[Scan]
initial_time=2016-01-28T18:14:49
final_time=2016-01-28T18:15:09
ip_count=19
run=1026
dataset=3
scan=236
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.11597E-2
qbias_imon=-3.80852E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.79596E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.43133E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.50286E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.62169E-8
mult1=-8.88551E-9
mult2=-2.66671E-9
rf_tmon=-5.72609E-3
rf_agc=3.24323E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.69153E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64553E0
bslens_imon=2.50467E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1923E1
lens5a_imon=1.98759E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.04967E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53755E1
cs_ef1b_imon=3.10116E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02152E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04765E1
cs_ea1_imon=1.21617E-5
lens1_vset=-2.7E0
lens1_vmon=-3.055E0
lens1_imon=1.64203E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6444E1
os_ef1alow_imon=2.98215E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04066E1
cs_ea2_imon=1.40473E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84538E1
cs_ef1a_imon=3.00161E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.18508E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11329E1
os_restr1_imon=4.31338E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.45326E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63791E1
os_ef1bup_imon=3.07085E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22856E0
cs_ionrep_imon=9.65393E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0179E1
cs_anode1_imon=2.06596E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.8994E-8
tplens_vset=1.4E-1
tplens_vmon=1.66243E0
tplens_imon=-3.08464E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26398E1
iondef3_imon=1.47573E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.58528E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02879E2
lens6_imon=2.98239E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=8.5485E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.37361E0
ionrepsh_imon=9.49743E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33404E1
lens5b_imon=2.17309E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.11201E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46076E0
os_ea2_imon=-8.27578E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06059E2
lens4b_imon=2.00459E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71357E1
cs_ef2a_imon=3.20333E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06516E0
os_ef2alow_imon=-2.72028E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87028E-1
os_ef2bup_imon=-5.24277E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11005E1
os_restr2_imon=3.37998E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23024E2
cs_ionfoca_imon=6.29012E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.10414E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72889E1
iondef1_imon=1.08754E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.07568E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.21225E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.4321E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16382E0
cs_ionaccel_imon=-1.11097E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56436E1
einzel_imon=7.70281E-6
window_vset=0.0E0
window_vmon=2.31943E-1
window_imon=-1.12219E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8267E2
mask1_imon=2.39148E-4
mask2_vset=0.0E0
mask2_vmon=-1.86369E1
mask2_imon=-6.76827E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.46678E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.28733E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.00874E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48737E0
defgridb_imon=6.2148E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33202E1
os_fil1_imon=9.41173E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06687E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61034E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30624E1
cs_fil1_imon=9.2473E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.25395E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.617E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4538E-2
os_fil2_imon=-2.5128E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90345E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.70066E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32072E-1
cs_fil2_imon=-2.6126E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.77869E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21603E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=2.98156E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40041E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.86206E-1
res40_imon=-2.54812E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.61E2	0.0E0	1.47E2	4.1E1	-7.201E-2	-8.80021E1	-1.3113E-3	-8.80001E1	1.66893E-4	4.673E-3	9.37939E-2	2.72886E1	-3.26838E1	-3.25794E1	2.6837E1	1.19667E-7	2.51952E-3	2.51952E-3	6.3074E-3	3.02426E-1
2.0E0	8.755E3	1.4E1	3.16E2	1.6E2	-7.15461E-2	-8.8002E1	-8.10623E-4	-8.80003E1	2.6226E-4	4.64916E-3	9.40084E-2	2.73186E1	-3.26848E1	-3.26021E1	2.68045E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01085E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.8002E1	-8.82149E-4	-8.80003E1	2.6226E-4	4.72069E-3	9.38892E-2	2.72844E1	-3.26473E1	-3.2645E1	2.67991E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
4.0E0	2.025E3	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80018E1	-5.00679E-4	-8.80005E1	1.43051E-4	4.48227E-3	9.35078E-2	2.7355E1	-3.26229E1	-3.26266E1	2.68244E1	1.19831E-7	2.51472E-3	2.51472E-3	6.34385E-3	3.00494E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80018E1	-6.19888E-4	-8.80002E1	1.19209E-4	4.60148E-3	9.35555E-2	2.73249E1	-3.26314E1	-3.26524E1	2.68196E1	1.201E-7	2.51498E-3	2.51498E-3	6.3245E-3	3.00251E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80016E1	-7.62939E-4	-8.80004E1	9.53674E-5	4.50611E-3	9.3627E-2	2.73109E1	-3.26695E1	-3.26017E1	2.68111E1	1.19965E-7	2.51007E-3	2.51007E-3	6.32936E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80019E1	-9.53674E-4	-8.80004E1	9.53674E-5	4.8399E-3	9.36031E-2	2.72727E1	-3.26337E1	-3.26596E1	2.68012E1	1.20293E-7	2.51498E-3	2.51498E-3	6.31798E-3	2.98342E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80017E1	-7.86781E-4	-8.80005E1	5.24521E-4	4.69685E-3	9.36031E-2	2.73231E1	-3.26711E1	-3.26849E1	2.68106E1	1.20363E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80019E1	-5.96046E-4	-8.80005E1	-4.76837E-5	4.72069E-3	9.37462E-2	2.73141E1	-3.26302E1	-3.2614E1	2.68046E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00041E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.17007E-2	-8.80019E1	-1.04904E-3	-8.80006E1	2.14577E-4	4.86374E-3	9.39131E-2	2.72763E1	-3.26585E1	-3.26543E1	2.68028E1	1.19653E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.00824E-1
1.4E1	2.6E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.8002E1	-6.67572E-4	-8.80002E1	-2.6226E-4	4.673E-3	9.37462E-2	2.73045E1	-3.26531E1	-3.26154E1	2.68106E1	1.20517E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99941E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80022E1	-4.52995E-4	-8.80004E1	1.90735E-4	4.81606E-3	9.34839E-2	2.72775E1	-3.26627E1	-3.2635E1	2.67926E1	1.19965E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00302E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.16233E-2	-8.8002E1	-6.4373E-4	-8.80003E1	2.14577E-4	5.14984E-3	9.39846E-2	2.73431E1	-3.26609E1	-3.2664E1	2.6801E1	1.19953E-7	2.51739E-3	2.51739E-3	6.36144E-3	3.02511E-1
1.7E1	4.1E1	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80019E1	-8.34465E-4	-8.80004E1	1.19209E-4	4.673E-3	9.35793E-2	2.72781E1	-3.26633E1	-3.26615E1	2.68226E1	1.19775E-7	2.51725E-3	2.51725E-3	6.3245E-3	2.9971E-1
1.8E1	1.99E2	0.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80021E1	-1.09673E-3	-8.80004E1	1.90735E-4	5.126E-3	9.3317E-2	2.73204E1	-3.26673E1	-3.26437E1	2.68358E1	1.20069E-7	2.52538E-3	2.52538E-3	6.34037E-3	2.9926E-1
1.9E1	3.33E2	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.80021E1	-6.19888E-4	-8.80002E1	2.6226E-4	4.91142E-3	9.34124E-2	2.73159E1	-3.26897E1	-3.25918E1	2.67932E1	1.20088E-7	2.51809E-3	2.51809E-3	6.31555E-3	2.99346E-1
2.0E1	2.251E3	1.0E0	8.08E2	5.58E2	-7.201E-2	-8.80023E1	-1.04904E-3	-8.80001E1	3.09944E-4	4.74453E-3	9.36508E-2	2.73243E1	-3.26464E1	-3.25954E1	2.68259E1					
2.1E1	8.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.8002E1	-8.34465E-4	-8.80005E1	2.14577E-4	4.52995E-3	9.377E-2	2.73004E1	-3.26278E1	-3.26472E1	2.6787E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00966E-1
2.2E1	1.56E2	0.0E0	8.89E2	6.17E2	-7.201E-2	-8.8002E1	-6.67572E-4	-8.80003E1	4.76837E-5	4.43459E-3	9.36508E-2	2.72979E1	-3.26603E1	-3.26398E1	2.67962E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01871E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.11597E-2	-8.8002E1	-6.67572E-4	-8.8E1	3.09944E-4	4.76837E-3	9.38892E-2	2.72889E1	-3.26482E1	-3.26398E1	2.68022E1	1.20055E-7	2.51203E-3	2.51203E-3	6.29128E-3	2.98156E-1
