[Scan]
initial_time=2016-01-28T18:10:18
final_time=2016-01-28T18:10:38
ip_count=19
run=1026
dataset=3
scan=226
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.77864E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-5.867E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=1.40908E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.50828E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.62819E-8
mult1=-1.07638E-8
mult2=-2.73059E-9
rf_tmon=-4.74074E-3
rf_agc=3.3652E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.61249E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65855E0
bslens_imon=2.52202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19801E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=3.10415E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02142E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04793E1
cs_ea1_imon=1.24359E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0861E0
lens1_imon=1.54161E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.9654E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03614E1
cs_ea2_imon=1.40782E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=3.0E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.17534E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.3068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15465E1
os_ea1_imon=2.43177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63833E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=9.81674E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93303E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01587E1
cs_anode1_imon=2.04495E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.87997E-8
tplens_vset=1.4E-1
tplens_vmon=1.62787E0
tplens_imon=-8.29832E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25984E1
iondef3_imon=1.49666E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26789E1
iondef2_imon=1.56709E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.22902E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24266E0
ionrepsh_imon=9.42033E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.1826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74543E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44087E0
os_ea2_imon=-7.23616E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.0057E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.18056E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04194E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76401E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.37337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.09432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72769E1
iondef1_imon=1.09989E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68131E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.19341E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.35332E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10431E0
cs_ionaccel_imon=-1.01574E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.84907E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39135E-4
mask2_vset=0.0E0
mask2_vmon=-1.86566E1
mask2_imon=-7.34629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92646E3
multa_neg_imon=7.88423E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.68083E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.3073E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24315E0
defgridb_imon=6.24902E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33219E1
os_fil1_imon=9.39273E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07083E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60419E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3064E1
cs_fil1_imon=9.24743E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.25538E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61135E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49651E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98915E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.10729E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.65996E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.98064E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21609E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9952E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.19648E-1
res40_imon=-2.39245E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.18E2	0.0E0	1.47E2	4.1E1	-7.201E-2	-8.80018E1	-1.19209E-3	-8.80004E1	-1.66893E-4	4.57764E-3	9.34839E-2	2.73128E1	-3.26573E1	-3.26142E1	2.67937E1	1.19646E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00197E-1
2.0E0	8.602E3	8.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80015E1	-1.19209E-3	-8.80003E1	-5.48363E-4	4.60148E-3	9.3627E-2	2.73247E1	-3.26817E1	-3.26297E1	2.68157E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01871E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80016E1	-1.09673E-3	-8.80001E1	7.15256E-5	4.74453E-3	9.36031E-2	2.72886E1	-3.26838E1	-3.26242E1	2.67995E1	1.20069E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.00041E-1
4.0E0	1.991E3	1.0E0	6.55E2	3.98E2	-7.23189E-2	-8.80017E1	-7.62939E-4	-8.8E1	2.38419E-5	4.88758E-3	9.34839E-2	2.73175E1	-3.26496E1	-3.27021E1	2.6822E1	1.20209E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80018E1	-8.34465E-4	-8.80002E1	-2.38419E-4	4.48227E-3	9.36031E-2	2.72751E1	-3.26334E1	-3.26174E1	2.68004E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.201E-2	-8.8002E1	-1.0252E-3	-8.80002E1	2.38419E-5	4.55379E-3	9.35793E-2	2.73285E1	-3.26446E1	-3.25846E1	2.68286E1	1.20174E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.80019E1	-8.58307E-4	-8.80005E1	-1.90735E-4	4.64916E-3	9.33886E-2	2.72886E1	-3.26992E1	-3.2685E1	2.68196E1	1.19809E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80018E1	-1.09673E-3	-8.80002E1	-1.90735E-4	4.64916E-3	9.37223E-2	2.72739E1	-3.26488E1	-3.25846E1	2.67962E1					
1.2E1	5.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80019E1	-1.23978E-3	-8.80005E1	-3.33786E-4	5.07832E-3	9.36031E-2	2.73297E1	-3.26837E1	-3.26242E1	2.68028E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02396E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.80021E1	-1.04904E-3	-8.80003E1	-1.66893E-4	4.95911E-3	9.38177E-2	2.72931E1	-3.26362E1	-3.26068E1	2.6831E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02922E-1
1.4E1	2.95E2	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.8002E1	-8.34465E-4	-8.80003E1	-2.38419E-5	4.88758E-3	9.35316E-2	2.72781E1	-3.26597E1	-3.26687E1	2.67806E1	1.20158E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.03027E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80017E1	-9.29832E-4	-8.80004E1	1.19209E-4	4.93526E-3	9.35316E-2	2.73093E1	-3.26416E1	-3.26963E1	2.68082E1	1.19653E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
1.6E1	3.4E1	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80018E1	-7.15256E-4	-8.80004E1	3.8147E-4	4.95911E-3	9.36747E-2	2.7263E1	-3.26975E1	-3.25695E1	2.68076E1	1.19861E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01347E-1
1.7E1	4.5E1	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.8002E1	-1.00136E-3	-8.80001E1	-9.53674E-5	4.8399E-3	9.3317E-2	2.73021E1	-3.26266E1	-3.26591E1	2.6829E1	1.20191E-7	2.52027E-3	2.52027E-3	6.33538E-3	3.00144E-1
1.8E1	2.22E2	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80021E1	-1.00136E-3	-8.80003E1	-7.15256E-5	4.81606E-3	9.35555E-2	2.72573E1	-3.2671E1	-3.26289E1	2.67984E1	1.20209E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.99686E-1
1.9E1	2.96E2	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.80018E1	-1.19209E-3	-8.80003E1	-4.76837E-5	4.95911E-3	9.34601E-2	2.73057E1	-3.26285E1	-3.26241E1	2.68238E1	1.20028E-7	2.51679E-3	2.51679E-3	6.30221E-3	3.01237E-1
2.0E1	2.178E3	1.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80019E1	-9.53674E-4	-8.80004E1	7.15256E-5	4.86374E-3	9.34839E-2	2.73315E1	-3.26789E1	-3.26092E1	2.6789E1	1.20226E-7	2.51527E-3	2.51527E-3	6.31902E-3	3.00639E-1
2.1E1	8.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.8002E1	-9.53674E-4	-8.80001E1	9.53674E-5	4.3869E-3	9.39608E-2	2.73016E1	-3.26885E1	-3.26437E1	2.67986E1	1.20055E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.00966E-1
2.2E1	1.59E2	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80023E1	-1.09673E-3	-8.80003E1	1.19209E-4	4.86374E-3	9.35555E-2	2.73514E1	-3.26482E1	-3.26975E1	2.68059E1	1.20055E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80021E1	-1.12057E-3	-8.80002E1	4.52995E-4	4.88758E-3	9.36508E-2	2.72769E1	-3.26789E1	-3.25984E1	2.68131E1	1.20174E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
