[Scan]
initial_time=2016-01-28T18:28:52
final_time=2016-01-28T18:29:12
ip_count=19
run=1026
dataset=4
scan=265
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08821E-4
ql1_vset=
ql1_vmon=-8.16965E-1
ql1_imon=1.38581E-8
ql2_vset=
ql2_vmon=-7.99108E-1
ql2_imon=1.99485E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=5.78558E-10
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=-1.23107E-10
mult1=-9.77651E-9
mult2=-2.73059E-9
rf_tmon=-5.10724E-3
rf_agc=3.2889E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=1.72783E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.61759E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.9628E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12499E2
lens4a_imon=2.0521E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53557E1
cs_ef1b_imon=3.1045E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0458E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05112E1
cs_ea1_imon=1.22943E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39203E0
lens1_imon=2.745E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64724E1
os_ef1alow_imon=2.96827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03537E1
cs_ea2_imon=1.41454E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.00546E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.20502E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11326E1
os_restr1_imon=4.29408E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14975E1
os_ea1_imon=2.44239E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63589E1
os_ef1bup_imon=3.08608E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22791E0
cs_ionrep_imon=9.62208E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93512E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01937E1
cs_anode1_imon=2.04976E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=3.17492E-8
tplens_vset=1.4E-1
tplens_vmon=1.63081E0
tplens_imon=-4.19227E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25221E1
iondef3_imon=1.47436E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.5901E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02886E2
lens6_imon=2.9831E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.98611E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29221E0
ionrepsh_imon=9.42033E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33315E1
lens5b_imon=2.17021E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7464E1
cs_ef2b_imon=3.12049E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48393E0
os_ea2_imon=-6.3867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06056E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71217E1
cs_ef2a_imon=3.17644E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0563E0
os_ef2alow_imon=-2.57458E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9028E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10886E1
os_restr2_imon=3.38808E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.27344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01844E1
cs_anode2_imon=2.09911E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72973E1
iondef1_imon=1.09069E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67701E1
iondef4_imon=1.09129E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.25765E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.50055E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14057E0
cs_ionaccel_imon=-9.62065E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47216E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56272E1
einzel_imon=7.70174E-6
window_vset=0.0E0
window_vmon=1.84092E-1
window_imon=-1.05937E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39077E-4
mask2_vset=0.0E0
mask2_vmon=-1.86541E1
mask2_imon=-7.74401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.24359E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.61358E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.12679E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.0225E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3319E1
os_fil1_imon=9.36408E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07352E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61568E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30574E1
cs_fil1_imon=9.25866E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33954E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62333E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35722E-2
os_fil2_imon=-2.6576E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93552E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.18724E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35395E-1
cs_fil2_imon=-2.66339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21666E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00432E-1
chamber_ion_pmon=1.20252E-7
chamber_cvt_pmon=2.51607E-3
foreline_cvt_pmon=2.51607E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.14231E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.16941E-1	-7.98416E-1	-9.13146E0	-9.1419E0	4.86374E-3	9.34362E-2	2.72886E1	-3.26626E1	-3.26207E1	2.68022E1	1.198E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9841E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16989E-1	-7.98535E-1	-9.13134E0	-9.1418E0	4.79221E-3	9.36508E-2	2.7318E1	-3.26976E1	-3.26536E1	2.6798E1	1.20158E-7	2.51525E-3	2.51525E-3	6.32356E-3	2.99175E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09595E0	-8.1706E-1	-7.98631E-1	-9.13129E0	-9.14192E0	4.8399E-3	9.34839E-2	2.73149E1	-3.26677E1	-3.26405E1	2.68094E1	1.19925E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.01475E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.1706E-1	-7.98631E-1	-9.13115E0	-9.14192E0	4.48227E-3	9.34124E-2	2.72886E1	-3.2659E1	-3.2636E1	2.68346E1	1.20293E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.1718E-1	-7.98702E-1	-9.131E0	-9.14209E0	4.93526E-3	9.35555E-2	2.72827E1	-3.26472E1	-3.26301E1	2.67998E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.1718E-1	-7.98631E-1	-9.13129E0	-9.14168E0	4.72069E-3	9.37939E-2	2.73087E1	-3.26597E1	-3.25816E1	2.6795E1	1.20055E-7	2.52169E-3	2.52169E-3	6.29128E-3	3.02253E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.17227E-1	-7.98702E-1	-9.13095E0	-9.14166E0	4.69685E-3	9.39369E-2	2.73015E1	-3.26609E1	-3.2635E1	2.68134E1	1.20017E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.17156E-1	-7.98774E-1	-9.13119E0	-9.14178E0	5.05447E-3	9.35078E-2	2.72967E1	-3.26615E1	-3.26633E1	2.68028E1	1.19851E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02253E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.17418E-1	-7.98988E-1	-9.13112E0	-9.14197E0	5.03063E-3	9.36985E-2	2.72856E1	-3.26472E1	-3.2554E1	2.68046E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.17394E-1	-7.98893E-1	-9.13115E0	-9.1418E0	4.55379E-3	9.36031E-2	2.73002E1	-3.26529E1	-3.26456E1	2.6807E1	1.20017E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01347E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09426E0	-8.17251E-1	-7.98941E-1	-9.131E0	-9.14199E0	4.55379E-3	9.35793E-2	2.73175E1	-3.26644E1	-3.26266E1	2.68046E1	1.20122E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.9874E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.17394E-1	-7.98774E-1	-9.13098E0	-9.14192E0	4.74453E-3	9.35555E-2	2.73347E1	-3.2667E1	-3.26226E1	2.67965E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09387E0	-8.1718E-1	-7.99084E-1	-9.1311E0	-9.14199E0	4.98295E-3	9.37462E-2	2.73274E1	-3.2668E1	-3.25077E1	2.67738E1	1.20113E-7	2.52058E-3	2.52058E-3	6.3074E-3	3.00392E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09441E0	-8.17013E-1	-7.99084E-1	-9.13115E0	-9.1419E0	4.91142E-3	9.38416E-2	2.72929E1	-3.26395E1	-3.2716E1	2.68226E1	1.1995E-7	2.51874E-3	2.51874E-3	6.31321E-3	3.00639E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09472E0	-8.16989E-1	-7.98607E-1	-9.13119E0	-9.14187E0	4.91142E-3	9.3627E-2	2.72839E1	-3.2672E1	-3.26136E1	2.68196E1	1.20137E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.01742E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.17251E-1	-7.99108E-1	-9.1311E0	-9.14202E0	4.8399E-3	9.36985E-2	2.73233E1	-3.26516E1	-3.25668E1	2.6792E1	1.20074E-7	2.51671E-3	2.51671E-3	6.29941E-3	3.00654E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.17442E-1	-7.9875E-1	-9.131E0	-9.14221E0	4.8399E-3	9.37939E-2	2.73286E1	-3.26616E1	-3.27017E1	2.67826E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.1749E-1	-7.98869E-1	-9.13136E0	-9.14187E0	4.86374E-3	9.377E-2	2.72757E1	-3.27173E1	-3.25966E1	2.67854E1	1.19674E-7	2.51065E-3	2.51065E-3	6.31321E-3	3.0147E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.17585E-1	-7.99131E-1	-9.13143E0	-9.14228E0	4.45843E-3	9.37939E-2	2.72703E1	-3.26638E1	-3.27228E1	2.68047E1	1.20158E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.03027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16965E-1	-7.99108E-1	-9.13146E0	-9.14207E0	4.69685E-3	9.3317E-2	2.72973E1	-3.26675E1	-3.25221E1	2.67701E1	1.20252E-7	2.51607E-3	2.51607E-3	6.3074E-3	3.00432E-1
