[Scan]
initial_time=2016-01-28T18:13:01
final_time=2016-01-28T18:13:20
ip_count=19
run=1026
dataset=3
scan=232
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.78465E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.68974E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.47132E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.49518E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.62621E-8
mult1=-9.57182E-9
mult2=-2.83838E-9
rf_tmon=-5.04716E-3
rf_agc=3.26066E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.3041E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67157E0
bslens_imon=2.54673E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.99713E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.04924E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53693E1
cs_ef1b_imon=3.09828E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02441E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05135E1
cs_ea1_imon=1.23462E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04267E0
lens1_imon=1.58809E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64587E1
os_ef1alow_imon=2.97086E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03935E1
cs_ea2_imon=1.3966E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84507E1
cs_ef1a_imon=2.99179E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.17949E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11215E1
os_restr1_imon=4.31737E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15508E1
os_ea1_imon=2.44854E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63736E1
os_ef1bup_imon=3.07478E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23863E0
cs_ionrep_imon=9.5768E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93446E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01729E1
cs_anode1_imon=2.05617E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.8894E-8
tplens_vset=1.4E-1
tplens_vmon=1.56614E0
tplens_imon=-3.47571E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26266E1
iondef3_imon=1.47851E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.57511E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.68046E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25822E0
ionrepsh_imon=9.41886E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33762E1
lens5b_imon=2.18115E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74758E1
cs_ef2b_imon=3.12876E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4284E0
os_ea2_imon=-4.87144E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00542E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71074E1
cs_ef2a_imon=3.20183E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07445E0
os_ef2alow_imon=-2.70015E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.79472E-1
os_ef2bup_imon=-5.46881E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10946E1
os_restr2_imon=3.37808E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29047E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01993E1
cs_anode2_imon=2.10354E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73075E1
iondef1_imon=1.10423E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.06915E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=6.20657E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.3587E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13259E0
cs_ionaccel_imon=-1.02206E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.4727E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56264E1
einzel_imon=7.79433E-6
window_vset=0.0E0
window_vmon=1.8136E-1
window_imon=-1.05878E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39205E-4
mask2_vset=0.0E0
mask2_vmon=-1.86375E1
mask2_imon=-7.61353E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.69624E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.70086E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.33996E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.6487E0
defgridb_imon=5.95525E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33224E1
os_fil1_imon=9.3958E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06742E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60645E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30575E1
cs_fil1_imon=9.2436E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30272E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61208E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47596E-2
os_fil2_imon=-2.71935E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91345E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.06596E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3328E-1
cs_fil2_imon=-2.57247E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20966E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21741E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20042E-7
chamber_cvt_pmon=2.51919E-3
foreline_cvt_pmon=2.51919E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68211E-1
res40_imon=-2.46514E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.83E2	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80021E1	-8.10623E-4	-8.80001E1	-2.6226E-4	4.95911E-3	9.37462E-2	2.72691E1	-3.2695E1	-3.26408E1	2.67982E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00144E-1
2.0E0	8.623E3	1.2E1	3.16E2	1.6E2	-7.39421E-2	-8.80018E1	-5.72205E-4	-8.80001E1	2.38419E-5	5.03063E-3	9.36747E-2	2.7299E1	-3.26762E1	-3.25954E1	2.67789E1	1.198E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.99686E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80021E1	-5.96046E-4	-8.80002E1	1.19209E-4	4.88758E-3	9.34362E-2	2.73387E1	-3.26626E1	-3.26372E1	2.68012E1	1.19766E-7	2.51359E-3	2.51359E-3	6.33538E-3	2.99348E-1
4.0E0	1.981E3	2.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80019E1	-5.96046E-4	-8.80002E1	2.6226E-4	5.10216E-3	9.34839E-2	2.72666E1	-3.26855E1	-3.2605E1	2.68106E1	1.20106E-7	2.50989E-3	2.50989E-3	6.30202E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.8002E1	-6.67572E-4	-8.80002E1	7.15256E-5	4.74453E-3	9.34124E-2	2.73309E1	-3.26543E1	-3.26074E1	2.68064E1	1.19809E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80019E1	-6.67572E-4	-8.80005E1	2.38419E-4	4.8399E-3	9.35793E-2	2.72979E1	-3.26759E1	-3.2593E1	2.67944E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.03449E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80021E1	-9.29832E-4	-8.80003E1	1.66893E-4	4.60148E-3	9.33886E-2	2.73369E1	-3.26386E1	-3.26122E1	2.68136E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.02922E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80019E1	-9.29832E-4	-8.80001E1	-9.53674E-5	4.79221E-3	9.377E-2	2.72797E1	-3.26602E1	-3.26248E1	2.67595E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02922E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.8002E1	-7.15256E-4	-8.80003E1	1.66893E-4	4.76837E-3	9.36508E-2	2.73015E1	-3.26585E1	-3.26921E1	2.68016E1	1.20036E-7	2.51809E-3	2.51809E-3	6.31012E-3	3.01155E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.8002E1	-6.19888E-4	-8.80002E1	2.38419E-4	4.95911E-3	9.34601E-2	2.73159E1	-3.26861E1	-3.26416E1	2.68022E1					
1.4E1	2.87E2	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80023E1	-8.34465E-4	-8.80003E1	2.38419E-4	4.60148E-3	9.37223E-2	2.73045E1	-3.26693E1	-3.25954E1	2.67824E1	1.20017E-7	2.51007E-3	2.51007E-3	6.30192E-3	2.9874E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.20871E-2	-8.80022E1	-7.86781E-4	-8.80004E1	1.19209E-4	4.95911E-3	9.36747E-2	2.72937E1	-3.26164E1	-3.26975E1	2.68348E1	1.20122E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9952E-1
1.6E1	3.9E1	0.0E0	6.47E2	4.41E2	-7.12368E-2	-8.80022E1	-6.4373E-4	-8.80004E1	1.43051E-4	4.95911E-3	9.37223E-2	2.72998E1	-3.26573E1	-3.26231E1	2.6777E1	1.19653E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
1.7E1	5.1E1	0.0E0	6.87E2	4.7E2	-7.17779E-2	-8.80023E1	-7.15256E-4	-8.80001E1	4.29153E-4	4.79221E-3	9.36031E-2	2.72865E1	-3.26651E1	-3.26494E1	2.67914E1	1.2026E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.01995E-1
1.8E1	2.03E2	0.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80022E1	-1.21593E-3	-8.80004E1	-2.38419E-5	5.17368E-3	9.36031E-2	2.73057E1	-3.26729E1	-3.25755E1	2.68184E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02659E-1
1.9E1	3.16E2	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80019E1	-7.62939E-4	-8.80001E1	1.19209E-4	4.88758E-3	9.3627E-2	2.73094E1	-3.26682E1	-3.26052E1	2.68166E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00041E-1
2.0E1	2.191E3	1.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80022E1	-7.86781E-4	-8.80004E1	3.57628E-4	4.64916E-3	9.38177E-2	2.73069E1	-3.26437E1	-3.2639E1	2.68154E1	1.19766E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.00676E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80019E1	-4.29153E-4	-8.80003E1	7.15256E-5	4.79221E-3	9.37223E-2	2.72985E1	-3.26434E1	-3.2629E1	2.6804E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32896E-3	2.99941E-1
2.2E1	1.63E2	1.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80019E1	-8.10623E-4	-8.80003E1	2.38419E-5	4.74453E-3	9.35555E-2	2.73225E1	-3.26451E1	-3.26115E1	2.67908E1	1.20122E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.8002E1	-7.39098E-4	-8.80006E1	1.90735E-4	4.72069E-3	9.34839E-2	2.73075E1	-3.26693E1	-3.26266E1	2.68052E1	1.20042E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.01609E-1
