[Scan]
initial_time=2016-01-28T18:31:46
final_time=2016-01-28T18:32:08
ip_count=19
run=1026
dataset=4
scan=271
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-8.17013E-1
ql1_imon=1.37963E-8
ql2_vset=
ql2_vmon=-7.98869E-1
ql2_imon=1.94172E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=4.92847E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-1.1009E-10
mult1=-9.89692E-9
mult2=-2.76851E-9
rf_tmon=-4.47637E-3
rf_agc=3.37361E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.72199E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64451E0
bslens_imon=2.40437E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20476E1
lens5a_imon=1.97802E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53638E1
cs_ef1b_imon=3.09791E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04772E1
cs_ea1_imon=1.24658E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44826E0
lens1_imon=2.54136E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64648E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0378E1
cs_ea2_imon=1.42971E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84495E1
cs_ef1a_imon=2.994E-5
olens2_vset=9.7E-1
olens2_vmon=9.69648E-1
olens2_imon=1.20861E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11295E1
os_restr1_imon=4.29864E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15414E1
os_ea1_imon=2.42828E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63547E1
os_ef1bup_imon=3.08102E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21124E0
cs_ionrep_imon=9.97477E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93279E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01895E1
cs_anode1_imon=2.03378E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.17081E-8
tplens_vset=1.4E-1
tplens_vmon=1.62221E0
tplens_imon=-1.11888E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26398E1
iondef3_imon=1.48234E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26308E1
iondef2_imon=1.58292E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98277E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=3.9634E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26592E0
ionrepsh_imon=9.54578E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34012E1
lens5b_imon=2.16765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.12655E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4732E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06043E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71111E1
cs_ef2a_imon=3.19008E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04936E0
os_ef2alow_imon=-2.56796E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93548E-1
os_ef2bup_imon=-5.18974E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10891E1
os_restr2_imon=3.38396E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.28883E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01876E1
cs_anode2_imon=2.10428E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.08868E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67642E1
iondef4_imon=1.08604E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.2374E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.50436E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12769E0
cs_ionaccel_imon=-1.00003E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47208E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56173E1
einzel_imon=7.75394E-6
window_vset=0.0E0
window_vmon=1.8748E-1
window_imon=-1.03308E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39161E-4
mask2_vset=0.0E0
mask2_vmon=-1.86619E1
mask2_imon=-5.33691E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.17012E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.50681E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50169E3
multb_neg_imon=7.41165E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48578E0
defgridb_imon=5.95885E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.332E1
os_fil1_imon=9.41153E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06833E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61828E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30521E1
cs_fil1_imon=9.27047E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.25254E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62536E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.33166E-2
os_fil2_imon=-2.73771E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03585E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.22275E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31697E-1
cs_fil2_imon=-2.47455E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38713E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21718E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.92079E-1
res40_imon=-2.6157E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=222
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16917E-1	-7.9875E-1	-9.13124E0	-9.14204E0	4.57764E-3	9.3317E-2	2.73189E1	-3.26506E1	-3.25996E1	2.67911E1	1.19965E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.00824E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.17204E-1	-7.98678E-1	-9.13119E0	-9.14173E0	4.43459E-3	9.40084E-2	2.72794E1	-3.26615E1	-3.26303E1	2.68213E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-2.09456E0	-8.17513E-1	-7.98798E-1	-9.13141E0	-9.1419E0	4.74453E-3	9.38177E-2	2.72952E1	-3.26446E1	-3.2648E1	2.67711E1	1.20084E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.00144E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.17657E-1	-7.98464E-1	-9.13095E0	-9.14195E0	4.79221E-3	9.37223E-2	2.73339E1	-3.26182E1	-3.26176E1	2.67956E1	1.20192E-7	2.51709E-3	2.51709E-3	6.32858E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.17108E-1	-7.98798E-1	-9.1311E0	-9.14164E0	4.52995E-3	9.39369E-2	2.73195E1	-3.26711E1	-3.26494E1	2.68178E1	1.20069E-7	2.52428E-3	2.52428E-3	6.32386E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.17037E-1	-7.98893E-1	-9.13107E0	-9.14199E0	4.55379E-3	9.38416E-2	2.73021E1	-3.26638E1	-3.26697E1	2.68094E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.17013E-1	-7.98559E-1	-9.13129E0	-9.14235E0	4.62532E-3	9.37223E-2	2.73198E1	-3.26638E1	-3.26201E1	2.6807E1	1.20106E-7	2.52492E-3	2.52492E-3	6.29665E-3	3.01995E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.16798E-1	-7.98249E-1	-9.13143E0	-9.14228E0	4.95911E-3	9.3627E-2	2.72757E1	-3.26536E1	-3.26407E1	2.6792E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.01995E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.16822E-1	-7.98512E-1	-9.1316E0	-9.14211E0	4.64916E-3	9.3627E-2	2.72886E1	-3.26408E1	-3.26054E1	2.67926E1	1.20137E-7	2.52139E-3	2.52139E-3	6.29624E-3	2.99083E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09565E0	-8.1687E-1	-7.98583E-1	-9.13131E0	-9.14211E0	4.50611E-3	9.39846E-2	2.73016E1	-3.2636E1	-3.26349E1	2.68065E1	1.20106E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.97647E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16846E-1	-7.98559E-1	-9.13131E0	-9.14216E0	4.81606E-3	9.38177E-2	2.72931E1	-3.26224E1	-3.26068E1	2.67818E1	1.19749E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09657E0	-8.1687E-1	-7.98488E-1	-9.13141E0	-9.14202E0	4.76837E-3	9.35316E-2	2.73039E1	-3.26741E1	-3.26382E1	2.68308E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.16774E-1	-7.98202E-1	-9.13126E0	-9.14204E0	4.8399E-3	9.38654E-2	2.72612E1	-3.26741E1	-3.26278E1	2.68026E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.17013E-1	-7.98655E-1	-9.1315E0	-9.14218E0	5.24521E-3	9.38892E-2	2.73219E1	-3.26699E1	-3.26116E1	2.67972E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00041E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09688E0	-8.16822E-1	-7.9875E-1	-9.13126E0	-9.14214E0	5.19753E-3	9.36747E-2	2.73021E1	-3.27035E1	-3.26368E1	2.67914E1	1.20004E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16798E-1	-7.98821E-1	-9.13131E0	-9.14211E0	4.86374E-3	9.38177E-2	2.73092E1	-3.26679E1	-3.26419E1	2.68148E1	1.20084E-7	2.5225E-3	2.5225E-3	6.31858E-3	2.99613E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.16655E-1	-7.98774E-1	-9.13129E0	-9.14226E0	5.17368E-3	9.3627E-2	2.72591E1	-3.26484E1	-3.26419E1	2.67821E1	1.19697E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.17108E-1	-7.98607E-1	-9.13134E0	-9.14199E0	4.93526E-3	9.3627E-2	2.71848E1	-3.25257E1	-3.27298E1	2.6801E1	1.20158E-7	2.5131E-3	2.5131E-3	6.32896E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.17108E-1	-7.98416E-1	-9.13122E0	-9.14199E0	5.05447E-3	9.36985E-2	2.72886E1	-3.26419E1	-3.26154E1	2.6783E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.03804E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.17013E-1	-7.98869E-1	-9.13122E0	-9.14204E0	5.10216E-3	9.37223E-2	2.73003E1	-3.26308E1	-3.26398E1	2.67642E1	1.19851E-7	2.52384E-3	2.52384E-3	6.30202E-3	3.01738E-1
