[Scan]
initial_time=2016-01-28T18:15:48
final_time=2016-01-28T18:16:10
ip_count=19
run=1026
dataset=3
scan=238
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.79868E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-5.64909E-10
ql2_vset=
ql2_vmon=-1.35899E-3
ql2_imon=1.46004E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.49379E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=1.62158E-8
mult1=-1.14863E-8
mult2=-2.7266E-9
rf_tmon=-5.16732E-3
rf_agc=3.23963E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=5.58054E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67395E0
bslens_imon=2.49449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.9874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05219E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53965E1
cs_ef1b_imon=3.09731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02034E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.23252E-5
lens1_vset=-2.7E0
lens1_vmon=-3.072E0
lens1_imon=1.58244E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.98775E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0366E1
cs_ea2_imon=1.42286E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.01117E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.18597E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=4.30572E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.41639E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=9.68998E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.0381E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.9016E-8
tplens_vset=1.4E-1
tplens_vmon=1.68349E0
tplens_imon=-1.94802E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26134E1
iondef3_imon=1.48523E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.59121E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=8.6832E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32179E0
ionrepsh_imon=9.36553E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33598E1
lens5b_imon=2.19721E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74916E1
cs_ef2b_imon=3.11785E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44677E0
os_ea2_imon=-7.17521E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00515E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.20507E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05336E0
os_ef2alow_imon=-2.62311E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.04632E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11232E1
os_restr2_imon=3.37157E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.29568E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.10766E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.08976E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6828E1
iondef4_imon=1.07368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.19942E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.40941E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14516E0
cs_ionaccel_imon=-1.20314E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56429E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.18544E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39383E-4
mask2_vset=0.0E0
mask2_vmon=-1.86224E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.36478E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.97905E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=6.99347E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.07782E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33223E1
os_fil1_imon=9.38834E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07179E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61003E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30609E1
cs_fil1_imon=9.24442E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31304E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61196E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.53802E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97714E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.8595E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54467E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21589E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.70705E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.14E2	0.0E0	1.47E2	4.1E1	-7.17779E-2	-8.80022E1	-6.67572E-4	-8.80003E1	4.52995E-4	4.69685E-3	9.34124E-2	2.73189E1	-3.26344E1	-3.26236E1	2.68232E1	1.20069E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9952E-1
2.0E0	8.645E3	6.0E0	3.16E2	1.6E2	-7.18554E-2	-8.80022E1	-7.15256E-4	-8.80003E1	2.38419E-4	4.64916E-3	9.37462E-2	2.72793E1	-3.26699E1	-3.25984E1	2.67884E1	1.19953E-7	2.51954E-3	2.51954E-3	6.33977E-3	2.97901E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.14689E-2	-8.80024E1	-1.19209E-3	-8.80003E1	2.38419E-5	5.05447E-3	9.33647E-2	2.73057E1	-3.26673E1	-3.26496E1	2.68088E1	1.19925E-7	2.5225E-3	2.5225E-3	6.33538E-3	2.9829E-1
4.0E0	1.994E3	1.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80022E1	-9.29832E-4	-8.80004E1	4.29153E-4	4.93526E-3	9.32217E-2	2.72745E1	-3.26615E1	-3.26933E1	2.6819E1	1.19941E-7	2.51709E-3	2.51709E-3	6.29157E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.10825E-2	-8.80021E1	-6.4373E-4	-8.8E1	4.05312E-4	4.76837E-3	9.35078E-2	2.73009E1	-3.26543E1	-3.25791E1	2.67914E1	1.19913E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80021E1	-8.58307E-4	-8.80003E1	3.8147E-4	4.55379E-3	9.35555E-2	2.72874E1	-3.26561E1	-3.26673E1	2.68154E1	1.19913E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02133E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17007E-2	-8.80018E1	-7.86781E-4	-8.80005E1	1.19209E-4	4.79221E-3	9.34601E-2	2.73137E1	-3.26364E1	-3.26278E1	2.68124E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80019E1	-9.05991E-4	-8.80003E1	-4.76837E-5	5.00679E-3	9.37939E-2	2.72968E1	-3.2649E1	-3.26284E1	2.68148E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.18554E-2	-8.80018E1	-1.38283E-3	-8.80001E1	9.53674E-5	4.72069E-3	9.37223E-2	2.73213E1	-3.26404E1	-3.26392E1	2.681E1	1.20069E-7	2.51007E-3	2.51007E-3	6.34037E-3	3.03449E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.8002E1	-8.10623E-4	-8.8E1	1.19209E-4	5.03063E-3	9.37223E-2	2.73417E1	-3.26416E1	-3.2617E1	2.68196E1	1.19809E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.99E-1
1.4E1	2.87E2	0.0E0	5.66E2	3.82E2	-7.23189E-2	-8.80019E1	-7.62939E-4	-8.80003E1	-4.76837E-5	4.673E-3	9.38654E-2	2.72558E1	-3.2653E1	-3.26747E1	2.67949E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.98156E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.11597E-2	-8.8002E1	-1.12057E-3	-8.80005E1	0.0E0	4.95911E-3	9.36031E-2	2.73611E1	-3.26756E1	-3.2577E1	2.68136E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.99E-1
1.6E1	3.6E1	0.0E0	6.47E2	4.41E2	-7.13143E-2	-8.80019E1	-7.39098E-4	-8.80001E1	1.90735E-4	4.8399E-3	9.35555E-2	2.72998E1	-3.26921E1	-3.2629E1	2.681E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99941E-1
1.7E1	4.5E1	0.0E0	6.87E2	4.7E2	-7.16233E-2	-8.8002E1	-7.86781E-4	-8.80003E1	1.19209E-4	4.81606E-3	9.36031E-2	2.73303E1	-3.26591E1	-3.26266E1	2.68024E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.03286E-1
1.8E1	1.99E2	0.0E0	7.27E2	5.0E2	-7.21643E-2	-8.8002E1	-1.0252E-3	-8.80003E1	1.66893E-4	4.673E-3	9.34362E-2	2.7278E1	-3.26756E1	-3.26101E1	2.6801E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02396E-1
1.9E1	3.46E2	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80021E1	-1.12057E-3	-8.80006E1	2.86102E-4	4.55379E-3	9.34362E-2	2.73219E1	-3.26807E1	-3.26639E1	2.68208E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9978E-1
2.0E1	2.151E3	2.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80023E1	-9.53674E-4	-8.80005E1	5.24521E-4	4.93526E-3	9.37223E-2	2.73129E1	-3.26651E1	-3.26615E1	2.67824E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99686E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80021E1	-1.09673E-3	-8.80004E1	2.38419E-4	4.76837E-3	9.36747E-2	2.72827E1	-3.26826E1	-3.26242E1	2.68022E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.98222E-1
2.2E1	1.47E2	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.8002E1	-9.77516E-4	-8.80006E1	3.57628E-4	4.76837E-3	9.35078E-2	2.73334E1	-3.26549E1	-3.25971E1	2.67879E1	1.20278E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80022E1	-1.35899E-3	-8.80004E1	2.38419E-5	4.91142E-3	9.37939E-2	2.73183E1	-3.26627E1	-3.26134E1	2.6828E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00966E-1
