[Scan]
initial_time=2016-01-28T18:22:53
final_time=2016-01-28T18:23:13
ip_count=19
run=1026
dataset=4
scan=252
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08738E-4
ql1_vset=
ql1_vmon=-8.17895E-1
ql1_imon=1.40723E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=1.99242E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=1.19544E-9
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-1.71351E-10
mult1=-1.00534E-8
mult2=-2.75853E-9
rf_tmon=-4.03777E-3
rf_agc=3.39344E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=1.68723E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64698E0
bslens_imon=2.47849E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19688E1
lens5a_imon=1.97416E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12468E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53496E1
cs_ef1b_imon=3.10454E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02074E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0491E1
cs_ea1_imon=1.22742E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4102E0
lens1_imon=2.73934E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64738E1
os_ef1alow_imon=2.97454E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03431E1
cs_ea2_imon=1.40417E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84628E1
cs_ef1a_imon=2.99984E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.193E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11227E1
os_restr1_imon=4.29986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1517E1
os_ea1_imon=2.4472E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22939E0
cs_ionrep_imon=9.71233E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93443E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=2.05012E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.15933E-8
tplens_vset=1.4E-1
tplens_vmon=1.60509E0
tplens_imon=-1.53417E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27426E1
iondef3_imon=1.5089E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.5821E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.9835E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.9975E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26637E0
ionrepsh_imon=9.38918E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33288E1
lens5b_imon=2.17622E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.12945E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4565E0
os_ea2_imon=-5.50539E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00374E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71147E1
cs_ef2a_imon=3.1855E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07207E0
os_ef2alow_imon=-2.59168E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9591E-1
os_ef2bup_imon=-5.32017E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.37311E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.28721E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.10734E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73231E1
iondef1_imon=1.08881E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.08834E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.25328E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.44046E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-1.08926E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47211E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.57107E-6
window_vset=0.0E0
window_vmon=1.74407E-1
window_imon=-1.06591E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86746E1
mask2_imon=-5.98832E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92691E3
multa_neg_imon=7.48144E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93682E3
defgrida_imon=6.52757E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.65664E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53342E0
defgridb_imon=6.00586E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33214E1
os_fil1_imon=9.42978E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07245E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61196E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30539E1
cs_fil1_imon=9.26267E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30105E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62601E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35848E-2
os_fil2_imon=-2.60038E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01198E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.62816E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.47063E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42165E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21837E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40059E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.6263E-1
res40_imon=-2.39707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.18276E-1	-7.99227E-1	-9.13124E0	-9.14187E0	5.03063E-3	9.31501E-2	2.72889E1	-3.26561E1	-3.26689E1	2.67818E1	1.19682E-7	2.52029E-3	2.52029E-3	6.29558E-3	2.99916E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09464E0	-8.18062E-1	-7.9875E-1	-9.13124E0	-9.14195E0	4.81606E-3	9.35793E-2	2.73045E1	-3.26738E1	-3.26187E1	2.67956E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.18253E-1	-7.98917E-1	-9.13117E0	-9.14173E0	4.88758E-3	9.34362E-2	2.7301E1	-3.26863E1	-3.26046E1	2.67972E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00302E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.18181E-1	-7.98917E-1	-9.13136E0	-9.14166E0	4.74453E-3	9.34839E-2	2.73446E1	-3.26756E1	-3.2629E1	2.68058E1	1.19941E-7	2.51709E-3	2.51709E-3	6.32328E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0941E0	-8.18086E-1	-7.98655E-1	-9.1311E0	-9.14149E0	4.72069E-3	9.34362E-2	2.73297E1	-3.26651E1	-3.26657E1	2.67763E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.18133E-1	-7.98774E-1	-9.13143E0	-9.14195E0	4.41074E-3	9.36747E-2	2.7285E1	-3.26484E1	-3.26585E1	2.68226E1	1.20414E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.17823E-1	-7.9844E-1	-9.13124E0	-9.1419E0	4.76837E-3	9.37462E-2	2.72913E1	-3.26699E1	-3.25816E1	2.67866E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9874E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.17871E-1	-7.98631E-1	-9.13112E0	-9.1418E0	5.05447E-3	9.36985E-2	2.72845E1	-3.26697E1	-3.2685E1	2.68192E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09426E0	-8.17943E-1	-7.98774E-1	-9.13143E0	-9.14156E0	5.24521E-3	9.36508E-2	2.72829E1	-3.26554E1	-3.25371E1	2.67998E1	1.19891E-7	2.51709E-3	2.51709E-3	6.32858E-3	3.03891E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.18062E-1	-7.98821E-1	-9.13148E0	-9.14164E0	4.93526E-3	9.36508E-2	2.73417E1	-3.26975E1	-3.26422E1	2.67963E1	1.2033E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09379E0	-8.18157E-1	-7.98678E-1	-9.13124E0	-9.14171E0	5.05447E-3	9.34362E-2	2.73063E1	-3.26524E1	-3.26344E1	2.68034E1	1.19978E-7	2.52027E-3	2.52027E-3	6.29624E-3	2.99083E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09333E0	-8.17943E-1	-7.98726E-1	-9.13107E0	-9.14171E0	4.8399E-3	9.33886E-2	2.73255E1	-3.26771E1	-3.27179E1	2.67984E1	1.20122E-7	2.5199E-3	2.5199E-3	6.34588E-3	2.98481E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.17776E-1	-7.98631E-1	-9.13122E0	-9.14147E0	4.79221E-3	9.35078E-2	2.73069E1	-3.2695E1	-3.26579E1	2.68208E1	1.19953E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.17943E-1	-7.98893E-1	-9.13117E0	-9.14171E0	4.72069E-3	9.35316E-2	2.73105E1	-3.26597E1	-3.27095E1	2.68112E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00302E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09387E0	-8.17966E-1	-7.98607E-1	-9.13141E0	-9.14168E0	4.91142E-3	9.36508E-2	2.72781E1	-3.26512E1	-3.25082E1	2.6804E1	1.19953E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.02253E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09387E0	-8.1811E-1	-7.98893E-1	-9.13122E0	-9.14185E0	4.64916E-3	9.36747E-2	2.73364E1	-3.26567E1	-3.2636E1	2.6807E1	1.19819E-7	2.5147E-3	2.5147E-3	6.28511E-3	3.0041E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09379E0	-8.18062E-1	-7.9906E-1	-9.13146E0	-9.1419E0	4.72069E-3	9.35078E-2	2.72818E1	-3.26603E1	-3.28029E1	2.68119E1	1.19991E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.01104E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.18038E-1	-7.9875E-1	-9.13117E0	-9.14173E0	5.17368E-3	9.37223E-2	2.72883E1	-3.26411E1	-3.26144E1	2.68366E1	1.20403E-7	2.52139E-3	2.52139E-3	6.3074E-3	3.00144E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.18086E-1	-7.98416E-1	-9.13112E0	-9.14176E0	5.07832E-3	9.39369E-2	2.72691E1	-3.26101E1	-3.25641E1	2.67902E1	1.20192E-7	2.51919E-3	2.51919E-3	6.30212E-3	3.02368E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.17895E-1	-7.9875E-1	-9.1315E0	-9.14202E0	5.22137E-3	9.35793E-2	2.73231E1	-3.26536E1	-3.27426E1	2.68076E1	1.19902E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.01995E-1
