[Scan]
initial_time=2016-01-28T18:20:32
final_time=2016-01-28T18:20:53
ip_count=19
run=1026
dataset=4
scan=247
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.18992E-1
ql1_imon=1.43587E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=1.96816E-9
ql3_vset=
ql3_vmon=-9.1311E0
ql3_imon=2.36865E-9
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-2.57838E-10
mult1=-9.62248E-9
mult2=-2.82971E-9
rf_tmon=-4.25838E-3
rf_agc=3.42221E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.66283E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68454E0
bslens_imon=2.29307E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19065E1
lens5a_imon=1.98253E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12534E2
lens4a_imon=2.04901E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53486E1
cs_ef1b_imon=3.10253E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04571E2
lens23_imon=1.02259E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05225E1
cs_ea1_imon=1.23184E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35025E0
lens1_imon=2.76351E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64568E1
os_ef1alow_imon=2.96225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04677E1
cs_ea2_imon=1.40096E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84597E1
cs_ef1a_imon=2.99468E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.20088E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.30387E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15104E1
os_ea1_imon=2.43838E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63487E1
os_ef1bup_imon=3.07456E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29333E0
cs_ionrep_imon=9.46737E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93384E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01633E1
cs_anode1_imon=2.05526E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.15296E-8
tplens_vset=1.4E-1
tplens_vmon=1.67929E0
tplens_imon=-6.10724E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26658E1
iondef3_imon=1.49708E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26444E1
iondef2_imon=1.55913E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02882E2
lens6_imon=2.98545E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.93479E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34335E0
ionrepsh_imon=9.09426E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33584E1
lens5b_imon=2.19666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74528E1
cs_ef2b_imon=3.13294E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49408E0
os_ea2_imon=-1.00006E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.007E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.19538E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05321E0
os_ef2alow_imon=-2.49697E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94721E-1
os_ef2bup_imon=-5.39185E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10887E1
os_restr2_imon=3.37053E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.27292E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01775E1
cs_anode2_imon=2.09621E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.11504E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.07368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.19161E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.46351E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1173E0
cs_ionaccel_imon=-1.01709E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.4721E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.65946E-6
window_vset=0.0E0
window_vmon=1.59379E-1
window_imon=-1.05763E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39068E-4
mask2_vset=0.0E0
mask2_vmon=-1.86493E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92685E3
multa_neg_imon=7.29764E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.31619E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.23681E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2557E0
defgridb_imon=6.15803E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33173E1
os_fil1_imon=9.36737E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07316E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6174E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30584E1
cs_fil1_imon=9.2477E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32844E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61982E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.4171E-2
os_fil2_imon=-2.60065E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96062E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.33779E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3475E-1
cs_fil2_imon=-2.39117E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.05513E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21629E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31827E-3
inlet_lpb_pmon=3.01674E-1
chamber_ion_pmon=1.2014E-7
chamber_cvt_pmon=2.51755E-3
foreline_cvt_pmon=2.51755E-3
chamber_tmon=1.40078E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.96758E-1
res40_imon=-2.40372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.19206E-1	-7.98774E-1	-9.13112E0	-9.14164E0	4.81606E-3	9.37462E-2	2.72697E1	-3.26909E1	-3.25947E1	2.6803E1	1.19977E-7	2.5207E-3	2.5207E-3	6.3074E-3	2.99451E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09441E0	-8.19111E-1	-7.98678E-1	-9.13069E0	-9.14161E0	4.91142E-3	9.39131E-2	2.728E1	-3.26805E1	-3.26162E1	2.6802E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3514E-3	2.9874E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.19087E-1	-7.9844E-1	-9.13076E0	-9.14192E0	5.03063E-3	9.35793E-2	2.73198E1	-3.26644E1	-3.26343E1	2.68163E1	1.20031E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.98554E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.1892E-1	-7.98798E-1	-9.13112E0	-9.14171E0	4.95911E-3	9.34601E-2	2.72889E1	-3.26776E1	-3.26573E1	2.68166E1	1.19941E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.19135E-1	-7.98798E-1	-9.13122E0	-9.14202E0	4.8399E-3	9.35078E-2	2.73326E1	-3.26566E1	-3.26517E1	2.67998E1	1.19851E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.19278E-1	-7.98941E-1	-9.13129E0	-9.14185E0	4.76837E-3	9.35078E-2	2.72961E1	-3.26558E1	-3.26382E1	2.68114E1	1.19978E-7	2.51581E-3	2.51581E-3	6.32418E-3	2.99083E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.19135E-1	-7.98821E-1	-9.13117E0	-9.1419E0	4.81606E-3	9.36031E-2	2.72603E1	-3.26573E1	-3.25658E1	2.68112E1	1.20213E-7	2.51639E-3	2.51639E-3	6.32364E-3	3.00159E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.19254E-1	-7.98821E-1	-9.13103E0	-9.1419E0	4.41074E-3	9.37223E-2	2.72949E1	-3.26735E1	-3.26416E1	2.68094E1	1.19861E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.02659E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.19182E-1	-7.98965E-1	-9.13117E0	-9.14199E0	4.64916E-3	9.37462E-2	2.73003E1	-3.26717E1	-3.26092E1	2.683E1	1.19965E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.19564E-1	-7.99203E-1	-9.13124E0	-9.14187E0	4.673E-3	9.35078E-2	2.72811E1	-3.26897E1	-3.26116E1	2.68004E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.19278E-1	-7.98917E-1	-9.13103E0	-9.14161E0	4.43459E-3	9.35555E-2	2.73216E1	-3.26632E1	-3.26195E1	2.68325E1	1.19861E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.18944E-1	-7.98607E-1	-9.13115E0	-9.14199E0	4.673E-3	9.35316E-2	2.72985E1	-3.26561E1	-3.26464E1	2.68184E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00197E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.18872E-1	-7.99012E-1	-9.13138E0	-9.14207E0	4.673E-3	9.37939E-2	2.72841E1	-3.26777E1	-3.2635E1	2.684E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.02253E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.18729E-1	-7.98893E-1	-9.13117E0	-9.14209E0	4.60148E-3	9.34601E-2	2.73045E1	-3.26413E1	-3.25806E1	2.6813E1	1.20122E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.03449E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.18992E-1	-7.99012E-1	-9.13129E0	-9.14187E0	4.81606E-3	9.38416E-2	2.73027E1	-3.26765E1	-3.26044E1	2.68022E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.18872E-1	-7.99131E-1	-9.13107E0	-9.14192E0	4.88758E-3	9.34362E-2	2.73081E1	-3.26657E1	-3.26627E1	2.68094E1	1.20069E-7	2.51116E-3	2.51116E-3	6.32936E-3	3.00824E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09642E0	-8.18872E-1	-7.9906E-1	-9.13103E0	-9.14207E0	4.76837E-3	9.36031E-2	2.73122E1	-3.2659E1	-3.2613E1	2.68082E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.99941E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.19063E-1	-7.99155E-1	-9.13103E0	-9.14211E0	4.76837E-3	9.33886E-2	2.73021E1	-3.26777E1	-3.26182E1	2.67998E1	1.19705E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01609E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.18992E-1	-7.98655E-1	-9.13124E0	-9.14195E0	4.69685E-3	9.34601E-2	2.73275E1	-3.26679E1	-3.26437E1	2.6834E1	1.20174E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.18992E-1	-7.9875E-1	-9.1311E0	-9.14173E0	4.74453E-3	9.3627E-2	2.73051E1	-3.26444E1	-3.26658E1	2.68016E1	1.2014E-7	2.51755E-3	2.51755E-3	6.31827E-3	3.01674E-1
