[Scan]
initial_time=2016-01-28T18:26:09
final_time=2016-01-28T18:26:29
ip_count=19
run=1026
dataset=4
scan=259
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08712E-4
ql1_vset=
ql1_vmon=-8.1718E-1
ql1_imon=1.39023E-8
ql2_vset=
ql2_vmon=-7.98988E-1
ql2_imon=2.01756E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=8.03471E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-1.24311E-10
mult1=-1.08379E-8
mult2=-2.69013E-9
rf_tmon=-4.86807E-3
rf_agc=3.3273E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.68648E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66653E0
bslens_imon=2.52757E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19834E1
lens5a_imon=1.98034E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12465E2
lens4a_imon=2.04928E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53586E1
cs_ef1b_imon=3.08507E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02079E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05096E1
cs_ea1_imon=1.25396E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44317E0
lens1_imon=2.57338E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64558E1
os_ef1alow_imon=2.96156E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0383E1
cs_ea2_imon=1.43947E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84525E1
cs_ef1a_imon=3.01396E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.20231E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.29242E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1537E1
os_ea1_imon=2.43341E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63741E1
os_ef1bup_imon=3.08432E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2381E0
cs_ionrep_imon=9.63485E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93386E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0169E1
cs_anode1_imon=2.05099E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.16693E-8
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-3.92439E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26765E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26135E1
iondef2_imon=1.57153E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98453E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=3.96127E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25719E0
ionrepsh_imon=9.3104E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33315E1
lens5b_imon=2.18073E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74888E1
cs_ef2b_imon=3.13933E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48048E0
os_ea2_imon=-5.06949E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71139E1
cs_ef2a_imon=3.17302E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05144E0
os_ef2alow_imon=-2.69408E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82661E-1
os_ef2bup_imon=-5.27646E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.38522E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23014E2
cs_ionfoca_imon=6.29394E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.11012E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72864E1
iondef1_imon=1.09403E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68317E1
iondef4_imon=1.07568E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.25875E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.48084E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1027E0
cs_ionaccel_imon=-1.03986E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47301E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56517E1
einzel_imon=7.6579E-6
window_vset=0.0E0
window_vmon=2.01379E-1
window_imon=-1.03611E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39151E-4
mask2_vset=0.0E0
mask2_vmon=-1.86381E1
mask2_imon=-7.2548E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92681E3
multa_neg_imon=7.04691E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9374E3
defgrida_imon=6.69193E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50081E3
multb_neg_imon=7.31029E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38546E0
defgridb_imon=6.29114E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33201E1
os_fil1_imon=9.37704E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07167E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61932E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30592E1
cs_fil1_imon=9.2503E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.36623E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62557E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49477E-2
os_fil2_imon=-2.64379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.89721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.00461E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33551E-1
cs_fil2_imon=-1.8828E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12374E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2164E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01981E-1
chamber_ion_pmon=1.1993E-7
chamber_cvt_pmon=2.51679E-3
foreline_cvt_pmon=2.51679E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.52325E-1
res40_imon=-2.61174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.17823E-1	-7.99012E-1	-9.13124E0	-9.14185E0	4.93526E-3	9.39846E-2	2.72976E1	-3.26503E1	-3.25681E1	2.68099E1	1.19895E-7	2.51758E-3	2.51758E-3	6.33065E-3	3.01748E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.17633E-1	-7.98798E-1	-9.13141E0	-9.14159E0	4.93526E-3	9.38416E-2	2.72867E1	-3.26536E1	-3.26407E1	2.68225E1	1.1979E-7	2.51919E-3	2.51919E-3	6.3074E-3	3.00097E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.17966E-1	-7.9875E-1	-9.13134E0	-9.14173E0	4.74453E-3	9.34601E-2	2.73283E1	-3.26776E1	-3.26225E1	2.68059E1	1.19925E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.0041E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.17823E-1	-7.98631E-1	-9.13117E0	-9.14209E0	4.45843E-3	9.35555E-2	2.73204E1	-3.26697E1	-3.25711E1	2.67968E1	1.1979E-7	2.52025E-3	2.52025E-3	6.33388E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.17728E-1	-7.98655E-1	-9.13138E0	-9.14216E0	4.74453E-3	9.35078E-2	2.73165E1	-3.26585E1	-3.26092E1	2.68088E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.0148E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.1768E-1	-7.98488E-1	-9.13112E0	-9.14161E0	4.95911E-3	9.32217E-2	2.73087E1	-3.27089E1	-3.2605E1	2.68034E1	1.20122E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.17943E-1	-7.98893E-1	-9.1311E0	-9.14159E0	4.91142E-3	9.34601E-2	2.72809E1	-3.26826E1	-3.26484E1	2.68118E1	1.20069E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.17585E-1	-7.99084E-1	-9.13126E0	-9.14178E0	4.88758E-3	9.33647E-2	2.73466E1	-3.26098E1	-3.26567E1	2.68148E1	1.20209E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00197E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.17871E-1	-7.99084E-1	-9.1315E0	-9.14195E0	5.03063E-3	9.36031E-2	2.73405E1	-3.26368E1	-3.26657E1	2.68052E1	1.19861E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.01085E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.1749E-1	-7.98774E-1	-9.13155E0	-9.14221E0	5.07832E-3	9.37223E-2	2.73063E1	-3.26484E1	-3.26472E1	2.67926E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.02133E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.17633E-1	-7.99131E-1	-9.1315E0	-9.1418E0	5.05447E-3	9.36747E-2	2.73087E1	-3.27029E1	-3.26374E1	2.68124E1	1.19953E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.00966E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.1768E-1	-7.99036E-1	-9.13143E0	-9.1419E0	4.57764E-3	9.36031E-2	2.73255E1	-3.26368E1	-3.26615E1	2.68082E1	1.20226E-7	2.52209E-3	2.52209E-3	6.28552E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09394E0	-8.17776E-1	-7.99108E-1	-9.13098E0	-9.14173E0	4.76837E-3	9.39608E-2	2.72979E1	-3.26152E1	-3.25996E1	2.67938E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.1768E-1	-7.98988E-1	-9.13098E0	-9.1419E0	4.79221E-3	9.36985E-2	2.72847E1	-3.26735E1	-3.27786E1	2.6795E1	1.19705E-7	2.51552E-3	2.51552E-3	6.28552E-3	2.9926E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09379E0	-8.17466E-1	-7.98988E-1	-9.13103E0	-9.14176E0	5.126E-3	9.35793E-2	2.73069E1	-3.26464E1	-3.25785E1	2.67944E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.17442E-1	-7.99084E-1	-9.13124E0	-9.14185E0	4.93526E-3	9.35555E-2	2.73111E1	-3.26741E1	-3.26945E1	2.6819E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01347E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.17347E-1	-7.98941E-1	-9.13124E0	-9.14185E0	4.72069E-3	9.36985E-2	2.73021E1	-3.26663E1	-3.27239E1	2.68157E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09356E0	-8.1749E-1	-7.98845E-1	-9.13112E0	-9.14214E0	4.69685E-3	9.35078E-2	2.73293E1	-3.26844E1	-3.25759E1	2.68082E1	1.1983E-7	2.51647E-3	2.51647E-3	6.32644E-3	3.01025E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17275E-1	-7.99012E-1	-9.13088E0	-9.14168E0	4.33922E-3	9.39131E-2	2.72988E1	-3.26129E1	-3.26448E1	2.68255E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.1718E-1	-7.98988E-1	-9.13112E0	-9.14195E0	4.673E-3	9.38892E-2	2.72864E1	-3.26135E1	-3.26765E1	2.68317E1	1.1993E-7	2.51679E-3	2.51679E-3	6.3074E-3	3.01981E-1
