[Scan]
initial_time=2016-01-28T18:12:33
final_time=2016-01-28T18:12:53
ip_count=19
run=1026
dataset=3
scan=231
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.74416E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-6.302E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.45396E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-1.51658E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.62021E-8
mult1=-9.28285E-9
mult2=-2.77251E-9
rf_tmon=-5.18535E-3
rf_agc=3.29731E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.3401E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63309E0
bslens_imon=2.73963E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20085E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12442E2
lens4a_imon=2.05176E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5376E1
cs_ef1b_imon=3.09046E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02074E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05042E1
cs_ea1_imon=1.25703E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08402E0
lens1_imon=1.41661E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64566E1
os_ef1alow_imon=2.97838E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04141E1
cs_ea2_imon=1.39943E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84472E1
cs_ef1a_imon=3.00072E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.18784E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11009E1
os_restr1_imon=4.30536E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15041E1
os_ea1_imon=2.43405E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.07893E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=9.68277E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.9324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01833E1
cs_anode1_imon=2.03918E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.8947E-8
tplens_vset=1.4E-1
tplens_vmon=1.67508E0
tplens_imon=-4.111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26104E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26813E1
iondef2_imon=1.57499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.84461E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=9.28622E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33465E1
lens5b_imon=2.20081E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74724E1
cs_ef2b_imon=3.12722E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38128E0
os_ea2_imon=-6.59841E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.0045E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.17659E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05816E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78803E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10637E1
os_restr2_imon=3.36364E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23048E2
cs_ionfoca_imon=6.2946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.10333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.10382E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.10972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.23446E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.43374E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.33649E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.61936E-6
window_vset=0.0E0
window_vmon=1.80702E-1
window_imon=-1.00853E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.45851E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.56809E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.14849E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4166E0
defgridb_imon=6.11387E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.38155E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07059E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60807E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30599E1
cs_fil1_imon=9.23914E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33347E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6149E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57671E-2
os_fil2_imon=-2.57587E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.84661E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35219E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21656E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.78223E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=211
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.12E2	1.0E0	1.47E2	4.1E1	-7.23189E-2	-8.80018E1	-1.0252E-3	-8.80003E1	2.86102E-4	4.95911E-3	9.37939E-2	2.73243E1	-3.26182E1	-3.26266E1	2.68028E1	1.20174E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.03449E-1
2.0E0	8.706E3	2.0E1	3.16E2	1.6E2	-7.23189E-2	-8.80016E1	-7.39098E-4	-8.80006E1	-2.38419E-5	5.55515E-3	9.39608E-2	2.72985E1	-3.26386E1	-3.26675E1	2.68034E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01609E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.27053E-2	-8.80017E1	-7.15256E-4	-8.80005E1	3.33786E-4	4.81606E-3	9.37939E-2	2.72431E1	-3.26417E1	-3.26052E1	2.68146E1	1.19913E-7	2.52867E-3	2.52867E-3	6.3074E-3	3.01085E-1
4.0E0	2.034E3	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80016E1	-3.8147E-4	-8.80005E1	3.33786E-4	5.05447E-3	9.37462E-2	2.72941E1	-3.26523E1	-3.26334E1	2.683E1	1.1969E-7	2.51709E-3	2.51709E-3	6.29684E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80017E1	-5.00679E-4	-8.80004E1	7.15256E-5	4.98295E-3	9.36747E-2	2.72781E1	-3.26206E1	-3.26344E1	2.6807E1	1.20103E-7	2.51787E-3	2.51787E-3	6.3074E-3	3.00487E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80016E1	-8.34465E-4	-8.80006E1	7.15256E-5	5.10216E-3	9.35555E-2	2.72847E1	-3.26675E1	-3.25924E1	2.6816E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80018E1	-5.24521E-4	-8.80002E1	0.0E0	4.98295E-3	9.38654E-2	2.7285E1	-3.26762E1	-3.26714E1	2.67868E1	1.20226E-7	2.52757E-3	2.52757E-3	6.29098E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80017E1	-7.39098E-4	-8.80004E1	7.15256E-5	5.07832E-3	9.36985E-2	2.72744E1	-3.2639E1	-3.2626E1	2.681E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33436E-3	3.02511E-1
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80018E1	-9.77516E-4	-8.80003E1	-1.19209E-4	4.95911E-3	9.36508E-2	2.73192E1	-3.26523E1	-3.25874E1	2.67926E1	1.19757E-7	2.51334E-3	2.51334E-3	6.29098E-3	3.01347E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.80019E1	-7.62939E-4	-8.80005E1	2.38419E-5	5.10216E-3	9.36508E-2	2.72791E1	-3.26661E1	-3.26372E1	2.68214E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
1.4E1	2.76E2	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80021E1	-8.10623E-4	-8.80002E1	-2.38419E-5	4.64916E-3	9.35078E-2	2.73167E1	-3.26897E1	-3.26223E1	2.67758E1	1.198E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.01995E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.17007E-2	-8.80019E1	-1.09673E-3	-8.80006E1	-3.09944E-4	4.74453E-3	9.33886E-2	2.72892E1	-3.26042E1	-3.26001E1	2.67839E1	1.19872E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.01475E-1
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.16233E-2	-8.80019E1	-8.10623E-4	-8.80007E1	2.38419E-4	4.62532E-3	9.36747E-2	2.73375E1	-3.26868E1	-3.26585E1	2.68292E1	1.19953E-7	2.51525E-3	2.51525E-3	6.2752E-3	2.9892E-1
1.7E1	4.6E1	0.0E0	6.87E2	4.7E2	-7.08504E-2	-8.80018E1	-6.19888E-4	-8.80004E1	4.76837E-5	4.93526E-3	9.33886E-2	2.72811E1	-3.26344E1	-3.26543E1	2.68322E1	1.20055E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00197E-1
1.8E1	2.01E2	0.0E0	7.27E2	5.0E2	-7.07733E-2	-8.80018E1	-7.86781E-4	-8.80006E1	-2.14577E-4	4.76837E-3	9.36985E-2	2.72817E1	-3.26524E1	-3.26687E1	2.6801E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9926E-1
1.9E1	3.45E2	0.0E0	7.68E2	5.29E2	-7.09279E-2	-8.80022E1	-7.39098E-4	-8.80006E1	-2.38419E-5	4.8399E-3	9.33647E-2	2.72835E1	-3.26831E1	-3.26188E1	2.68178E1	1.20226E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00563E-1
2.0E1	2.185E3	0.0E0	8.08E2	5.58E2	-7.09279E-2	-8.80023E1	-6.4373E-4	-8.80006E1	2.38419E-5	5.29289E-3	9.34601E-2	2.73081E1	-3.26837E1	-3.26008E1	2.6825E1	1.20122E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.00563E-1
2.1E1	7.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.8002E1	-4.05312E-4	-8.80006E1	4.76837E-5	5.22137E-3	9.38416E-2	2.73334E1	-3.2662E1	-3.26425E1	2.68088E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02396E-1
2.2E1	1.47E2	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.8002E1	-4.76837E-4	-8.80006E1	0.0E0	5.07832E-3	9.36031E-2	2.72644E1	-3.26703E1	-3.26679E1	2.67763E1	1.19749E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80021E1	-3.57628E-4	-8.80008E1	2.86102E-4	4.86374E-3	9.35078E-2	2.73045E1	-3.26813E1	-3.26104E1	2.6807E1	1.19953E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.01738E-1
