[Scan]
initial_time=2016-01-28T18:30:17
final_time=2016-01-28T18:30:39
ip_count=19
run=1026
dataset=4
scan=268
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=1.38626E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=2.0246E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=5.35822E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-1.50466E-10
mult1=-9.60794E-9
mult2=-2.65873E-9
rf_tmon=-4.13991E-3
rf_agc=3.34537E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.70714E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61687E0
bslens_imon=2.37913E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19538E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53638E1
cs_ef1b_imon=3.10554E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02081E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=1.23793E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4026E0
lens1_imon=2.54496E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64464E1
os_ef1alow_imon=2.97348E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.407E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84498E1
cs_ef1a_imon=3.00024E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.20494E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11251E1
os_restr1_imon=4.31215E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15492E1
os_ea1_imon=2.42288E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.07322E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24729E0
cs_ionrep_imon=9.74405E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93676E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01879E1
cs_anode1_imon=2.04907E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.17174E-8
tplens_vset=1.4E-1
tplens_vmon=1.56032E0
tplens_imon=-2.05617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27852E1
iondef3_imon=1.50217E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.59229E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98533E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.94884E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30797E0
ionrepsh_imon=9.59265E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33345E1
lens5b_imon=2.17485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.746E1
cs_ef2b_imon=3.11423E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46058E0
os_ea2_imon=-7.9683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00569E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71316E1
cs_ef2a_imon=3.18547E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06498E0
os_ef2alow_imon=-2.63714E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.02444E-1
os_ef2bup_imon=-5.34436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.37939E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23007E2
cs_ionfoca_imon=6.31154E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.09946E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72913E1
iondef1_imon=1.07751E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68839E1
iondef4_imon=1.09581E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.20221E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.51067E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.06285E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56075E1
einzel_imon=7.53145E-6
window_vset=0.0E0
window_vmon=1.78879E-1
window_imon=-9.62065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82631E2
mask1_imon=2.39067E-4
mask2_vset=0.0E0
mask2_vmon=-1.86738E1
mask2_imon=-4.92906E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92664E3
multa_neg_imon=7.79738E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.51762E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.01871E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42863E0
defgridb_imon=6.2148E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.34334E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07468E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61581E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30618E1
cs_fil1_imon=9.22721E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30247E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62197E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.6576E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.34907E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34396E-1
cs_fil2_imon=-2.39696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12463E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21869E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.60365E-1
res40_imon=-2.54331E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.17394E-1	-7.98655E-1	-9.13129E0	-9.1419E0	5.05447E-3	9.3627E-2	2.73016E1	-3.26602E1	-3.28004E1	2.68136E1	1.198E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.17084E-1	-7.98845E-1	-9.13129E0	-9.14173E0	5.126E-3	9.34601E-2	2.72733E1	-3.26524E1	-3.27294E1	2.68238E1	1.20209E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16917E-1	-7.98559E-1	-9.13136E0	-9.14192E0	4.74453E-3	9.34124E-2	2.72961E1	-3.26915E1	-3.25924E1	2.68134E1	1.20226E-7	2.51225E-3	2.51225E-3	6.34588E-3	2.9926E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16989E-1	-7.9875E-1	-9.13157E0	-9.14183E0	4.62532E-3	9.34124E-2	2.73033E1	-3.2652E1	-3.27522E1	2.68028E1	1.19697E-7	2.51632E-3	2.51632E-3	6.34518E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.16846E-1	-7.98416E-1	-9.13165E0	-9.1418E0	4.8399E-3	9.32932E-2	2.73069E1	-3.26378E1	-3.25576E1	2.68022E1	1.198E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16774E-1	-7.98535E-1	-9.13165E0	-9.14209E0	5.14984E-3	9.35078E-2	2.728E1	-3.26076E1	-3.26162E1	2.68166E1	1.20017E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00041E-1
7.0E0	0.0E0	2.0E0	1.163E3	7.54E2	-2.0951E0	-8.1706E-1	-7.98416E-1	-9.1315E0	-9.14214E0	5.07832E-3	9.34839E-2	2.73228E1	-3.26703E1	-3.26986E1	2.68036E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.17132E-1	-7.98631E-1	-9.13115E0	-9.14183E0	5.03063E-3	9.32455E-2	2.73177E1	-3.26579E1	-3.26428E1	2.68028E1	1.20311E-7	2.51096E-3	2.51096E-3	6.3074E-3	2.98665E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16679E-1	-7.9875E-1	-9.13162E0	-9.14211E0	4.95911E-3	9.30548E-2	2.72576E1	-3.26482E1	-3.26452E1	2.67896E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16917E-1	-7.98559E-1	-9.13157E0	-9.1418E0	4.79221E-3	9.32455E-2	2.7308E1	-3.26413E1	-3.25593E1	2.67884E1	1.20122E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01871E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.1706E-1	-7.9875E-1	-9.13131E0	-9.14199E0	4.76837E-3	9.36747E-2	2.73042E1	-3.26594E1	-3.26483E1	2.67971E1	1.20414E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0071E-1
1.5E1	0.0E0	1.0E0	6.06E2	4.11E2	-2.09503E0	-8.17108E-1	-7.98488E-1	-9.13136E0	-9.14199E0	4.62532E-3	9.3627E-2	2.73135E1	-3.26326E1	-3.26609E1	2.67607E1	1.20132E-7	2.51793E-3	2.51793E-3	6.3201E-3	2.98992E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16917E-1	-7.9875E-1	-9.13146E0	-9.1424E0	4.72069E-3	9.36747E-2	2.73015E1	-3.26711E1	-3.25437E1	2.68052E1	1.20017E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16846E-1	-7.99036E-1	-9.13181E0	-9.14211E0	4.64916E-3	9.33647E-2	2.72817E1	-3.26567E1	-3.26957E1	2.67878E1	1.20278E-7	2.51334E-3	2.51334E-3	6.34588E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16607E-1	-7.99036E-1	-9.13188E0	-9.14187E0	4.91142E-3	9.33409E-2	2.73237E1	-3.26663E1	-3.25455E1	2.6789E1	1.20174E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.16941E-1	-7.9906E-1	-9.13143E0	-9.14183E0	4.673E-3	9.32693E-2	2.73051E1	-3.26758E1	-3.25866E1	2.6807E1	1.20069E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.02659E-1
2.0E1	9.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.16655E-1	-7.98726E-1	-9.13153E0	-9.14176E0	4.69685E-3	9.35555E-2	2.72805E1	-3.26609E1	-3.27624E1	2.67944E1	1.20042E-7	2.51393E-3	2.51393E-3	6.29684E-3	3.01609E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16774E-1	-7.98631E-1	-9.13117E0	-9.1418E0	4.72069E-3	9.35078E-2	2.7219E1	-3.25234E1	-3.26425E1	2.68285E1	1.19965E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.02659E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.16846E-1	-7.98488E-1	-9.13122E0	-9.14161E0	4.673E-3	9.32693E-2	2.72567E1	-3.2649E1	-3.2593E1	2.67998E1	1.20158E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.1687E-1	-7.98726E-1	-9.13122E0	-9.1418E0	5.00679E-3	9.32932E-2	2.72913E1	-3.26849E1	-3.27852E1	2.68839E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
