[Scan]
initial_time=2016-01-28T18:21:29
final_time=2016-01-28T18:21:49
ip_count=19
run=1026
dataset=4
scan=249
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09379E0
qbias_imon=-1.08706E-4
ql1_vset=
ql1_vmon=-8.18181E-1
ql1_imon=1.42306E-8
ql2_vset=
ql2_vmon=-7.99227E-1
ql2_imon=2.06704E-9
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=1.69842E-9
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-2.27809E-10
mult1=-9.16244E-9
mult2=-2.76652E-9
rf_tmon=-3.61119E-3
rf_agc=3.38923E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.71551E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67585E0
bslens_imon=2.72303E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19707E1
lens5a_imon=1.97546E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53431E1
cs_ef1b_imon=3.09629E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02228E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05312E1
cs_ea1_imon=1.23719E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36644E0
lens1_imon=2.68263E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64621E1
os_ef1alow_imon=2.98402E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.40211E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84332E1
cs_ef1a_imon=2.99974E-5
olens2_vset=9.7E-1
olens2_vmon=9.69648E-1
olens2_imon=1.2015E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11392E1
os_restr1_imon=4.31338E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15661E1
os_ea1_imon=2.41328E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63598E1
os_ef1bup_imon=3.07421E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21782E0
cs_ionrep_imon=9.60251E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02115E1
cs_anode1_imon=2.05361E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.16308E-8
tplens_vset=1.4E-1
tplens_vmon=1.60225E0
tplens_imon=-2.19017E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26651E1
iondef3_imon=1.49246E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27011E1
iondef2_imon=1.56776E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.97067E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26067E0
ionrepsh_imon=9.25358E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33976E1
lens5b_imon=2.18078E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74377E1
cs_ef2b_imon=3.12436E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45962E0
os_ea2_imon=-6.41408E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71295E1
cs_ef2a_imon=3.18687E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04271E0
os_ef2alow_imon=-2.59677E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95761E-1
os_ef2bup_imon=-5.28394E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10774E1
os_restr2_imon=3.36426E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.30553E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01884E1
cs_anode2_imon=2.10039E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72721E1
iondef1_imon=1.08293E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.0768E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.20608E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.46534E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13201E0
cs_ionaccel_imon=-1.06231E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02064E2
cs_ionfocb_imon=1.47346E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56287E1
einzel_imon=7.7814E-6
window_vset=0.0E0
window_vmon=1.73933E-1
window_imon=-1.20079E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.86126E1
mask2_imon=-7.70391E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.41709E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.64577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.18202E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3392E0
defgridb_imon=6.12053E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33179E1
os_fil1_imon=9.40237E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07448E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61566E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30557E1
cs_fil1_imon=9.25086E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.38681E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62102E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38398E-2
os_fil2_imon=-2.61884E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85978E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.43689E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35971E-1
cs_fil2_imon=-2.25706E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.11661E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21717E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.8683E-1
res40_imon=-2.39841E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09441E0	-8.18682E-1	-7.98631E-1	-9.13105E0	-9.14199E0	4.93526E-3	9.32693E-2	2.73051E1	-3.26621E1	-3.2611E1	2.68012E1	1.19925E-7	2.52697E-3	2.52697E-3	6.32978E-3	3.00144E-1
2.0E0	2.5E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.18539E-1	-7.98392E-1	-9.13122E0	-9.14204E0	4.91142E-3	9.34839E-2	2.73201E1	-3.26512E1	-3.26687E1	2.68213E1	1.20311E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09387E0	-8.18634E-1	-7.98512E-1	-9.13115E0	-9.14195E0	4.8399E-3	9.32455E-2	2.73104E1	-3.26779E1	-3.25995E1	2.68163E1	1.20084E-7	2.51136E-3	2.51136E-3	6.32418E-3	3.01742E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.18849E-1	-7.98941E-1	-9.13115E0	-9.14214E0	4.98295E-3	9.34839E-2	2.72979E1	-3.26633E1	-3.26458E1	2.68004E1	1.1964E-7	2.52448E-3	2.52448E-3	6.31269E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.18539E-1	-7.99179E-1	-9.13112E0	-9.14204E0	4.91142E-3	9.36508E-2	2.73339E1	-3.26488E1	-3.26194E1	2.67842E1	1.19978E-7	2.52027E-3	2.52027E-3	6.31299E-3	2.99348E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.18586E-1	-7.9906E-1	-9.13091E0	-9.14218E0	5.07832E-3	9.3627E-2	2.72817E1	-3.26753E1	-3.2593E1	2.68016E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09402E0	-8.18753E-1	-7.99251E-1	-9.13095E0	-9.14171E0	5.29289E-3	9.37223E-2	2.72835E1	-3.2635E1	-3.26446E1	2.67812E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09371E0	-8.18563E-1	-7.99322E-1	-9.13088E0	-9.14199E0	4.91142E-3	9.33886E-2	2.72696E1	-3.26687E1	-3.25996E1	2.68238E1	1.20226E-7	2.52209E-3	2.52209E-3	6.28552E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0934E0	-8.18634E-1	-7.98988E-1	-9.13086E0	-9.1418E0	5.126E-3	9.37223E-2	2.72883E1	-3.26561E1	-3.26224E1	2.68172E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.18682E-1	-7.98821E-1	-9.13105E0	-9.14183E0	4.98295E-3	9.3317E-2	2.72889E1	-3.26476E1	-3.25803E1	2.68082E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01871E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09286E0	-8.18443E-1	-7.98821E-1	-9.13093E0	-9.14166E0	5.14984E-3	9.36985E-2	2.72886E1	-3.26602E1	-3.26649E1	2.6804E1	1.19749E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.03027E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09356E0	-8.18825E-1	-7.98774E-1	-9.13088E0	-9.14192E0	5.07832E-3	9.33409E-2	2.72943E1	-3.26687E1	-3.26086E1	2.68034E1	1.20122E-7	2.51334E-3	2.51334E-3	6.28552E-3	3.02133E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.18515E-1	-7.98941E-1	-9.13069E0	-9.14209E0	4.86374E-3	9.36985E-2	2.72961E1	-3.26615E1	-3.25906E1	2.68166E1	1.19965E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.18801E-1	-7.98845E-1	-9.13093E0	-9.14164E0	5.07832E-3	9.33647E-2	2.73181E1	-3.26714E1	-3.26514E1	2.67978E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00302E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09456E0	-8.18825E-1	-7.98726E-1	-9.131E0	-9.14183E0	4.86374E-3	9.34124E-2	2.72727E1	-3.26632E1	-3.26313E1	2.6807E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.18586E-1	-7.98631E-1	-9.13107E0	-9.14176E0	4.93526E-3	9.36031E-2	2.72586E1	-3.26542E1	-3.26425E1	2.68118E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0071E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.18563E-1	-7.98798E-1	-9.13055E0	-9.14171E0	4.98295E-3	9.35793E-2	2.73653E1	-3.26797E1	-3.25511E1	2.68147E1	1.20069E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09364E0	-8.18372E-1	-7.98726E-1	-9.13072E0	-9.14178E0	4.8399E-3	9.35316E-2	2.72918E1	-3.26393E1	-3.26753E1	2.6817E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09364E0	-8.18348E-1	-7.9875E-1	-9.13064E0	-9.14207E0	4.64916E-3	9.36985E-2	2.73273E1	-3.26591E1	-3.26428E1	2.68105E1	1.20293E-7	2.51814E-3	2.51814E-3	6.31798E-3	3.02875E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09379E0	-8.18181E-1	-7.99227E-1	-9.13105E0	-9.14183E0	4.88758E-3	9.35316E-2	2.72721E1	-3.27011E1	-3.26651E1	2.6804E1	1.20311E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.00453E-1
