[Scan]
initial_time=2016-01-28T18:24:17
final_time=2016-01-28T18:24:38
ip_count=19
run=1026
dataset=4
scan=255
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09333E0
qbias_imon=-1.08724E-4
ql1_vset=
ql1_vmon=-8.17561E-1
ql1_imon=1.39767E-8
ql2_vset=
ql2_vmon=-7.99203E-1
ql2_imon=1.95956E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=9.59182E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-1.52695E-10
mult1=-9.33101E-9
mult2=-2.74456E-9
rf_tmon=-4.46436E-3
rf_agc=3.30452E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=1.71016E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.73242E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=1.95279E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05237E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53502E1
cs_ef1b_imon=3.1074E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.01952E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04874E1
cs_ea1_imon=1.26677E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39239E0
lens1_imon=2.5017E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.96468E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03786E1
cs_ea2_imon=1.44593E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84917E1
cs_ef1a_imon=3.01009E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.20199E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14813E1
os_ea1_imon=2.41422E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26291E0
cs_ionrep_imon=9.76208E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93243E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=2.04999E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.16526E-8
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-1.26308E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.24902E1
iondef3_imon=1.47153E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.60023E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02879E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=4.00697E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31759E0
ionrepsh_imon=9.65393E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33465E1
lens5b_imon=2.1817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4714E0
os_ea2_imon=-6.70656E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00259E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05276E0
os_ef2alow_imon=-2.50418E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10925E1
os_restr2_imon=3.36688E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.30289E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.0936E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73195E1
iondef1_imon=1.06417E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.08053E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.23109E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.50381E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10972E0
cs_ionaccel_imon=-1.1635E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47176E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=1.66286E-1
window_imon=-9.36451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39113E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-6.51738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.59911E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=7.05476E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.05115E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41359E0
defgridb_imon=5.775E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3318E1
os_fil1_imon=9.42234E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0659E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6162E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30516E1
cs_fil1_imon=9.26394E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30043E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62062E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43484E-2
os_fil2_imon=-2.61792E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.20599E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.65996E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13622E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21626E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33112E-3
inlet_lpb_pmon=2.99073E-1
chamber_ion_pmon=1.20188E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40083E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.71906E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09317E0	-8.17537E-1	-7.99108E-1	-9.13129E0	-9.14178E0	5.03063E-3	9.34124E-2	2.73503E1	-3.26005E1	-3.27361E1	2.68076E1					
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09418E0	-8.17657E-1	-7.98607E-1	-9.13107E0	-9.14183E0	4.91142E-3	9.38416E-2	2.72947E1	-3.27105E1	-3.24987E1	2.68151E1	1.20192E-7	2.52236E-3	2.52236E-3	6.33388E-3	3.01104E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.18086E-1	-7.98893E-1	-9.13098E0	-9.14207E0	4.86374E-3	9.41277E-2	2.72939E1	-3.26489E1	-3.25566E1	2.68044E1	1.19883E-7	2.51611E-3	2.51611E-3	6.3245E-3	2.9971E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.09317E0	-8.1811E-1	-7.98941E-1	-9.13122E0	-9.14187E0	4.88758E-3	9.38416E-2	2.7328E1	-3.26425E1	-3.2759E1	2.68069E1	1.20003E-7	2.51623E-3	2.51623E-3	6.31744E-3	3.02209E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.1799E-1	-7.98869E-1	-9.131E0	-9.14176E0	5.07832E-3	9.36985E-2	2.73153E1	-3.26448E1	-3.25847E1	2.68102E1	1.20005E-7	2.5199E-3	2.5199E-3	6.32483E-3	3.00916E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09333E0	-8.17609E-1	-7.99084E-1	-9.13115E0	-9.1418E0	5.126E-3	9.37223E-2	2.73006E1	-3.26565E1	-3.25741E1	2.67991E1	1.20266E-7	2.51886E-3	2.51886E-3	6.3074E-3	3.00049E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09309E0	-8.17657E-1	-7.99012E-1	-9.13126E0	-9.1418E0	5.126E-3	9.377E-2	2.72609E1	-3.26639E1	-3.27152E1	2.68139E1	1.20471E-7	2.51675E-3	2.51675E-3	6.29558E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09356E0	-8.17561E-1	-7.98917E-1	-9.13134E0	-9.14173E0	4.88758E-3	9.39369E-2	2.7324E1	-3.26132E1	-3.26524E1	2.68179E1	1.1969E-7	2.5154E-3	2.5154E-3	6.3074E-3	3.02216E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09279E0	-8.1749E-1	-7.98631E-1	-9.13112E0	-9.14173E0	4.95911E-3	9.38177E-2	2.72709E1	-3.2644E1	-3.25258E1	2.68477E1	1.19862E-7	2.51829E-3	2.51829E-3	6.28931E-3	3.02042E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09279E0	-8.17895E-1	-7.98488E-1	-9.13115E0	-9.14187E0	4.81606E-3	9.36985E-2	2.73255E1	-3.26663E1	-3.26705E1	2.68394E1	1.20192E-7	2.51603E-3	2.51603E-3	6.31269E-3	3.01609E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0934E0	-8.18133E-1	-7.98583E-1	-9.13136E0	-9.1418E0	4.81606E-3	9.39131E-2	2.72997E1	-3.26639E1	-3.25689E1	2.68016E1	1.20084E-7	2.51136E-3	2.51136E-3	6.3074E-3	3.00676E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09309E0	-8.17704E-1	-7.98702E-1	-9.13105E0	-9.14161E0	4.98295E-3	9.39846E-2	2.73243E1	-3.26524E1	-3.25467E1	2.68036E1	1.19965E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09325E0	-8.17919E-1	-7.98988E-1	-9.13117E0	-9.14173E0	5.126E-3	9.36985E-2	2.73263E1	-3.26708E1	-3.27664E1	2.67998E1	1.19902E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.02769E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09394E0	-8.17537E-1	-7.98774E-1	-9.131E0	-9.14173E0	5.38826E-3	9.35316E-2	2.73016E1	-3.26743E1	-3.25604E1	2.67882E1	1.20055E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.00966E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09317E0	-8.178E-1	-7.98678E-1	-9.13129E0	-9.14199E0	5.10216E-3	9.35555E-2	2.72963E1	-3.26677E1	-3.26682E1	2.67661E1	1.19857E-7	2.51592E-3	2.51592E-3	6.3074E-3	2.98613E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09302E0	-8.17966E-1	-7.98798E-1	-9.13095E0	-9.14197E0	5.22137E-3	9.33886E-2	2.73306E1	-3.26705E1	-3.27604E1	2.68201E1	1.20002E-7	2.5199E-3	2.5199E-3	6.30271E-3	2.98592E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09302E0	-8.17943E-1	-7.98583E-1	-9.13115E0	-9.14216E0	5.38826E-3	9.38654E-2	2.72957E1	-3.26716E1	-3.25192E1	2.67766E1	1.20092E-7	2.52046E-3	2.52046E-3	6.32858E-3	3.00801E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09271E0	-8.17776E-1	-7.98941E-1	-9.13126E0	-9.14221E0	5.05447E-3	9.38654E-2	2.7322E1	-3.26578E1	-3.24463E1	2.68043E1	1.19893E-7	2.51741E-3	2.51741E-3	6.3149E-3	3.02416E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09325E0	-8.1811E-1	-7.98965E-1	-9.13129E0	-9.14195E0	5.14984E-3	9.34601E-2	2.73103E1	-3.26585E1	-3.24417E1	2.67583E1	1.20301E-7	2.51675E-3	2.51675E-3	6.32518E-3	2.99634E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09333E0	-8.17561E-1	-7.99203E-1	-9.13138E0	-9.14202E0	5.26905E-3	9.36031E-2	2.73195E1	-3.26609E1	-3.24902E1	2.68442E1	1.20188E-7	2.51203E-3	2.51203E-3	6.33112E-3	2.99073E-1
