[Scan]
initial_time=2016-01-28T18:28:25
final_time=2016-01-28T18:28:44
ip_count=19
run=1026
dataset=4
scan=264
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.17323E-1
ql1_imon=1.38312E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=2.02165E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=6.26874E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.10364E-10
mult1=-1.02727E-8
mult2=-2.85005E-9
rf_tmon=-4.65016E-3
rf_agc=3.36222E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.72266E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64321E0
bslens_imon=2.49725E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05196E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53664E1
cs_ef1b_imon=3.09442E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02298E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04953E1
cs_ea1_imon=1.23616E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44217E0
lens1_imon=2.74854E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03737E1
cs_ea2_imon=1.41667E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.01189E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.21014E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=4.28878E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15382E1
os_ea1_imon=2.41903E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26921E0
cs_ionrep_imon=9.52651E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=2.02873E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20468E0
olens4_imon=3.17139E-8
tplens_vset=1.4E-1
tplens_vmon=1.6668E0
tplens_imon=-2.35178E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26921E1
iondef3_imon=1.47542E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26848E1
iondef2_imon=1.57346E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.9831E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.9753E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=9.33538E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33846E1
lens5b_imon=2.17906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.13623E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49455E0
os_ea2_imon=-7.27156E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00591E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89015E-1
os_ef2bup_imon=-5.47745E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=3.38995E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.28725E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02031E1
cs_anode2_imon=2.08675E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72622E1
iondef1_imon=1.07618E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67539E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.23757E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.50794E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10732E0
cs_ionaccel_imon=-1.04097E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47269E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=1.99923E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92672E3
multa_neg_imon=7.24005E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.27733E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.09848E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31992E0
defgridb_imon=6.15699E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3319E1
os_fil1_imon=9.38546E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06993E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61712E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30518E1
cs_fil1_imon=9.25626E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29863E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62049E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17994E-2
os_fil2_imon=-2.72003E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.845E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.13409E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33795E-1
cs_fil2_imon=-2.46174E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.63806E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21639E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.58691E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=229
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.17132E-1	-7.98702E-1	-9.13155E0	-9.14204E0	4.88758E-3	9.35793E-2	2.72837E1	-3.26554E1	-3.2544E1	2.67932E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.1706E-1	-7.98774E-1	-9.13129E0	-9.14214E0	4.91142E-3	9.377E-2	2.73345E1	-3.26903E1	-3.27408E1	2.68058E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.03185E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.17227E-1	-7.98631E-1	-9.13141E0	-9.14209E0	4.8399E-3	9.34362E-2	2.73257E1	-3.2636E1	-3.25422E1	2.68128E1	1.20043E-7	2.51716E-3	2.51716E-3	6.32112E-3	3.00954E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.17394E-1	-7.9875E-1	-9.13136E0	-9.14202E0	5.24521E-3	9.36747E-2	2.73183E1	-3.2647E1	-3.26392E1	2.68138E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.1749E-1	-7.98607E-1	-9.13136E0	-9.14183E0	4.88758E-3	9.377E-2	2.72947E1	-3.26713E1	-3.25574E1	2.68082E1	1.20069E-7	2.51116E-3	2.51116E-3	6.31288E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.17561E-1	-7.98702E-1	-9.13136E0	-9.14207E0	5.03063E-3	9.38416E-2	2.72957E1	-3.26549E1	-3.27033E1	2.68354E1	1.19809E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0941E0	-8.17537E-1	-7.98821E-1	-9.13112E0	-9.14178E0	4.95911E-3	9.36747E-2	2.72931E1	-3.26795E1	-3.25281E1	2.678E1	1.2033E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.17418E-1	-7.98702E-1	-9.13115E0	-9.14195E0	5.17368E-3	9.35316E-2	2.73297E1	-3.26735E1	-3.26765E1	2.68088E1	1.20414E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.02769E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09387E0	-8.1737E-1	-7.98702E-1	-9.13119E0	-9.14185E0	4.93526E-3	9.37223E-2	2.72591E1	-3.26272E1	-3.26201E1	2.67986E1	1.20278E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.03185E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09418E0	-8.178E-1	-7.98798E-1	-9.13115E0	-9.14211E0	4.81606E-3	9.36508E-2	2.72642E1	-3.26278E1	-3.25978E1	2.68076E1	1.19757E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.01085E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.17394E-1	-7.98821E-1	-9.13165E0	-9.14204E0	4.74453E-3	9.377E-2	2.73069E1	-3.2659E1	-3.26065E1	2.67806E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.17227E-1	-7.98726E-1	-9.13119E0	-9.14209E0	4.76837E-3	9.36031E-2	2.73363E1	-3.26669E1	-3.2596E1	2.68099E1	1.20174E-7	2.52538E-3	2.52538E-3	6.30192E-3	3.03449E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09533E0	-8.17394E-1	-7.98655E-1	-9.13155E0	-9.14185E0	4.55379E-3	9.36031E-2	2.72823E1	-3.26482E1	-3.26074E1	2.68028E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00563E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.17609E-1	-7.98583E-1	-9.13157E0	-9.14164E0	5.05447E-3	9.33886E-2	2.73104E1	-3.26343E1	-3.27039E1	2.68124E1	1.20106E-7	2.52707E-3	2.52707E-3	6.31278E-3	3.0071E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.17251E-1	-7.98583E-1	-9.13105E0	-9.14187E0	4.74453E-3	9.35793E-2	2.73069E1	-3.26488E1	-3.26068E1	2.67992E1	1.20174E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.17347E-1	-7.98798E-1	-9.13084E0	-9.14197E0	5.17368E-3	9.37223E-2	2.73201E1	-3.26615E1	-3.26356E1	2.681E1	1.2033E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00824E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09402E0	-8.17275E-1	-7.9844E-1	-9.13126E0	-9.14211E0	5.07832E-3	9.39131E-2	2.72955E1	-3.26879E1	-3.26128E1	2.67938E1	1.19861E-7	2.5188E-3	2.5188E-3	6.34037E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.17251E-1	-7.98607E-1	-9.13122E0	-9.14187E0	5.17368E-3	9.37462E-2	2.71975E1	-3.2622E1	-3.28093E1	2.6814E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.17347E-1	-7.98416E-1	-9.13112E0	-9.14195E0	5.03063E-3	9.38416E-2	2.73327E1	-3.26765E1	-3.25377E1	2.67931E1	1.20092E-7	2.52131E-3	2.52131E-3	6.29157E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.17323E-1	-7.98559E-1	-9.13112E0	-9.14192E0	4.86374E-3	9.38177E-2	2.72622E1	-3.26848E1	-3.26921E1	2.67539E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.98665E-1
