[Scan]
initial_time=2016-01-28T18:11:39
final_time=2016-01-28T18:11:59
ip_count=19
run=1026
dataset=3
scan=229
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.80452E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.84912E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.46276E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.53228E-9
ql4_vset=
ql4_vmon=-1.90735E-4
ql4_imon=1.61977E-8
mult1=-1.06933E-8
mult2=-2.73306E-9
rf_tmon=-6.00783E-3
rf_agc=3.25599E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.58627E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=2.53972E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19795E1
lens5a_imon=1.99253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.04994E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.537E1
cs_ef1b_imon=3.10307E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.0234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05082E1
cs_ea1_imon=1.23049E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04835E0
lens1_imon=1.2089E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04121E1
cs_ea2_imon=1.39826E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=2.9982E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.18253E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11033E1
os_restr1_imon=4.29671E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15323E1
os_ea1_imon=2.44203E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.08541E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27569E0
cs_ionrep_imon=9.7141E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91854E2
cs_nozzle_imon=1.93229E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02001E1
cs_anode1_imon=2.03954E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.89605E-8
tplens_vset=1.4E-1
tplens_vmon=1.63789E0
tplens_imon=-3.02427E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26166E1
iondef3_imon=1.48073E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2662E1
iondef2_imon=1.59151E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98307E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.63838E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21847E0
ionrepsh_imon=9.27521E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.15428E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.1283E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.39957E0
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00499E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.19245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05516E0
os_ef2alow_imon=-2.64113E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96223E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.36292E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.10225E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72862E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.19647E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.42815E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09891E0
cs_ionaccel_imon=-1.01213E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47241E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56057E1
einzel_imon=7.6518E-6
window_vset=0.0E0
window_vmon=1.789E-1
window_imon=-8.21124E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86482E1
mask2_imon=-6.19302E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.7108E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93676E3
defgrida_imon=6.3552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.27545E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35831E0
defgridb_imon=6.18885E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33182E1
os_fil1_imon=9.41237E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07732E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61046E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30527E1
cs_fil1_imon=9.26388E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.3683E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6156E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57249E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89906E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.56944E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05212E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21589E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.03286E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.74619E-1
res40_imon=-2.50778E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.21E2	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80022E1	-3.57628E-4	-8.80001E1	4.76837E-5	4.74453E-3	9.36031E-2	2.72892E1	-3.26797E1	-3.26136E1	2.68134E1	1.20311E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00453E-1
2.0E0	8.641E3	8.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80023E1	-7.86781E-4	-8.79999E1	7.15256E-5	4.55379E-3	9.3627E-2	2.73192E1	-3.26933E1	-3.25789E1	2.68169E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00302E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.13915E-2	-8.8002E1	-9.77516E-4	-8.80004E1	1.43051E-4	4.98295E-3	9.3627E-2	2.72974E1	-3.2688E1	-3.26461E1	2.68036E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01871E-1
4.0E0	1.97E3	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80019E1	-8.10623E-4	-8.80002E1	0.0E0	5.10216E-3	9.34839E-2	2.73417E1	-3.2672E1	-3.26225E1	2.68046E1	1.20158E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80018E1	-9.05991E-4	-8.80003E1	1.43051E-4	4.64916E-3	9.35555E-2	2.72892E1	-3.26425E1	-3.26444E1	2.68214E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99941E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.8002E1	-9.53674E-4	-8.80005E1	-2.38419E-5	5.36442E-3	9.37462E-2	2.73075E1	-3.26897E1	-3.26218E1	2.6813E1	1.20084E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99613E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80021E1	-1.21593E-3	-8.80002E1	2.38419E-5	5.03063E-3	9.34601E-2	2.72266E1	-3.26767E1	-3.26354E1	2.68112E1	1.20017E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80021E1	-1.09673E-3	-8.80005E1	4.05312E-4	4.98295E-3	9.34362E-2	2.73177E1	-3.26464E1	-3.26603E1	2.68052E1	1.20122E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01085E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.41738E-2	-8.80021E1	-6.19888E-4	-8.80003E1	3.8147E-4	4.81606E-3	9.38177E-2	2.72979E1	-3.26543E1	-3.26398E1	2.68244E1	1.19913E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.00041E-1
1.3E1	4.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80019E1	-9.53674E-4	-8.80005E1	2.6226E-4	4.8399E-3	9.36985E-2	2.73134E1	-3.26472E1	-3.2626E1	2.68123E1	1.20158E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.9841E-1
1.4E1	2.92E2	0.0E0	5.66E2	3.82E2	-7.37874E-2	-8.8002E1	-1.09673E-3	-8.80005E1	-4.76837E-5	4.76837E-3	9.37223E-2	2.72469E1	-3.26089E1	-3.26554E1	2.67926E1	1.19991E-7	2.51498E-3	2.51498E-3	6.29098E-3	3.00041E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80022E1	-8.82149E-4	-8.80005E1	0.0E0	4.69685E-3	9.37462E-2	2.72939E1	-3.26213E1	-3.26667E1	2.68059E1					
1.6E1	2.3E1	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80021E1	-6.4373E-4	-8.80007E1	7.15256E-5	4.76837E-3	9.34601E-2	2.72775E1	-3.26831E1	-3.2626E1	2.68004E1	1.19595E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02511E-1
1.7E1	4.8E1	1.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80021E1	-7.39098E-4	-8.80003E1	2.14577E-4	4.76837E-3	9.3627E-2	2.73225E1	-3.26579E1	-3.25791E1	2.6795E1	1.20383E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02659E-1
1.8E1	2.15E2	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80018E1	-8.82149E-4	-8.80004E1	4.76837E-5	4.91142E-3	9.35793E-2	2.73004E1	-3.26826E1	-3.25959E1	2.68304E1	1.19783E-7	2.51607E-3	2.51607E-3	6.3074E-3	3.0174E-1
1.9E1	3.39E2	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.8002E1	-9.05991E-4	-8.80006E1	9.53674E-5	4.98295E-3	9.3627E-2	2.72913E1	-3.2653E1	-3.26561E1	2.68034E1					
2.0E1	2.194E3	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.8002E1	-1.00136E-3	-8.80003E1	2.38419E-5	5.00679E-3	9.36747E-2	2.72709E1	-3.26897E1	-3.26254E1	2.6789E1	1.19953E-7	2.52492E-3	2.52492E-3	6.30202E-3	3.03286E-1
2.1E1	1.6E1	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80021E1	-7.62939E-4	-8.80005E1	-4.76837E-5	4.72069E-3	9.32693E-2	2.73098E1	-3.26496E1	-3.26526E1	2.67984E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02659E-1
2.2E1	1.67E2	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80021E1	-7.39098E-4	-8.80006E1	-9.53674E-5	4.81606E-3	9.34839E-2	2.73086E1	-3.26661E1	-3.2629E1	2.68302E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.04842E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80022E1	-7.86781E-4	-8.8E1	-1.90735E-4	4.55379E-3	9.37462E-2	2.72862E1	-3.2662E1	-3.26166E1	2.6807E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.03286E-1
