[Scan]
initial_time=2016-01-28T18:21:01
final_time=2016-01-28T18:21:21
ip_count=19
run=1026
dataset=4
scan=248
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08734E-4
ql1_vset=
ql1_vmon=-8.18801E-1
ql1_imon=1.42987E-8
ql2_vset=
ql2_vmon=-7.99155E-1
ql2_imon=1.91432E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=1.90287E-9
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-2.17962E-10
mult1=-9.40325E-9
mult2=-2.73658E-9
rf_tmon=-3.81547E-3
rf_agc=3.3646E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=1.66246E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63595E0
bslens_imon=2.44345E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20148E1
lens5a_imon=1.9874E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12432E2
lens4a_imon=2.05053E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=3.08996E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04806E1
cs_ea1_imon=1.25973E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39397E0
lens1_imon=2.44345E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64615E1
os_ef1alow_imon=2.96509E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03956E1
cs_ea2_imon=1.43493E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84259E1
cs_ef1a_imon=3.02144E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.19598E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11421E1
os_restr1_imon=4.27549E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=2.42812E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63568E1
os_ef1bup_imon=3.08267E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24626E0
cs_ionrep_imon=9.68508E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93502E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01937E1
cs_anode1_imon=2.04756E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.15314E-8
tplens_vset=1.4E-1
tplens_vmon=1.67453E0
tplens_imon=-4.41525E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26056E1
iondef3_imon=1.51708E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.56341E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.97055E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22939E0
ionrepsh_imon=9.36582E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3382E1
lens5b_imon=2.17311E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.12605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4286E0
os_ea2_imon=-4.06485E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00366E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71231E1
cs_ef2a_imon=3.18443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08564E0
os_ef2alow_imon=-2.59428E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.39591E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10738E1
os_restr2_imon=3.36486E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.32809E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01842E1
cs_anode2_imon=2.10432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73231E1
iondef1_imon=1.0783E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.10368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.18365E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.4452E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.095E0
cs_ionaccel_imon=-1.19954E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47238E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56493E1
einzel_imon=7.73244E-6
window_vset=0.0E0
window_vmon=1.8303E-1
window_imon=-1.13061E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.391E-4
mask2_vset=0.0E0
mask2_vmon=-1.86655E1
mask2_imon=-6.60297E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.68E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.48474E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.30624E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54966E0
defgridb_imon=6.09541E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3318E1
os_fil1_imon=9.3696E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07451E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61515E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3052E1
cs_fil1_imon=9.24655E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35614E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61225E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.59528E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.44858E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38246E-1
cs_fil2_imon=-1.95869E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.06463E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21329E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00302E-1
chamber_ion_pmon=1.2033E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40064E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.10273E-1
res40_imon=-2.59022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.18825E-1	-7.99012E-1	-9.13081E0	-9.14159E0	5.03063E-3	9.36031E-2	2.73027E1	-3.26915E1	-3.26419E1	2.68076E1					
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.18944E-1	-7.98702E-1	-9.13115E0	-9.14156E0	5.17368E-3	9.35316E-2	2.72965E1	-3.26615E1	-3.26407E1	2.67939E1	1.20004E-7	2.5131E-3	2.5131E-3	6.33436E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.18872E-1	-7.98702E-1	-9.13124E0	-9.14183E0	4.88758E-3	9.3627E-2	2.73163E1	-3.26449E1	-3.26054E1	2.68435E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.01209E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09487E0	-8.18968E-1	-7.98464E-1	-9.13086E0	-9.14183E0	4.673E-3	9.39846E-2	2.72827E1	-3.26608E1	-3.26354E1	2.68046E1	1.20004E-7	2.50882E-3	2.50882E-3	6.32896E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.18729E-1	-7.98798E-1	-9.131E0	-9.14185E0	4.95911E-3	9.34601E-2	2.73319E1	-3.26547E1	-3.26397E1	2.67739E1	1.20106E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.99686E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.18849E-1	-7.98941E-1	-9.13095E0	-9.14195E0	5.26905E-3	9.35555E-2	2.72841E1	-3.26482E1	-3.26092E1	2.68202E1	1.201E-7	2.52066E-3	2.52066E-3	6.34164E-3	3.01881E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.1861E-1	-7.98774E-1	-9.13062E0	-9.14185E0	5.126E-3	9.36031E-2	2.73178E1	-3.26671E1	-3.26364E1	2.68198E1	1.20122E-7	2.51552E-3	2.51552E-3	6.28552E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.18872E-1	-7.98774E-1	-9.13072E0	-9.14207E0	4.98295E-3	9.37223E-2	2.72877E1	-3.26741E1	-3.2641E1	2.68244E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31009E-3	3.01995E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.18467E-1	-7.99298E-1	-9.13095E0	-9.14214E0	5.00679E-3	9.33647E-2	2.72989E1	-3.26653E1	-3.26154E1	2.67483E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.18348E-1	-7.98941E-1	-9.13076E0	-9.14199E0	5.17368E-3	9.36031E-2	2.73069E1	-3.26343E1	-3.25912E1	2.67716E1	1.19945E-7	2.51787E-3	2.51787E-3	6.31017E-3	3.01675E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.18372E-1	-7.98917E-1	-9.13069E0	-9.14178E0	5.07832E-3	9.34601E-2	2.73147E1	-3.26591E1	-3.26603E1	2.68064E1					
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.18396E-1	-7.99012E-1	-9.13084E0	-9.14204E0	5.14984E-3	9.33409E-2	2.73057E1	-3.26555E1	-3.26065E1	2.68052E1	1.20069E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.02396E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09456E0	-8.18968E-1	-7.98988E-1	-9.13093E0	-9.14195E0	5.126E-3	9.35793E-2	2.72837E1	-3.27209E1	-3.26303E1	2.68791E1	1.198E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.03027E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.18849E-1	-7.98869E-1	-9.13103E0	-9.14226E0	5.38826E-3	9.34124E-2	2.73634E1	-3.26849E1	-3.26392E1	2.68022E1	1.19757E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.9926E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.18801E-1	-7.99012E-1	-9.13107E0	-9.1419E0	5.24521E-3	9.32693E-2	2.73213E1	-3.26518E1	-3.26392E1	2.68064E1	1.19978E-7	2.52139E-3	2.52139E-3	6.32418E-3	2.99613E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.1861E-1	-7.98988E-1	-9.13091E0	-9.14173E0	5.19753E-3	9.34362E-2	2.7324E1	-3.26697E1	-3.26284E1	2.67956E1	1.19809E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.01347E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.18801E-1	-7.9875E-1	-9.13079E0	-9.14192E0	4.95911E-3	9.34839E-2	2.73201E1	-3.27029E1	-3.26044E1	2.6796E1	1.20209E-7	2.5131E-3	2.5131E-3	6.31278E-3	2.99686E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.18872E-1	-7.98774E-1	-9.13088E0	-9.14211E0	4.86374E-3	9.33886E-2	2.72827E1	-3.27139E1	-3.26738E1	2.68064E1	1.20174E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.00563E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09433E0	-8.18753E-1	-7.98941E-1	-9.13098E0	-9.14199E0	4.93526E-3	9.32693E-2	2.73574E1	-3.26651E1	-3.25731E1	2.681E1	1.20142E-7	2.51814E-3	2.51814E-3	6.32858E-3	3.01862E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.18801E-1	-7.99155E-1	-9.13112E0	-9.14185E0	5.19753E-3	9.32693E-2	2.73231E1	-3.26669E1	-3.26056E1	2.68076E1	1.2033E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
