.25978E1	2.68046E1	1.20122E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80018E1	-8.82149E-4	-8.80006E1	0.0E0	4.64916E-3	9.36747E-2	2.72939E1	-3.26413E1	-3.26579E1	2.68148E1	1.20122E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.01085E-1
1.2E1	7.0E0	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.8002E1	-8.34465E-4	-8.80005E1	1.66893E-4	4.64916E-3	9.377E-2	2.72991E1	-3.26819E1	-3.26038E1	2.68118E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00041E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80018E1	-8.82149E-4	-8.80001E1	1.19209E-4	4.74453E-3	9.38892E-2	2.72654E1	-3.26825E1	-3.26573E1	2.68118E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
1.4E1	2.91E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80018E1	-1.21593E-3	-8.79998E1	0.0E0	4.64916E-3	9.36747E-2	2.73328E1	-3.26726E1	-3.25629E1	2.67949E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
1.5E1	9.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80017E1	-1.21593E-3	-8.79999E1	7.15256E-5	4.88758E-3	9.36747E-2	2.72959E1	-3.27007E1	-3.26132E1	2.68132E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31014E-3	3.00563E-1
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80019E1	-1.00136E-3	-8.8E1	1.66893E-4	5.126E-3	9.377E-2	2.73339E1	-3.26801E1	-3.2605E1	2.68052E1					
1.7E1	6.9E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80017E1	-8.82149E-4	-8.80004E1	-2.38419E-4	4.88758E-3	9.37939E-2	2.73104E1	-3.26579E1	-3.26301E1	2.68012E1	1.19705E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
1.8E1	2.35E2	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.8002E1	-1.3113E-3	-8.80004E1	9.53674E-5	4.673E-3	9.37223E-2	2.72971E1	-3.26897E1	-3.26364E1	2.67889E1	1.20069E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00041E-1
1.9E1	3.44E2	1.0E0	7.68E2	5.29E2	-7.17779E-2	-8.80017E1	-9.53674E-4	-8.80003E1	4.76837E-5	4.95911E-3	9.40084E-2	2.73311E1	-3.26726E1	-3.2606E1	2.67868E1	1.20122E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.02659E-1
2.0E1	2.074E3	2.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80017E1	-8.34465E-4	-8.80003E1	9.53674E-5	4.88758E-3	9.34839E-2	2.73195E1	-3.26639E1	-3.25894E1	2.68046E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01347E-1
2.1E1	9.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80018E1	-7.86781E-4	-8.80003E1	2.38419E-4	4.74453E-3	9.3627E-2	2.73562E1	-3.26693E1	-3.26308E1	2.6822E1	1.20174E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.01347E-1
2.2E1	1.56E2	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.8002E1	-9.29832E-4	-8.80002E1	-7.15256E-5	4.86374E-3	9.36985E-2	2.73129E1	-3.26478E1	-3.26148E1	2.6778E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80016E1	-7.86781E-4	-8.80003E1	2.14577E-4	4.93526E-3	9.39369E-2	2.73109E1	-3.26357E1	-3.26967E1	2.67589E1	1.19822E-7	2.51956E-3	2.51956E-3	6.31251E-3	3.02097E-1
