[Scan]
initial_time=2016-01-28T18:26:37
final_time=2016-01-28T18:26:56
ip_count=19
run=1026
dataset=4
scan=260
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.16941E-1
ql1_imon=1.38421E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=2.02656E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=7.82239E-10
ql4_vset=
ql4_vmon=-9.14164E0
ql4_imon=-1.34897E-10
mult1=-9.53482E-9
mult2=-2.78597E-9
rf_tmon=-4.68645E-3
rf_agc=3.31734E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.73531E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64999E0
bslens_imon=2.56193E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20108E1
lens5a_imon=1.96736E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05031E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.09779E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.0214E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04963E1
cs_ea1_imon=1.25625E-5
lens1_vset=-5.0E0
lens1_vmon=-5.37829E0
lens1_imon=2.43597E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64633E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0397E1
cs_ea2_imon=1.41046E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84656E1
cs_ef1a_imon=3.00498E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.20711E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11311E1
os_restr1_imon=4.29729E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15109E1
os_ea1_imon=2.43532E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63741E1
os_ef1bup_imon=3.0817E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2292E0
cs_ionrep_imon=9.76844E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02046E1
cs_anode1_imon=2.05548E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.176E-8
tplens_vset=1.4E-1
tplens_vmon=1.62489E0
tplens_imon=-3.0083E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26679E1
iondef3_imon=1.49481E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.56466E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98499E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.93411E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27182E0
ionrepsh_imon=9.19971E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33792E1
lens5b_imon=2.18989E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74526E1
cs_ef2b_imon=3.12324E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48748E0
os_ea2_imon=-5.83289E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.0042E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7132E1
cs_ef2a_imon=3.17788E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06329E0
os_ef2alow_imon=-2.63045E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82661E-1
os_ef2bup_imon=-5.44113E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10768E1
os_restr2_imon=3.38447E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.28974E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01728E1
cs_anode2_imon=2.10189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72791E1
iondef1_imon=1.09212E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68476E1
iondef4_imon=1.08615E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.20012E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.48478E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12702E0
cs_ionaccel_imon=-1.16336E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47185E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56162E1
einzel_imon=7.69532E-6
window_vset=0.0E0
window_vmon=1.84537E-1
window_imon=-1.09974E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82636E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86357E1
mask2_imon=-7.29223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=8.25691E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.72628E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=6.77591E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49055E0
defgridb_imon=6.1461E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33182E1
os_fil1_imon=9.40543E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06637E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61851E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3063E1
cs_fil1_imon=9.2521E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2895E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62595E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30359E-2
os_fil2_imon=-2.64379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82859E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.21888E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33954E-1
cs_fil2_imon=-2.7124E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07384E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21531E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=3.0201E-1
chamber_ion_pmon=1.20137E-7
chamber_cvt_pmon=2.51804E-3
foreline_cvt_pmon=2.51804E-3
chamber_tmon=1.40076E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.29246E-1
res40_imon=-2.4583E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	8.0E0	0.0E0	1.47E2	4.1E1	-2.09394E0	-8.17585E-1	-7.99084E-1	-9.13115E0	-9.14211E0	4.41074E-3	9.31263E-2	2.73387E1	-3.26897E1	-3.26225E1	2.68036E1	1.2006E-7	2.5199E-3	2.5199E-3	6.31321E-3	3.02303E-1
2.0E0	3.9E1	2.0E0	3.16E2	1.6E2	-2.0941E0	-8.17537E-1	-7.99274E-1	-9.13122E0	-9.14204E0	4.62532E-3	9.3627E-2	2.73129E1	-3.26627E1	-3.27023E1	2.68288E1	1.20055E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09379E0	-8.17585E-1	-7.98965E-1	-9.13131E0	-9.14209E0	4.81606E-3	9.38416E-2	2.72522E1	-3.26807E1	-3.25605E1	2.67914E1	1.19965E-7	2.52209E-3	2.52209E-3	6.29645E-3	2.99E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.1749E-1	-7.98917E-1	-9.13103E0	-9.14211E0	4.673E-3	9.37462E-2	2.72927E1	-3.26679E1	-3.26178E1	2.67962E1	1.20592E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00302E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.17561E-1	-7.98726E-1	-9.1311E0	-9.14178E0	4.69685E-3	9.37223E-2	2.73118E1	-3.2656E1	-3.26162E1	2.67745E1	1.20311E-7	2.51954E-3	2.51954E-3	6.29665E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.17513E-1	-7.99251E-1	-9.13122E0	-9.14195E0	4.79221E-3	9.38654E-2	2.73222E1	-3.26714E1	-3.26697E1	2.68076E1	1.20084E-7	2.51693E-3	2.51693E-3	6.31299E-3	2.99613E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.1749E-1	-7.98941E-1	-9.131E0	-9.14197E0	4.74453E-3	9.38892E-2	2.73177E1	-3.26735E1	-3.25858E1	2.68352E1	1.19953E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.03804E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.17418E-1	-7.98893E-1	-9.1311E0	-9.14216E0	5.03063E-3	9.37223E-2	2.72685E1	-3.26679E1	-3.2672E1	2.67873E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.17275E-1	-7.98941E-1	-9.13107E0	-9.1423E0	4.93526E-3	9.33409E-2	2.73081E1	-3.26837E1	-3.26416E1	2.68364E1	1.20004E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09449E0	-8.17323E-1	-7.99108E-1	-9.13112E0	-9.14183E0	4.93526E-3	9.36031E-2	2.73316E1	-3.26673E1	-3.26213E1	2.67902E1	1.20106E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.00966E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.17442E-1	-7.99012E-1	-9.13134E0	-9.14214E0	4.91142E-3	9.39369E-2	2.73129E1	-3.26675E1	-3.25533E1	2.67806E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01871E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09364E0	-8.17299E-1	-7.98798E-1	-9.13122E0	-9.14185E0	4.88758E-3	9.3627E-2	2.72968E1	-3.26484E1	-3.27033E1	2.68018E1	1.19965E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.02659E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.16989E-1	-7.98726E-1	-9.13141E0	-9.1419E0	4.79221E-3	9.37223E-2	2.73051E1	-3.26627E1	-3.26476E1	2.68118E1	1.19749E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01995E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09364E0	-8.17204E-1	-7.98988E-1	-9.13131E0	-9.14199E0	4.93526E-3	9.36747E-2	2.72979E1	-3.26543E1	-3.25617E1	2.67546E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.03185E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.17394E-1	-7.98965E-1	-9.131E0	-9.14199E0	4.98295E-3	9.38177E-2	2.73159E1	-3.26645E1	-3.26122E1	2.67625E1	1.20017E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.03449E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.1706E-1	-7.98869E-1	-9.13117E0	-9.14207E0	4.76837E-3	9.39369E-2	2.72859E1	-3.26807E1	-3.2736E1	2.67717E1	1.19861E-7	2.51116E-3	2.51116E-3	6.30192E-3	3.01085E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.17394E-1	-7.98726E-1	-9.13141E0	-9.14178E0	4.79221E-3	9.39131E-2	2.73546E1	-3.26703E1	-3.25965E1	2.68076E1	1.19705E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0941E0	-8.17323E-1	-7.98726E-1	-9.13119E0	-9.14178E0	4.81606E-3	9.39846E-2	2.7156E1	-3.25423E1	-3.27877E1	2.68209E1	1.20004E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00453E-1
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17323E-1	-7.98726E-1	-9.1315E0	-9.14185E0	4.55379E-3	9.3627E-2	2.72898E1	-3.26707E1	-3.2678E1	2.678E1	1.20226E-7	2.51369E-3	2.51369E-3	6.3126E-3	3.00989E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.16941E-1	-7.98631E-1	-9.13131E0	-9.14164E0	4.74453E-3	9.32693E-2	2.72791E1	-3.26579E1	-3.26679E1	2.68476E1	1.20137E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.0201E-1
