[Scan]
initial_time=2016-01-28T18:23:21
final_time=2016-01-28T18:23:41
ip_count=19
run=1026
dataset=4
scan=253
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09394E0
qbias_imon=-1.08759E-4
ql1_vset=
ql1_vmon=-8.17609E-1
ql1_imon=1.40389E-8
ql2_vset=
ql2_vmon=-7.99012E-1
ql2_imon=2.03151E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=1.16602E-9
ql4_vset=
ql4_vmon=-9.14156E0
ql4_imon=-1.67215E-10
mult1=-9.9812E-9
mult2=-2.64276E-9
rf_tmon=-4.51242E-3
rf_agc=3.39164E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=1.67358E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66433E0
bslens_imon=2.46926E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20866E1
lens5a_imon=1.99389E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.0501E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53611E1
cs_ef1b_imon=3.09667E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02067E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05066E1
cs_ea1_imon=1.24261E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4014E0
lens1_imon=2.60264E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64627E1
os_ef1alow_imon=2.96755E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.39691E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84325E1
cs_ef1a_imon=3.00161E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.19904E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11267E1
os_restr1_imon=4.30103E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15576E1
os_ea1_imon=2.41026E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63741E1
os_ef1bup_imon=3.08656E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24489E0
cs_ionrep_imon=9.71161E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.9346E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01778E1
cs_anode1_imon=2.05511E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.15919E-8
tplens_vset=1.4E-1
tplens_vmon=1.60839E0
tplens_imon=-3.4621E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24992E1
iondef3_imon=1.49568E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26518E1
iondef2_imon=1.58581E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02916E2
lens6_imon=2.98324E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.98041E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=9.36193E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.17666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74464E1
cs_ef2b_imon=3.12848E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45698E0
os_ea2_imon=-5.76927E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00688E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71077E1
cs_ef2a_imon=3.19285E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06392E0
os_ef2alow_imon=-2.65291E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.41868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10924E1
os_restr2_imon=3.37699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30541E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0184E1
cs_anode2_imon=2.09403E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72955E1
iondef1_imon=1.0721E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68047E1
iondef4_imon=1.09065E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.22556E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.48978E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13638E0
cs_ionaccel_imon=-9.98689E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47271E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56218E1
einzel_imon=7.6579E-6
window_vset=0.0E0
window_vmon=1.8329E-1
window_imon=-1.09225E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39092E-4
mask2_vset=0.0E0
mask2_vmon=-1.86693E1
mask2_imon=-6.43144E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.53061E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=5.98769E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50683E0
defgridb_imon=6.00572E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33229E1
os_fil1_imon=9.43225E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07728E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61591E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30573E1
cs_fil1_imon=9.25466E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2789E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62301E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.6625E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05939E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.25497E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33685E-1
cs_fil2_imon=-2.37557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.32335E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21839E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.80394E-1
res40_imon=-2.50695E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09379E0	-8.1768E-1	-7.99012E-1	-9.13146E0	-9.14199E0	4.81606E-3	9.33886E-2	2.73275E1	-3.26573E1	-3.27151E1	2.67955E1	1.19965E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.01609E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.17847E-1	-7.99012E-1	-9.13134E0	-9.14221E0	5.03063E-3	9.32932E-2	2.72763E1	-3.26223E1	-3.25213E1	2.67889E1	1.19953E-7	2.52492E-3	2.52492E-3	6.30202E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.17609E-1	-7.98941E-1	-9.13126E0	-9.14202E0	5.10216E-3	9.35793E-2	2.7337E1	-3.26561E1	-3.26515E1	2.68024E1	1.201E-7	2.52066E-3	2.52066E-3	6.29035E-3	3.02154E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09426E0	-8.17823E-1	-7.98774E-1	-9.13126E0	-9.14207E0	5.34058E-3	9.34124E-2	2.73198E1	-3.26797E1	-3.27145E1	2.67665E1	1.19972E-7	2.51564E-3	2.51564E-3	6.31808E-3	3.00781E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09426E0	-8.17657E-1	-7.98917E-1	-9.13143E0	-9.14199E0	5.126E-3	9.35793E-2	2.73045E1	-3.26597E1	-3.25233E1	2.68022E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.17895E-1	-7.98631E-1	-9.13117E0	-9.14223E0	5.07832E-3	9.39369E-2	2.72943E1	-3.26567E1	-3.2638E1	2.68028E1	1.20158E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.02511E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.17657E-1	-7.98774E-1	-9.13115E0	-9.14226E0	5.03063E-3	9.40084E-2	2.73009E1	-3.26807E1	-3.27324E1	2.6807E1	1.20174E-7	2.51334E-3	2.51334E-3	6.3514E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.17776E-1	-7.98941E-1	-9.13093E0	-9.14192E0	5.03063E-3	9.377E-2	2.73015E1	-3.26687E1	-3.27414E1	2.6807E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.17633E-1	-7.98678E-1	-9.13117E0	-9.14197E0	5.00679E-3	9.3174E-2	2.73219E1	-3.26615E1	-3.27408E1	2.67866E1	1.19925E-7	2.51915E-3	2.51915E-3	6.32978E-3	3.00942E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.17919E-1	-7.98631E-1	-9.13095E0	-9.14216E0	5.03063E-3	9.35793E-2	2.72721E1	-3.26969E1	-3.26681E1	2.67794E1	1.20158E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99686E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.1768E-1	-7.98821E-1	-9.13112E0	-9.1423E0	4.91142E-3	9.34124E-2	2.73117E1	-3.26669E1	-3.27203E1	2.68166E1	1.19913E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09426E0	-8.18133E-1	-7.98798E-1	-9.13122E0	-9.14211E0	4.95911E-3	9.38416E-2	2.73328E1	-3.26714E1	-3.25747E1	2.6774E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.18014E-1	-7.9875E-1	-9.1311E0	-9.14209E0	4.8399E-3	9.3627E-2	2.72985E1	-3.26975E1	-3.2608E1	2.67992E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09325E0	-8.18062E-1	-7.98821E-1	-9.13131E0	-9.14218E0	4.98295E-3	9.36031E-2	2.73114E1	-3.26454E1	-3.25828E1	2.6792E1	1.20055E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.01995E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09348E0	-8.17847E-1	-7.98941E-1	-9.13129E0	-9.14214E0	4.91142E-3	9.35078E-2	2.72765E1	-3.26727E1	-3.27182E1	2.67972E1	1.20325E-7	2.51783E-3	2.51783E-3	6.31779E-3	3.01237E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.0934E0	-8.17823E-1	-7.98821E-1	-9.13124E0	-9.14195E0	5.14984E-3	9.33409E-2	2.72991E1	-3.26681E1	-3.2495E1	2.68028E1	1.20019E-7	2.52147E-3	2.52147E-3	6.3074E-3	3.02175E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09356E0	-8.17561E-1	-7.98845E-1	-9.13124E0	-9.14185E0	4.8399E-3	9.3627E-2	2.72967E1	-3.26591E1	-3.25539E1	2.68244E1	1.19809E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09379E0	-8.17442E-1	-7.98845E-1	-9.13124E0	-9.14187E0	5.07832E-3	9.37462E-2	2.72993E1	-3.26892E1	-3.26405E1	2.68267E1	1.20174E-7	2.51662E-3	2.51662E-3	6.28552E-3	2.9874E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09394E0	-8.17466E-1	-7.98965E-1	-9.13129E0	-9.14176E0	5.126E-3	9.36747E-2	2.73187E1	-3.2659E1	-3.27581E1	2.67974E1	1.20055E-7	2.51096E-3	2.51096E-3	6.31817E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09394E0	-8.17609E-1	-7.99012E-1	-9.13126E0	-9.14156E0	5.34058E-3	9.36985E-2	2.72955E1	-3.26518E1	-3.24992E1	2.68047E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.99941E-1
