[Scan]
initial_time=2016-01-28T18:10:45
final_time=2016-01-28T18:11:05
ip_count=19
run=1026
dataset=3
scan=227
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.18554E-2
qbias_imon=-3.84369E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.4909E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.43284E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.49119E-9
ql4_vset=
ql4_vmon=-1.66893E-4
ql4_imon=1.62639E-8
mult1=-1.19197E-8
mult2=-2.78049E-9
rf_tmon=-4.16395E-3
rf_agc=3.4349E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=6.01351E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67515E0
bslens_imon=2.67474E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19815E1
lens5a_imon=1.98055E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05028E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=3.10343E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02024E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04724E1
cs_ea1_imon=1.24045E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08402E0
lens1_imon=1.38417E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03738E1
cs_ea2_imon=1.42322E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84526E1
cs_ef1a_imon=2.9964E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.17391E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.30896E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15246E1
os_ea1_imon=2.4427E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23467E0
cs_ionrep_imon=9.68998E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91909E2
cs_nozzle_imon=1.93543E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01881E1
cs_anode1_imon=2.03594E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.8843E-8
tplens_vset=1.4E-1
tplens_vmon=1.62281E0
tplens_imon=-2.27247E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26296E1
iondef3_imon=1.48631E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26554E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.87513E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=9.2682E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3355E1
lens5b_imon=2.1817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.13299E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39449E0
os_ea2_imon=-5.58903E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00399E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71132E1
cs_ef2a_imon=3.19281E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.71595E-1
os_ef2bup_imon=-5.38014E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.36832E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.10694E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72781E1
iondef1_imon=1.08616E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68028E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.22468E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.33954E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11633E0
cs_ionaccel_imon=-1.03015E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47284E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56351E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=1.90914E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86644E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.32874E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93701E3
defgrida_imon=6.02735E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.33955E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5369E0
defgridb_imon=5.95885E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.40324E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07017E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60625E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30591E1
cs_fil1_imon=9.25085E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32265E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6132E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.56381E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.03867E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33018E-1
cs_fil2_imon=-2.09534E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21615E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19697E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.48616E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.27E2	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.8002E1	-8.82149E-4	-8.80003E1	1.43051E-4	4.673E-3	9.34124E-2	2.72883E1	-3.26903E1	-3.26121E1	2.67758E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
2.0E0	8.559E3	4.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80017E1	-4.05312E-4	-8.80004E1	1.19209E-4	4.673E-3	9.34601E-2	2.7291E1	-3.26554E1	-3.25979E1	2.67914E1	1.19891E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.006E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80019E1	-4.05312E-4	-8.80003E1	2.86102E-4	4.79221E-3	9.35316E-2	2.73411E1	-3.26756E1	-3.26402E1	2.68117E1	1.19883E-7	2.51838E-3	2.51838E-3	6.3074E-3	3.01337E-1
4.0E0	1.957E3	2.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80019E1	-4.29153E-4	-8.80005E1	-2.38419E-5	4.8399E-3	9.36508E-2	2.72443E1	-3.26767E1	-3.26136E1	2.68076E1	1.19941E-7	2.52342E-3	2.52342E-3	6.31798E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80021E1	-4.05312E-4	-8.80003E1	4.29153E-4	4.98295E-3	9.32932E-2	2.73381E1	-3.26531E1	-3.2649E1	2.67872E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80023E1	-5.48363E-4	-8.80003E1	2.38419E-4	4.74453E-3	9.35793E-2	2.72901E1	-3.26861E1	-3.25846E1	2.68232E1	1.19809E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.8002E1	-2.38419E-4	-8.80002E1	1.19209E-4	5.05447E-3	9.3317E-2	2.73021E1	-3.2647E1	-3.26266E1	2.6777E1	1.20226E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80019E1	-5.96046E-4	-8.80002E1	-1.43051E-4	4.69685E-3	9.3174E-2	2.72997E1	-3.26693E1	-3.26579E1	2.67962E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30146E-2	-8.80018E1	-7.86781E-4	-8.80001E1	-7.15256E-5	4.91142E-3	9.33409E-2	2.73063E1	-3.26425E1	-3.26136E1	2.67649E1	1.20004E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80021E1	-3.09944E-4	-8.80001E1	-2.38419E-5	4.95911E-3	9.33409E-2	2.72901E1	-3.26308E1	-3.26524E1	2.6801E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
1.4E1	2.83E2	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80021E1	-5.00679E-4	-8.80002E1	-4.76837E-5	5.24521E-3	9.35316E-2	2.73488E1	-3.27021E1	-3.25983E1	2.68296E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.04582E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80016E1	-6.4373E-4	-8.80001E1	9.53674E-5	4.64916E-3	9.35793E-2	2.73039E1	-3.26992E1	-3.26136E1	2.6783E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00824E-1
1.6E1	2.2E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80016E1	-6.19888E-4	-8.80002E1	7.15256E-5	4.69685E-3	9.35078E-2	2.73315E1	-3.26795E1	-3.25972E1	2.68244E1	1.20004E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.00453E-1
1.7E1	4.8E1	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80018E1	-4.76837E-4	-8.80003E1	2.38419E-5	4.69685E-3	9.35555E-2	2.72935E1	-3.26566E1	-3.26254E1	2.68082E1	1.20106E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.00453E-1
1.8E1	2.1E2	1.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80017E1	-9.53674E-4	-8.80002E1	7.15256E-5	4.91142E-3	9.35793E-2	2.73198E1	-3.2682E1	-3.26189E1	2.68118E1	1.19766E-7	2.50803E-3	2.50803E-3	6.31299E-3	3.00942E-1
1.9E1	3.18E2	0.0E0	7.68E2	5.29E2	-7.23189E-2	-8.80016E1	-6.67572E-4	-8.80004E1	2.38419E-4	5.10216E-3	9.34124E-2	2.72883E1	-3.26903E1	-3.26434E1	2.6777E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
2.0E1	2.201E3	1.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80019E1	-6.19888E-4	-8.80004E1	-2.38419E-5	4.673E-3	9.35555E-2	2.72648E1	-3.26518E1	-3.26687E1	2.67968E1	1.19856E-7	2.52134E-3	2.52134E-3	6.31555E-3	3.00896E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.17779E-2	-8.80021E1	-8.10623E-4	-8.80003E1	-2.38419E-5	5.07832E-3	9.38177E-2	2.72848E1	-3.26532E1	-3.26654E1	2.68024E1					
2.2E1	1.47E2	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80019E1	-9.29832E-4	-8.80004E1	9.53674E-5	4.81606E-3	9.35078E-2	2.73123E1	-3.26579E1	-3.25725E1	2.68454E1	1.20209E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.01223E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.18554E-2	-8.8002E1	-9.05991E-4	-8.80004E1	-1.66893E-4	4.64916E-3	9.36985E-2	2.72781E1	-3.26554E1	-3.26296E1	2.68028E1	1.19697E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0148E-1
