[Scan]
initial_time=2016-01-28T18:17:19
final_time=2016-01-28T18:17:41
ip_count=19
run=1026
dataset=3
scan=241
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.286E-2
qbias_imon=-3.73693E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.78451E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.47318E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.48962E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.62122E-8
mult1=-1.00904E-8
mult2=-2.84672E-9
rf_tmon=-3.01113E-3
rf_agc=3.50139E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=5.6777E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68037E0
bslens_imon=2.57865E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=1.96386E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05228E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=3.1056E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04609E2
lens23_imon=1.01933E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05147E1
cs_ea1_imon=1.2443E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04894E0
lens1_imon=1.34694E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64626E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.41419E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84166E1
cs_ef1a_imon=3.00396E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.18882E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11436E1
os_restr1_imon=4.29238E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15394E1
os_ea1_imon=2.43956E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22673E0
cs_ionrep_imon=9.74596E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.9336E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01953E1
cs_anode1_imon=2.03486E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.90356E-8
tplens_vset=1.4E-1
tplens_vmon=1.60486E0
tplens_imon=-5.11252E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26844E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26632E1
iondef2_imon=1.5763E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02941E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=8.72493E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24974E0
ionrepsh_imon=9.33538E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33386E1
lens5b_imon=2.18967E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.11713E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42081E0
os_ea2_imon=-6.91762E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.1784E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.68437E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.37654E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10739E1
os_restr2_imon=3.36905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.3053E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02001E1
cs_anode2_imon=2.10333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73228E1
iondef1_imon=1.08432E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.08341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.23655E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.42066E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08329E0
cs_ionaccel_imon=-1.1635E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56303E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=1.94517E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.8656E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92609E3
multa_neg_imon=7.57276E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.58526E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.0737E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43213E0
defgridb_imon=6.18531E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33213E1
os_fil1_imon=9.41669E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06476E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60963E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30549E1
cs_fil1_imon=9.25331E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28842E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62113E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42053E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.8719E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.66597E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19028E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2163E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.46388E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.4E2	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80016E1	-6.4373E-4	-8.80003E1	-9.53674E-5	4.07696E-3	9.33647E-2	2.72813E1	-3.26793E1	-3.26277E1	2.67966E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.9841E-1
2.0E0	8.742E3	1.0E1	3.16E2	1.6E2	-7.21643E-2	-8.80018E1	-4.76837E-4	-8.80003E1	0.0E0	4.19617E-3	9.35316E-2	2.72783E1	-3.26728E1	-3.25848E1	2.68046E1	1.19841E-7	2.51393E-3	2.51393E-3	6.31798E-3	2.99343E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80019E1	-6.19888E-4	-8.80002E1	-1.43051E-4	4.48227E-3	9.33409E-2	2.7301E1	-3.2648E1	-3.2706E1	2.68175E1	1.19991E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.00522E-1
4.0E0	2.08E3	0.0E0	6.55E2	3.98E2	-7.14689E-2	-8.8002E1	-8.34465E-4	-8.80001E1	-1.19209E-4	4.673E-3	9.36985E-2	2.72781E1	-3.26693E1	-3.25515E1	2.68144E1	1.20192E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.18554E-2	-8.80018E1	-1.0252E-3	-8.8E1	3.09944E-4	5.126E-3	9.38654E-2	2.72751E1	-3.26452E1	-3.26927E1	2.67937E1	1.20226E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80017E1	-9.29832E-4	-8.80002E1	0.0E0	4.72069E-3	9.33886E-2	2.72811E1	-3.26645E1	-3.26086E1	2.68232E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80018E1	-5.24521E-4	-8.80001E1	-4.76837E-5	4.81606E-3	9.35793E-2	2.72756E1	-3.26815E1	-3.26065E1	2.67878E1	1.19809E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80016E1	-7.15256E-4	-8.79998E1	-1.66893E-4	4.45843E-3	9.33886E-2	2.72943E1	-3.26687E1	-3.25948E1	2.67944E1	1.20226E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.97187E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80018E1	-8.10623E-4	-8.79999E1	-9.53674E-5	4.98295E-3	9.35078E-2	2.72998E1	-3.26449E1	-3.26077E1	2.68322E1	1.20106E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80019E1	-6.67572E-4	-8.80002E1	-2.38419E-5	4.29153E-3	9.32217E-2	2.72961E1	-3.26807E1	-3.27089E1	2.68094E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00824E-1
1.4E1	2.94E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80019E1	-8.10623E-4	-8.80003E1	2.38419E-5	4.26769E-3	9.34839E-2	2.73228E1	-3.26661E1	-3.26006E1	2.67914E1	1.20106E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00453E-1
1.5E1	1.0E1	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.8002E1	-8.10623E-4	-8.80002E1	-1.43051E-4	4.62532E-3	9.35555E-2	2.72998E1	-3.2659E1	-3.26313E1	2.67932E1	1.19965E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.98222E-1
1.6E1	2.6E1	0.0E0	6.47E2	4.41E2	-7.23189E-2	-8.80018E1	-9.05991E-4	-8.80002E1	-4.76837E-5	4.43459E-3	9.37223E-2	2.72805E1	-3.26825E1	-3.25527E1	2.678E1	1.20055E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.9841E-1
1.7E1	4.5E1	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80024E1	-9.77516E-4	-8.80003E1	-2.38419E-5	4.41074E-3	9.35793E-2	2.72985E1	-3.26404E1	-3.26735E1	2.68099E1	1.20122E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
1.8E1	2.13E2	0.0E0	7.27E2	5.0E2	-7.17779E-2	-8.80021E1	-8.58307E-4	-8.79999E1	-4.76837E-5	4.69685E-3	9.34839E-2	2.73051E1	-3.26687E1	-3.25557E1	2.68194E1	1.20055E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00197E-1
1.9E1	3.48E2	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80017E1	-8.34465E-4	-8.80003E1	0.0E0	4.24385E-3	9.34601E-2	2.72803E1	-3.26726E1	-3.26927E1	2.67845E1	1.19809E-7	2.51334E-3	2.51334E-3	6.28552E-3	3.02659E-1
2.0E1	2.229E3	3.0E0	8.08E2	5.58E2	-7.13143E-2	-8.80021E1	-8.34465E-4	-8.8E1	2.14577E-4	4.673E-3	9.35793E-2	2.72979E1	-3.26927E1	-3.25401E1	2.68154E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01347E-1
2.1E1	8.0E0	0.0E0	8.49E2	5.88E2	-7.20871E-2	-8.80021E1	-1.14441E-3	-8.80004E1	-2.38419E-5	4.60148E-3	9.32932E-2	2.72591E1	-3.26691E1	-3.26325E1	2.67878E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
2.2E1	1.29E2	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.8002E1	-6.19888E-4	-8.80004E1	-7.15256E-5	4.72069E-3	9.31978E-2	2.73129E1	-3.26404E1	-3.26152E1	2.68215E1	1.2003E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.00069E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.286E-2	-8.8002E1	-7.39098E-4	-8.80003E1	2.6226E-4	4.48227E-3	9.37223E-2	2.73228E1	-3.26632E1	-3.26844E1	2.68154E1					
