[Scan]
initial_time=2016-01-28T18:17:49
final_time=2016-01-28T18:18:11
ip_count=19
run=1026
dataset=3
scan=242
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.75124E-6
ql1_vset=
ql1_vmon=-8.8002E1
ql1_imon=-5.83708E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=1.46543E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.49307E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.62071E-8
mult1=-1.16273E-8
mult2=-2.67034E-9
rf_tmon=-4.18503E-3
rf_agc=3.26602E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=5.15175E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67742E0
bslens_imon=2.55742E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19919E1
lens5a_imon=1.9805E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05139E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5385E1
cs_ef1b_imon=3.0937E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.0211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04805E1
cs_ea1_imon=1.25138E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08433E0
lens1_imon=1.54868E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.97153E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03879E1
cs_ea2_imon=1.38977E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8458E1
cs_ef1a_imon=3.00396E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.19006E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.30103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15152E1
os_ea1_imon=2.44203E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23499E0
cs_ionrep_imon=9.75303E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93353E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01617E1
cs_anode1_imon=2.04098E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.90212E-8
tplens_vset=1.4E-1
tplens_vmon=1.63907E0
tplens_imon=-2.49335E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26797E1
iondef3_imon=1.50551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26679E1
iondef2_imon=1.58231E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98463E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=8.40938E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33114E0
ionrepsh_imon=9.25398E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33923E1
lens5b_imon=2.18861E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41196E0
os_ea2_imon=-6.20973E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00548E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.18813E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.7096E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81807E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.37193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.30318E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01677E1
cs_anode2_imon=2.10045E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73092E1
iondef1_imon=1.09175E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68366E1
iondef4_imon=1.08593E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.2178E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.43865E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16138E0
cs_ionaccel_imon=-1.03015E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=1.93917E-1
window_imon=-1.12025E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39055E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-6.04886E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.52675E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93756E3
defgrida_imon=6.58172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.99229E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43508E0
defgridb_imon=6.1216E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33201E1
os_fil1_imon=9.38672E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07347E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61108E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30564E1
cs_fil1_imon=9.25181E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35389E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61709E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.39521E-2
os_fil2_imon=-2.55785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89305E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.79091E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.28154E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21622E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.38579E-1
res40_imon=-2.60869E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.17E2	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80021E1	-8.10623E-4	-8.80001E1	2.38419E-5	4.673E-3	9.37939E-2	2.73307E1	-3.26807E1	-3.26345E1	2.6792E1	1.2026E-7	2.51525E-3	2.51525E-3	6.28592E-3	3.01223E-1
2.0E0	8.781E3	1.1E1	3.16E2	1.6E2	-7.22418E-2	-8.80019E1	-6.19888E-4	-8.80003E1	0.0E0	4.19617E-3	9.35078E-2	2.72943E1	-3.26438E1	-3.2696E1	2.68076E1	1.19841E-7	2.52236E-3	2.52236E-3	6.31269E-3	3.02368E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80019E1	-7.39098E-4	-8.80003E1	-2.38419E-5	4.74453E-3	9.35793E-2	2.73028E1	-3.26573E1	-3.26301E1	2.67763E1	1.19883E-7	2.51952E-3	2.51952E-3	6.31879E-3	3.03246E-1
4.0E0	1.995E3	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.8002E1	-1.00136E-3	-8.80003E1	1.90735E-4	4.81606E-3	9.36031E-2	2.73177E1	-3.26573E1	-3.25479E1	2.67986E1	1.20092E-7	2.51814E-3	2.51814E-3	6.31269E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.8002E1	-8.10623E-4	-8.80003E1	7.15256E-5	4.62532E-3	9.34601E-2	2.73417E1	-3.26693E1	-3.25659E1	2.68262E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80019E1	-9.29832E-4	-8.8E1	1.19209E-4	4.64916E-3	9.36031E-2	2.72927E1	-3.26891E1	-3.26225E1	2.68022E1	1.19757E-7	2.51662E-3	2.51662E-3	6.28006E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.8002E1	-1.0252E-3	-8.80001E1	2.86102E-4	4.45843E-3	9.36031E-2	2.72903E1	-3.26413E1	-3.26756E1	2.68088E1	1.19851E-7	2.52061E-3	2.52061E-3	6.35059E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80022E1	-8.10623E-4	-8.80005E1	4.29153E-4	5.07832E-3	9.38177E-2	2.72795E1	-3.26391E1	-3.25137E1	2.68278E1	1.20004E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.01223E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80022E1	-8.10623E-4	-8.80003E1	9.53674E-5	4.8399E-3	9.35316E-2	2.72903E1	-3.26396E1	-3.26779E1	2.68214E1	1.19951E-7	2.51693E-3	2.51693E-3	6.32138E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80023E1	-1.12057E-3	-8.80002E1	-4.76837E-5	4.93526E-3	9.35078E-2	2.731E1	-3.2667E1	-3.26291E1	2.68082E1					
1.4E1	2.84E2	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80024E1	-1.12057E-3	-8.80002E1	5.24521E-4	4.8399E-3	9.35078E-2	2.7311E1	-3.26526E1	-3.25977E1	2.6787E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.9978E-1
1.5E1	1.0E1	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.8002E1	-8.82149E-4	-8.8E1	2.38419E-5	5.03063E-3	9.35078E-2	2.72666E1	-3.26344E1	-3.25864E1	2.68088E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.9943E-1
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80022E1	-1.0252E-3	-8.79999E1	2.14577E-4	5.22137E-3	9.32217E-2	2.73333E1	-3.26554E1	-3.27005E1	2.67974E1	1.20191E-7	2.51359E-3	2.51359E-3	6.32418E-3	2.98819E-1
1.7E1	5.7E1	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80018E1	-9.05991E-4	-8.79999E1	0.0E0	5.17368E-3	9.33886E-2	2.72799E1	-3.26554E1	-3.26813E1	2.68058E1	1.19749E-7	2.52276E-3	2.52276E-3	6.30202E-3	2.99686E-1
1.8E1	2.32E2	0.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80017E1	-6.67572E-4	-8.79999E1	-1.90735E-4	4.91142E-3	9.35793E-2	2.7266E1	-3.26567E1	-3.25581E1	2.6795E1	1.19939E-7	2.52099E-3	2.52099E-3	6.32112E-3	3.01871E-1
1.9E1	3.58E2	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80019E1	-6.91414E-4	-8.8E1	2.38419E-5	4.74453E-3	9.32693E-2	2.73187E1	-3.26809E1	-3.2682E1	2.67926E1					
2.0E1	2.156E3	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80018E1	-4.76837E-4	-8.80001E1	2.14577E-4	4.50611E-3	9.38416E-2	2.73277E1	-3.26487E1	-3.25654E1	2.67992E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01609E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80019E1	-5.72205E-4	-8.80003E1	3.09944E-4	4.93526E-3	9.36031E-2	2.73045E1	-3.26838E1	-3.26927E1	2.68028E1	1.20383E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02133E-1
2.2E1	1.75E2	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80021E1	-5.72205E-4	-8.80002E1	1.90735E-4	5.00679E-3	9.33647E-2	2.72874E1	-3.26508E1	-3.25593E1	2.67955E1	1.20209E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.8002E1	-6.4373E-4	-8.80003E1	2.14577E-4	4.95911E-3	9.3317E-2	2.73092E1	-3.26679E1	-3.26797E1	2.68366E1	1.2026E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.00453E-1
