[Scan]
initial_time=2016-01-28T18:29:19
final_time=2016-01-28T18:29:39
ip_count=19
run=1026
dataset=4
scan=266
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.16798E-1
ql1_imon=1.38927E-8
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=1.99878E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=6.00004E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=-1.37937E-10
mult1=-9.46345E-9
mult2=-2.75853E-9
rf_tmon=-4.4944E-3
rf_agc=3.41086E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=1.68641E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64498E0
bslens_imon=2.45831E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20131E1
lens5a_imon=1.9851E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05082E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.09581E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.02149E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05141E1
cs_ea1_imon=1.24217E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39203E0
lens1_imon=2.55742E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.97592E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04021E1
cs_ea2_imon=1.39543E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84035E1
cs_ef1a_imon=2.99677E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.20962E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.29756E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15105E1
os_ea1_imon=2.42151E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63572E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26272E0
cs_ionrep_imon=9.615E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.9331E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.04941E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.17499E-8
tplens_vset=1.4E-1
tplens_vmon=1.64556E0
tplens_imon=-3.27202E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25966E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26675E1
iondef2_imon=1.57948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.9847E-4
ql6_vset=1.0E-1
ql6_vmon=9.30786E-2
ql6_imon=3.98487E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24974E0
ionrepsh_imon=9.29291E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33941E1
lens5b_imon=2.19144E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74455E1
cs_ef2b_imon=3.12883E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47685E0
os_ea2_imon=-7.20077E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71345E1
cs_ef2a_imon=3.17296E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06846E0
os_ef2alow_imon=-2.64409E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98968E-1
os_ef2bup_imon=-5.39996E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1084E1
os_restr2_imon=3.37766E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.31733E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02064E1
cs_anode2_imon=2.10154E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72684E1
iondef1_imon=1.08396E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67614E1
iondef4_imon=1.08573E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.25961E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.52205E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1035E0
cs_ionaccel_imon=-1.06632E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47118E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56121E1
einzel_imon=7.76082E-6
window_vset=0.0E0
window_vmon=1.79458E-1
window_imon=-1.11845E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39185E-4
mask2_vset=0.0E0
mask2_vmon=-1.86715E1
mask2_imon=-6.63193E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.42056E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.46138E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.39933E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42032E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33204E1
os_fil1_imon=9.45247E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07503E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61938E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30549E1
cs_fil1_imon=9.26341E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30073E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62992E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49651E-2
os_fil2_imon=-2.72131E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90077E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.31253E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33897E-1
cs_fil2_imon=-2.5823E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11884E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21572E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32858E-3
inlet_lpb_pmon=2.98342E-1
chamber_ion_pmon=1.19891E-7
chamber_cvt_pmon=2.51287E-3
foreline_cvt_pmon=2.51287E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.82954E-1
res40_imon=-2.50508E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16965E-1	-7.98631E-1	-9.13107E0	-9.14223E0	4.76837E-3	9.36985E-2	2.73198E1	-3.26791E1	-3.26679E1	2.6795E1	1.19891E-7	2.52659E-3	2.52659E-3	6.31798E-3	2.99845E-1
2.0E0	3.2E1	1.0E0	3.16E2	1.6E2	-2.09526E0	-8.17132E-1	-7.9844E-1	-9.1311E0	-9.14202E0	4.45843E-3	9.37223E-2	2.72947E1	-3.26327E1	-3.25746E1	2.67794E1	1.19705E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01085E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.16941E-1	-7.98845E-1	-9.13129E0	-9.14168E0	4.72069E-3	9.35793E-2	2.73329E1	-3.26758E1	-3.25043E1	2.68296E1	1.19927E-7	2.51793E-3	2.51793E-3	6.32356E-3	3.0071E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.17275E-1	-7.98321E-1	-9.13122E0	-9.1419E0	4.76837E-3	9.39369E-2	2.72775E1	-3.26554E1	-3.25515E1	2.68346E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09634E0	-8.17227E-1	-7.98678E-1	-9.1311E0	-9.14195E0	5.03063E-3	9.38177E-2	2.73051E1	-3.27011E1	-3.26777E1	2.68213E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.1656E-1	-7.98583E-1	-9.13131E0	-9.14168E0	5.14984E-3	9.36747E-2	2.72775E1	-3.26567E1	-3.26585E1	2.67949E1	1.19978E-7	2.51581E-3	2.51581E-3	6.33538E-3	2.99348E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.16965E-1	-7.98678E-1	-9.13131E0	-9.14192E0	4.81606E-3	9.37223E-2	2.72821E1	-3.26508E1	-3.2629E1	2.67998E1	1.20363E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.17037E-1	-7.98345E-1	-9.13148E0	-9.14211E0	4.64916E-3	9.36747E-2	2.73549E1	-3.26312E1	-3.25379E1	2.6814E1	1.19871E-7	2.51937E-3	2.51937E-3	6.32075E-3	3.02055E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.17275E-1	-7.98512E-1	-9.13155E0	-9.14207E0	4.43459E-3	9.37939E-2	2.72845E1	-3.26741E1	-3.27645E1	2.68026E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.17227E-1	-7.9875E-1	-9.13112E0	-9.14209E0	4.50611E-3	9.37939E-2	2.72732E1	-3.26425E1	-3.25765E1	2.68151E1	1.19937E-7	2.51498E-3	2.51498E-3	6.3131E-3	3.02426E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.1687E-1	-7.98821E-1	-9.13148E0	-9.14216E0	4.79221E-3	9.34839E-2	2.73045E1	-3.26536E1	-3.26392E1	2.68292E1	1.19902E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.1706E-1	-7.98702E-1	-9.13134E0	-9.14207E0	4.52995E-3	9.34839E-2	2.72841E1	-3.26591E1	-3.26765E1	2.68143E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16989E-1	-7.9875E-1	-9.13136E0	-9.14207E0	4.48227E-3	9.39369E-2	2.73345E1	-3.26753E1	-3.2587E1	2.67899E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.17108E-1	-7.99012E-1	-9.13134E0	-9.14221E0	4.45843E-3	9.35555E-2	2.7311E1	-3.26225E1	-3.26183E1	2.67956E1					
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.17204E-1	-7.98821E-1	-9.13126E0	-9.14237E0	4.76837E-3	9.39131E-2	2.73161E1	-3.26428E1	-3.27025E1	2.68221E1	1.20174E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.17251E-1	-7.98869E-1	-9.13143E0	-9.14245E0	4.50611E-3	9.3627E-2	2.73182E1	-3.26697E1	-3.25231E1	2.67914E1	1.19991E-7	2.52131E-3	2.52131E-3	6.32328E-3	3.00852E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09387E0	-8.17156E-1	-7.98798E-1	-9.13136E0	-9.14218E0	4.55379E-3	9.39608E-2	2.73081E1	-3.26747E1	-3.27017E1	2.67878E1	1.2035E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00676E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.16941E-1	-7.98965E-1	-9.13124E0	-9.14214E0	4.50611E-3	9.31978E-2	2.7337E1	-3.26549E1	-3.2462E1	2.68099E1	1.20122E-7	2.5199E-3	2.5199E-3	6.27461E-3	3.03185E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16941E-1	-7.99203E-1	-9.13143E0	-9.14211E0	4.57764E-3	9.3317E-2	2.73312E1	-3.26654E1	-3.27036E1	2.67978E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.98665E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.16798E-1	-7.98702E-1	-9.13138E0	-9.14216E0	4.55379E-3	9.30786E-2	2.72684E1	-3.26675E1	-3.25966E1	2.67614E1	1.19891E-7	2.51287E-3	2.51287E-3	6.32858E-3	2.98342E-1
