[Scan]
initial_time=2016-01-28T18:11:12
final_time=2016-01-28T18:11:32
ip_count=19
run=1026
dataset=3
scan=228
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.73675E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.33812E-10
ql2_vset=
ql2_vmon=-9.77516E-4
ql2_imon=1.48183E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.49558E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.62276E-8
mult1=-9.55978E-9
mult2=-2.61282E-9
rf_tmon=-3.67127E-3
rf_agc=3.37782E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.36919E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6427E0
bslens_imon=2.52694E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20145E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12488E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=3.10091E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02168E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=1.26857E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09002E0
lens1_imon=1.45266E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03949E1
cs_ea2_imon=1.41457E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84466E1
cs_ef1a_imon=3.0173E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.17465E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.30536E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15035E1
os_ea1_imon=2.42648E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.07929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22025E0
cs_ionrep_imon=9.58904E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93474E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=2.05035E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20475E0
olens4_imon=3.89578E-8
tplens_vset=1.4E-1
tplens_vmon=1.66066E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.4809E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26182E1
iondef2_imon=1.57751E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=8.30817E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23828E0
ionrepsh_imon=9.29704E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3394E1
lens5b_imon=2.16512E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.12001E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3999E0
os_ea2_imon=-5.04828E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04555E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-5.31167E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10895E1
os_restr2_imon=3.364E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.2863E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01941E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.08544E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67914E1
iondef4_imon=1.07152E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.22448E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.36886E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-1.01934E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47205E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56555E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=1.89712E-1
window_imon=-1.03736E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86608E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.45491E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.5753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.19535E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30833E0
defgridb_imon=6.05979E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33187E1
os_fil1_imon=9.41447E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07924E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60875E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30558E1
cs_fil1_imon=9.25626E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.17429E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61495E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47353E-2
os_fil2_imon=-2.58188E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02519E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.82341E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.15541E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16024E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21661E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00041E-1
chamber_ion_pmon=1.20278E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.2116E-1
res40_imon=-2.66996E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=199
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.14E2	0.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80018E1	-1.07288E-3	-8.80004E1	2.6226E-4	4.8399E-3	9.34839E-2	2.72715E1	-3.26349E1	-3.26526E1	2.68198E1	1.19913E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01347E-1
2.0E0	8.548E3	1.0E1	3.16E2	1.6E2	-7.31692E-2	-8.8002E1	-1.14441E-3	-8.80003E1	2.14577E-4	4.55379E-3	9.34601E-2	2.73326E1	-3.26517E1	-3.26462E1	2.68088E1	1.19902E-7	2.51632E-3	2.51632E-3	6.34518E-3	2.99941E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.44059E-2	-8.80019E1	-1.0252E-3	-8.80003E1	9.53674E-5	4.45843E-3	9.38654E-2	2.73092E1	-3.26984E1	-3.26231E1	2.67989E1	1.1966E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.0201E-1
4.0E0	1.964E3	4.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80022E1	-1.19209E-3	-8.80003E1	-2.38419E-5	4.72069E-3	9.34362E-2	2.73309E1	-3.26524E1	-3.26074E1	2.68166E1	1.20142E-7	2.52025E-3	2.52025E-3	6.3445E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80019E1	-1.21593E-3	-8.80004E1	0.0E0	4.86374E-3	9.36747E-2	2.73051E1	-3.26756E1	-3.25847E1	2.67555E1	1.19913E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80019E1	-9.29832E-4	-8.80005E1	1.43051E-4	4.62532E-3	9.3317E-2	2.73297E1	-3.265E1	-3.26296E1	2.68118E1	1.19809E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.03185E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80017E1	-1.0252E-3	-8.80007E1	1.66893E-4	4.50611E-3	9.37223E-2	2.73096E1	-3.26769E1	-3.26294E1	2.68166E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80015E1	-1.14441E-3	-8.80006E1	0.0E0	5.24521E-3	9.34362E-2	2.73331E1	-3.26744E1	-3.26127E1	2.68011E1	1.20028E-7	2.51575E-3	2.51575E-3	6.30221E-3	3.00494E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80023E1	-1.0252E-3	-8.80001E1	2.38419E-4	4.8399E-3	9.34601E-2	2.72973E1	-3.26603E1	-3.26482E1	2.68118E1	1.1995E-7	2.50603E-3	2.50603E-3	6.33648E-3	2.98985E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80019E1	-1.14441E-3	-8.80003E1	2.14577E-4	4.86374E-3	9.34124E-2	2.73309E1	-3.26807E1	-3.2632E1	2.67914E1	1.20069E-7	2.52538E-3	2.52538E-3	6.33486E-3	2.9874E-1
1.4E1	2.57E2	1.0E0	5.66E2	3.82E2	-7.33239E-2	-8.80018E1	-1.16825E-3	-8.80003E1	2.38419E-4	4.76837E-3	9.36985E-2	2.73013E1	-3.26508E1	-3.2679E1	2.67786E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80018E1	-1.00136E-3	-8.79999E1	4.76837E-5	4.91142E-3	9.36985E-2	2.72487E1	-3.26253E1	-3.26634E1	2.68131E1	1.19876E-7	2.51432E-3	2.51432E-3	6.3074E-3	3.01714E-1
1.6E1	3.5E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80017E1	-8.82149E-4	-8.80002E1	4.05312E-4	4.74453E-3	9.35078E-2	2.72832E1	-3.26684E1	-3.2626E1	2.68017E1	1.20267E-7	2.51177E-3	2.51177E-3	6.32673E-3	3.00075E-1
1.7E1	5.3E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80017E1	-6.91414E-4	-8.80004E1	-1.43051E-4	4.88758E-3	9.33409E-2	2.73093E1	-3.26242E1	-3.26362E1	2.68124E1	1.19862E-7	2.51588E-3	2.51588E-3	6.30136E-3	3.01176E-1
1.8E1	2.38E2	1.0E0	7.27E2	5.0E2	-7.39421E-2	-8.80019E1	-8.10623E-4	-8.80001E1	-1.43051E-4	4.74453E-3	9.34601E-2	2.73145E1	-3.26484E1	-3.26372E1	2.67998E1	1.19953E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99175E-1
1.9E1	3.29E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80018E1	-7.39098E-4	-8.80003E1	1.19209E-4	4.74453E-3	9.34362E-2	2.72659E1	-3.26866E1	-3.26003E1	2.68028E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02133E-1
2.0E1	2.292E3	1.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80016E1	-1.04904E-3	-8.80003E1	3.33786E-4	4.86374E-3	9.33886E-2	2.7337E1	-3.26514E1	-3.26472E1	2.68196E1	1.19757E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01085E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80015E1	-6.91414E-4	-8.80004E1	-4.76837E-5	4.74453E-3	9.3317E-2	2.73293E1	-3.26537E1	-3.26413E1	2.68041E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00197E-1
2.2E1	1.42E2	0.0E0	8.89E2	6.17E2	-7.17779E-2	-8.80017E1	-7.39098E-4	-8.80004E1	7.15256E-5	4.86374E-3	9.31978E-2	2.73057E1	-3.26567E1	-3.2577E1	2.67914E1	1.20106E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80016E1	-9.77516E-4	-8.80003E1	5.00679E-4	4.8399E-3	9.35555E-2	2.73063E1	-3.26182E1	-3.26266E1	2.67914E1	1.20278E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00041E-1
