[Scan]
initial_time=2016-01-28T18:27:03
final_time=2016-01-28T18:27:23
ip_count=19
run=1026
dataset=4
scan=261
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08753E-4
ql1_vset=
ql1_vmon=-8.17442E-1
ql1_imon=1.38592E-8
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=1.9944E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=6.68931E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.14298E-10
mult1=-9.72998E-9
mult2=-2.73478E-9
rf_tmon=-4.46568E-3
rf_agc=3.32525E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.72418E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6688E0
bslens_imon=2.65208E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20725E1
lens5a_imon=1.9925E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05044E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53695E1
cs_ef1b_imon=3.09097E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.02248E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04998E1
cs_ea1_imon=1.23855E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36947E0
lens1_imon=2.68298E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64478E1
os_ef1alow_imon=2.97389E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03531E1
cs_ea2_imon=1.41127E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85597E1
cs_ef1a_imon=3.01061E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.20427E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11134E1
os_restr1_imon=4.30825E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15289E1
os_ea1_imon=2.4356E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63839E1
os_ef1bup_imon=3.07465E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22789E0
cs_ionrep_imon=9.67556E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93327E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01585E1
cs_anode1_imon=2.03315E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.1769E-8
tplens_vset=1.4E-1
tplens_vmon=1.61105E0
tplens_imon=-2.71021E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27316E1
iondef3_imon=1.49563E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26739E1
iondef2_imon=1.57412E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=4.00403E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2866E0
ionrepsh_imon=9.35729E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33425E1
lens5b_imon=2.17851E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74517E1
cs_ef2b_imon=3.1164E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49929E0
os_ea2_imon=-6.81986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00465E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71043E1
cs_ef2a_imon=3.1911E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0645E0
os_ef2alow_imon=-2.6738E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99865E-1
os_ef2bup_imon=-5.44234E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11306E1
os_restr2_imon=3.39356E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.2999E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01763E1
cs_anode2_imon=2.084E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73161E1
iondef1_imon=1.08652E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68379E1
iondef4_imon=1.08142E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.22624E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.49899E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14531E0
cs_ionaccel_imon=-9.28546E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47185E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56023E1
einzel_imon=7.54973E-6
window_vset=0.0E0
window_vmon=1.87193E-1
window_imon=-1.12944E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86313E1
mask2_imon=-7.02542E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=8.02243E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.66594E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=6.65049E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39426E0
defgridb_imon=6.11284E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33213E1
os_fil1_imon=9.42875E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06382E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6165E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30654E1
cs_fil1_imon=9.23482E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.38051E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62557E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44405E-2
os_fil2_imon=-2.73514E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07267E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.39013E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36531E-1
cs_fil2_imon=-2.51542E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.45534E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21878E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31146E-3
inlet_lpb_pmon=3.01706E-1
chamber_ion_pmon=1.20368E-7
chamber_cvt_pmon=2.52125E-3
foreline_cvt_pmon=2.52125E-3
chamber_tmon=1.40081E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.91341E-1
res40_imon=-2.62043E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=482
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.1718E-1	-7.99036E-1	-9.13107E0	-9.14166E0	5.24521E-3	9.33409E-2	2.73533E1	-3.26576E1	-3.26194E1	2.67806E1	1.20002E-7	2.51802E-3	2.51802E-3	6.34037E-3	3.01497E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.17132E-1	-7.9906E-1	-9.13084E0	-9.14187E0	4.86374E-3	9.32693E-2	2.72892E1	-3.26554E1	-3.26272E1	2.68352E1	1.19865E-7	2.52445E-3	2.52445E-3	6.3074E-3	2.9962E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.17037E-1	-7.99108E-1	-9.13093E0	-9.14199E0	4.93526E-3	9.3627E-2	2.72827E1	-3.2659E1	-3.26472E1	2.68154E1	1.2067E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00144E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09433E0	-8.16989E-1	-7.98655E-1	-9.13112E0	-9.14197E0	4.95911E-3	9.36747E-2	2.72937E1	-3.26675E1	-3.26567E1	2.67878E1	1.20209E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.16989E-1	-7.98655E-1	-9.13105E0	-9.14216E0	4.93526E-3	9.34601E-2	2.73093E1	-3.26176E1	-3.26014E1	2.67782E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.02511E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.17084E-1	-7.98821E-1	-9.13086E0	-9.14187E0	4.93526E-3	9.34601E-2	2.73352E1	-3.26266E1	-3.26531E1	2.67891E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.1718E-1	-7.98893E-1	-9.13091E0	-9.1418E0	5.07832E-3	9.35555E-2	2.72859E1	-3.26627E1	-3.26296E1	2.68124E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17323E-1	-7.98583E-1	-9.13098E0	-9.1418E0	5.31673E-3	9.38892E-2	2.73111E1	-3.2641E1	-3.26464E1	2.68274E1	1.20158E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.98665E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.17299E-1	-7.98821E-1	-9.13117E0	-9.14178E0	5.14984E-3	9.36508E-2	2.73261E1	-3.26536E1	-3.26236E1	2.6804E1	1.19766E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.99613E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.17251E-1	-7.9875E-1	-9.13107E0	-9.14192E0	4.98295E-3	9.3627E-2	2.73051E1	-3.26703E1	-3.26431E1	2.68587E1	1.19913E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9926E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09487E0	-8.17323E-1	-7.98678E-1	-9.13115E0	-9.14218E0	4.98295E-3	9.36508E-2	2.72775E1	-3.26771E1	-3.26512E1	2.68004E1	1.20363E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.00453E-1
1.5E1	2.0E0	0.0E0	6.06E2	4.11E2	-2.09464E0	-8.17251E-1	-7.99036E-1	-9.1311E0	-9.14247E0	4.76837E-3	9.38654E-2	2.73216E1	-3.26555E1	-3.26124E1	2.67794E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.02511E-1
1.6E1	0.0E0	1.0E0	6.47E2	4.41E2	-2.0941E0	-8.17347E-1	-7.99298E-1	-9.13122E0	-9.14207E0	5.07832E-3	9.36031E-2	2.72823E1	-3.265E1	-3.26993E1	2.67897E1	1.20017E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.03712E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.17204E-1	-7.98869E-1	-9.13126E0	-9.14209E0	4.72069E-3	9.37939E-2	2.73351E1	-3.26801E1	-3.25924E1	2.68052E1	1.20435E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.03449E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09487E0	-8.17323E-1	-7.98869E-1	-9.13122E0	-9.14192E0	4.86374E-3	9.35793E-2	2.72871E1	-3.266E1	-3.26649E1	2.68057E1	1.19953E-7	2.51739E-3	2.51739E-3	6.34518E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.17251E-1	-7.98821E-1	-9.13126E0	-9.14228E0	5.05447E-3	9.36747E-2	2.72849E1	-3.26578E1	-3.25183E1	2.68058E1	1.19991E-7	2.51682E-3	2.51682E-3	6.32129E-3	3.00285E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.17394E-1	-7.99012E-1	-9.13136E0	-9.14195E0	4.88758E-3	9.36031E-2	2.73228E1	-3.26708E1	-3.25977E1	2.68202E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09464E0	-8.17037E-1	-7.98965E-1	-9.13126E0	-9.14202E0	4.95911E-3	9.377E-2	2.74078E1	-3.27504E1	-3.25359E1	2.6795E1	1.20122E-7	2.51225E-3	2.51225E-3	6.29098E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.17275E-1	-7.99203E-1	-9.13129E0	-9.14197E0	5.05447E-3	9.35555E-2	2.73006E1	-3.26832E1	-3.26057E1	2.68028E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02659E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.17442E-1	-7.99036E-1	-9.13134E0	-9.14192E0	4.88758E-3	9.3627E-2	2.73161E1	-3.26739E1	-3.27316E1	2.68379E1	1.20368E-7	2.52125E-3	2.52125E-3	6.31146E-3	3.01706E-1
