[Scan]
initial_time=2016-01-28T18:14:22
final_time=2016-01-28T18:14:41
ip_count=19
run=1026
dataset=3
scan=235
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.77712E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.49138E-10
ql2_vset=
ql2_vmon=-8.34465E-4
ql2_imon=1.45565E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-1.50027E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.62366E-8
mult1=-1.00414E-8
mult2=-2.8264E-9
rf_tmon=-3.29876E-3
rf_agc=3.48777E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.78725E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64691E0
bslens_imon=2.68195E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20085E1
lens5a_imon=1.97838E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05078E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=3.09406E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02067E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05114E1
cs_ea1_imon=1.25667E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06539E0
lens1_imon=1.47069E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64434E1
os_ef1alow_imon=2.98378E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03738E1
cs_ea2_imon=1.41998E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84304E1
cs_ef1a_imon=2.99567E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.19116E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11382E1
os_restr1_imon=4.3104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14963E1
os_ea1_imon=2.4272E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63743E1
os_ef1bup_imon=3.08325E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22506E0
cs_ionrep_imon=9.6323E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93334E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=2.04999E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.89852E-8
tplens_vset=1.4E-1
tplens_vmon=1.66426E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26729E1
iondef3_imon=1.4964E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.57066E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02895E2
lens6_imon=2.98454E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=8.64768E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34102E0
ionrepsh_imon=9.57462E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33826E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7491E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45097E0
os_ea2_imon=-6.16582E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71138E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04255E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95021E-1
os_ef2bup_imon=-5.44862E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.36472E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.33065E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01839E1
cs_anode2_imon=2.10153E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72991E1
iondef1_imon=1.08796E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68052E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.25969E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.4129E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12534E0
cs_ionaccel_imon=-1.23558E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02111E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56105E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=2.28755E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86476E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.35397E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.58611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.10162E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43164E0
defgridb_imon=6.36621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33201E1
os_fil1_imon=9.38618E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07401E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60997E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30609E1
cs_fil1_imon=9.24244E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31184E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61802E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.7783E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.61191E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32242E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21594E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40017E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.71E2	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80019E1	-1.23978E-3	-8.80003E1	0.0E0	5.126E-3	9.35078E-2	2.73092E1	-3.26779E1	-3.26726E1	2.67962E1	1.19697E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00197E-1
2.0E0	8.717E3	1.0E1	3.16E2	1.6E2	-7.25507E-2	-8.80017E1	-1.09673E-3	-8.80003E1	2.6226E-4	4.95911E-3	9.35793E-2	2.72984E1	-3.26793E1	-3.26248E1	2.67854E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80019E1	-8.34465E-4	-8.80004E1	4.76837E-5	4.88758E-3	9.3627E-2	2.7282E1	-3.2686E1	-3.26013E1	2.68054E1	1.20069E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.00302E-1
4.0E0	2.055E3	1.0E0	6.55E2	3.98E2	-7.25507E-2	-8.8002E1	-1.21593E-3	-8.79999E1	-4.76837E-5	4.81606E-3	9.39369E-2	2.72975E1	-3.26597E1	-3.26763E1	2.68213E1	1.20113E-7	2.52058E-3	2.52058E-3	6.32784E-3	2.98454E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80019E1	-9.77516E-4	-8.80003E1	-1.43051E-4	4.98295E-3	9.34124E-2	2.73015E1	-3.27077E1	-3.25623E1	2.68172E1	1.19991E-7	2.52179E-3	2.52179E-3	6.33021E-3	2.9971E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.26282E-2	-8.80021E1	-9.53674E-4	-8.80002E1	-2.38419E-5	4.64916E-3	9.37462E-2	2.7304E1	-3.26484E1	-3.26747E1	2.68192E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80018E1	-8.34465E-4	-8.80004E1	-7.15256E-5	4.43459E-3	9.38654E-2	2.7267E1	-3.2621E1	-3.2646E1	2.67701E1	1.20078E-7	2.51679E-3	2.51679E-3	6.3126E-3	3.00989E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80017E1	-1.04904E-3	-8.80004E1	2.14577E-4	4.45843E-3	9.36747E-2	2.73003E1	-3.26681E1	-3.26705E1	2.67978E1	1.20262E-7	2.51271E-3	2.51271E-3	6.30171E-3	3.01337E-1
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.8002E1	-1.0252E-3	-8.80003E1	2.38419E-5	4.74453E-3	9.33886E-2	2.73135E1	-3.26362E1	-3.25353E1	2.67998E1	1.20106E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.98665E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.29374E-2	-8.80023E1	-1.09673E-3	-8.80002E1	4.76837E-5	4.95911E-3	9.35078E-2	2.72751E1	-3.26741E1	-3.26242E1	2.68064E1	1.19913E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9874E-1
1.4E1	2.97E2	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80025E1	-1.07288E-3	-8.8E1	4.52995E-4	4.31538E-3	9.377E-2	2.73375E1	-3.26638E1	-3.26467E1	2.68148E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.98222E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80023E1	-9.53674E-4	-8.79998E1	4.05312E-4	4.57764E-3	9.34124E-2	2.73222E1	-3.26585E1	-3.26378E1	2.67944E1	1.20017E-7	2.52099E-3	2.52099E-3	6.29098E-3	2.9978E-1
1.6E1	2.3E1	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80023E1	-7.15256E-4	-8.80006E1	3.33786E-4	4.36306E-3	9.37939E-2	2.73081E1	-3.26663E1	-3.2611E1	2.68154E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.04063E-1
1.7E1	4.9E1	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.8002E1	-8.82149E-4	-8.80005E1	1.66893E-4	4.79221E-3	9.35555E-2	2.73093E1	-3.26879E1	-3.26074E1	2.67897E1	1.20226E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.02396E-1
1.8E1	1.66E2	0.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80022E1	-1.04904E-3	-8.80004E1	3.57628E-4	4.79221E-3	9.35793E-2	2.73098E1	-3.26661E1	-3.26124E1	2.67848E1	1.20158E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0148E-1
1.9E1	3.22E2	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.8002E1	-9.29832E-4	-8.80001E1	3.09944E-4	4.55379E-3	9.35555E-2	2.73246E1	-3.26714E1	-3.26006E1	2.67896E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
2.0E1	2.152E3	2.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80022E1	-1.00136E-3	-8.80002E1	7.15256E-5	4.45843E-3	9.34601E-2	2.73081E1	-3.26476E1	-3.27209E1	2.68082E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80023E1	-1.26362E-3	-8.80002E1	-9.53674E-5	4.88758E-3	9.34601E-2	2.73163E1	-3.26756E1	-3.25983E1	2.68007E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01609E-1
2.2E1	1.4E2	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80023E1	-1.00136E-3	-8.80004E1	4.76837E-5	4.74453E-3	9.32455E-2	2.73287E1	-3.26555E1	-3.26354E1	2.67836E1	1.2026E-7	2.51632E-3	2.51632E-3	6.28592E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.80022E1	-8.34465E-4	-8.80002E1	-4.76837E-5	4.8399E-3	9.33647E-2	2.72991E1	-3.26458E1	-3.26729E1	2.68052E1	1.19851E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.0071E-1
