[Scan]
initial_time=2016-01-28T18:32:16
final_time=2016-01-28T18:32:37
ip_count=19
run=1026
dataset=4
scan=272
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08819E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.37373E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=2.01398E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=5.27978E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=-1.10173E-10
mult1=-1.04387E-8
mult2=-2.59685E-9
rf_tmon=-4.51242E-3
rf_agc=3.38863E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=1.72868E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64553E0
bslens_imon=2.36726E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20954E1
lens5a_imon=1.98835E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05031E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=3.08353E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04571E2
lens23_imon=1.02106E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05058E1
cs_ea1_imon=1.24136E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39419E0
lens1_imon=2.42833E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64913E1
os_ef1alow_imon=2.96598E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03678E1
cs_ea2_imon=1.40397E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84096E1
cs_ef1a_imon=3.01541E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.20997E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11117E1
os_restr1_imon=4.30959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15255E1
os_ea1_imon=2.42502E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63499E1
os_ef1bup_imon=3.09442E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21647E0
cs_ionrep_imon=9.64248E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9187E2
cs_nozzle_imon=1.93191E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01867E1
cs_anode1_imon=2.04662E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.17329E-8
tplens_vset=1.4E-1
tplens_vmon=1.62744E0
tplens_imon=-4.07707E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25659E1
iondef3_imon=1.50092E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.57917E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02887E2
lens6_imon=2.98525E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=3.96622E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25592E0
ionrepsh_imon=9.30277E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34313E1
lens5b_imon=2.18569E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7467E1
cs_ef2b_imon=3.11583E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45249E0
os_ea2_imon=-8.39029E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00753E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71543E1
cs_ef2a_imon=3.17499E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0565E0
os_ef2alow_imon=-2.56443E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82936E-1
os_ef2bup_imon=-5.32017E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.37817E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.30424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01932E1
cs_anode2_imon=2.10773E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73081E1
iondef1_imon=1.09174E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.10469E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.26937E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82547E-1
olens1_imon=7.4903E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08862E0
cs_ionaccel_imon=-1.11261E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.4716E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56191E1
einzel_imon=7.5555E-6
window_vset=0.0E0
window_vmon=1.4781E-1
window_imon=-1.07758E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82659E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86389E1
mask2_imon=-4.66494E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.69962E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.49726E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.23776E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40139E0
defgridb_imon=6.06212E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33208E1
os_fil1_imon=9.39741E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08906E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62138E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30536E1
cs_fil1_imon=9.24483E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31792E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62624E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37187E-2
os_fil2_imon=-2.62632E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.93413E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.1561E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34546E-1
cs_fil2_imon=-2.34738E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.56168E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21635E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40061E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.63278E-1
res40_imon=-2.50994E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=186
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.16846E-1	-7.98559E-1	-9.13119E0	-9.14185E0	4.8399E-3	9.377E-2	2.73135E1	-3.26543E1	-3.26326E1	2.67962E1	1.1995E-7	2.51527E-3	2.51527E-3	6.3074E-3	3.00363E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16751E-1	-7.98559E-1	-9.13119E0	-9.14209E0	4.81606E-3	9.36508E-2	2.73261E1	-3.26825E1	-3.2605E1	2.68088E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0965E0	-8.16679E-1	-7.98249E-1	-9.13129E0	-9.14192E0	5.22137E-3	9.36985E-2	2.73116E1	-3.26685E1	-3.26036E1	2.6798E1	1.20069E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.16917E-1	-7.98535E-1	-9.13119E0	-9.14214E0	4.95911E-3	9.36031E-2	2.73303E1	-3.26735E1	-3.26248E1	2.68004E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.16607E-1	-7.98774E-1	-9.1311E0	-9.14178E0	4.76837E-3	9.3627E-2	2.73141E1	-3.26795E1	-3.26104E1	2.68128E1	1.20278E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-8.16703E-1	-7.98607E-1	-9.13155E0	-9.1419E0	4.79221E-3	9.35555E-2	2.73122E1	-3.26437E1	-3.2675E1	2.68142E1	1.19705E-7	2.51007E-3	2.51007E-3	6.31288E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09642E0	-8.16727E-1	-7.98631E-1	-9.13169E0	-9.14173E0	5.00679E-3	9.35793E-2	2.73369E1	-3.26651E1	-3.26164E1	2.67884E1	1.198E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.16536E-1	-7.9875E-1	-9.13157E0	-9.14173E0	4.93526E-3	9.34839E-2	2.73213E1	-3.26845E1	-3.26347E1	2.68065E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.1656E-1	-7.98583E-1	-9.13136E0	-9.14166E0	4.88758E-3	9.34362E-2	2.728E1	-3.26523E1	-3.25593E1	2.6831E1	1.20092E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.98092E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.16298E-1	-7.98702E-1	-9.13122E0	-9.1419E0	5.10216E-3	9.35793E-2	2.73123E1	-3.26476E1	-3.26885E1	2.68106E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9978E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09634E0	-8.1656E-1	-7.98845E-1	-9.13148E0	-9.14149E0	5.22137E-3	9.33647E-2	2.72962E1	-3.2659E1	-3.26455E1	2.68022E1	1.20031E-7	2.52585E-3	2.52585E-3	6.31299E-3	3.01475E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.16321E-1	-7.98559E-1	-9.13126E0	-9.1418E0	5.05447E-3	9.3627E-2	2.72626E1	-3.26624E1	-3.25857E1	2.68116E1	1.20311E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.1625E-1	-7.98512E-1	-9.13148E0	-9.1419E0	4.91142E-3	9.35555E-2	2.73038E1	-3.26864E1	-3.25783E1	2.68082E1	1.20064E-7	2.51142E-3	2.51142E-3	6.31761E-3	3.00635E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16488E-1	-7.98678E-1	-9.13129E0	-9.14173E0	5.10216E-3	9.35078E-2	2.72903E1	-3.26561E1	-3.26915E1	2.67998E1	1.20045E-7	2.52521E-3	2.52521E-3	6.31879E-3	3.02426E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09657E0	-8.16679E-1	-7.98559E-1	-9.1316E0	-9.14161E0	5.03063E-3	9.33409E-2	2.73267E1	-3.26573E1	-3.25978E1	2.68172E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01871E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.16727E-1	-7.98416E-1	-9.13155E0	-9.14168E0	5.19753E-3	9.34362E-2	2.72955E1	-3.26338E1	-3.26344E1	2.68166E1	1.20106E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.02253E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.16345E-1	-7.98559E-1	-9.13143E0	-9.14187E0	5.22137E-3	9.33647E-2	2.73147E1	-3.26777E1	-3.26771E1	2.67818E1	1.20297E-7	2.52139E-3	2.52139E-3	6.28511E-3	3.03349E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09634E0	-8.16441E-1	-7.98655E-1	-9.13148E0	-9.14204E0	5.07832E-3	9.3317E-2	2.72201E1	-3.26384E1	-3.27387E1	2.68169E1	1.19809E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.02922E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.16774E-1	-7.98869E-1	-9.13134E0	-9.14192E0	5.24521E-3	9.32217E-2	2.73321E1	-3.26705E1	-3.26512E1	2.68196E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16488E-1	-7.98726E-1	-9.13146E0	-9.1418E0	5.126E-3	9.32932E-2	2.73081E1	-3.26627E1	-3.25659E1	2.68154E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00966E-1
