[Scan]
initial_time=2016-01-28T18:32:45
final_time=2016-01-28T18:33:06
ip_count=19
run=1026
dataset=4
scan=273
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08822E-4
ql1_vset=
ql1_vmon=-8.17013E-1
ql1_imon=1.38635E-8
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=2.01843E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=4.92966E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-1.38986E-10
mult1=-9.55847E-9
mult2=-2.70954E-9
rf_tmon=-4.43869E-3
rf_agc=3.40701E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.702E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64675E0
bslens_imon=2.49371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19376E1
lens5a_imon=2.00138E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04884E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53754E1
cs_ef1b_imon=3.09581E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02217E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=1.24147E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44099E0
lens1_imon=2.57865E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64504E1
os_ef1alow_imon=2.97348E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03956E1
cs_ea2_imon=1.40923E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84145E1
cs_ef1a_imon=3.00963E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.20987E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11112E1
os_restr1_imon=4.2979E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14893E1
os_ea1_imon=2.45194E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6385E1
os_ef1bup_imon=3.07913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2403E0
cs_ionrep_imon=9.7141E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93374E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0174E1
cs_anode1_imon=2.0442E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.171E-8
tplens_vset=1.4E-1
tplens_vmon=1.61902E0
tplens_imon=-4.58161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27298E1
iondef3_imon=1.4871E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26602E1
iondef2_imon=1.58267E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02913E2
lens6_imon=2.98452E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=3.97855E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27215E0
ionrepsh_imon=9.42741E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33705E1
lens5b_imon=2.16985E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74779E1
cs_ef2b_imon=3.12049E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4391E0
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06117E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71194E1
cs_ef2a_imon=3.19104E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05108E0
os_ef2alow_imon=-2.70317E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.40344E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10915E1
os_restr2_imon=3.38322E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.30778E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.09668E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72945E1
iondef1_imon=1.09741E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67812E1
iondef4_imon=1.07739E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.30676E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=7.53902E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1313E0
cs_ionaccel_imon=-1.05242E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47042E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56191E1
einzel_imon=7.72954E-6
window_vset=0.0E0
window_vmon=2.04943E-1
window_imon=-1.0559E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39247E-4
mask2_vset=0.0E0
mask2_vmon=-1.86448E1
mask2_imon=-6.97946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.37455E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.20655E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.15865E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39965E0
defgridb_imon=6.05081E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33204E1
os_fil1_imon=9.40561E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06987E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6192E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30631E1
cs_fil1_imon=9.24494E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30594E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62984E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20526E-2
os_fil2_imon=-2.5128E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84285E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.30747E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.368E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.13042E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21771E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.26985E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.24078E-1
res40_imon=-2.56068E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.16655E-1	-7.98893E-1	-9.1315E0	-9.14176E0	5.10216E-3	9.34124E-2	2.73128E1	-3.26962E1	-3.26826E1	2.68406E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
2.0E0	5.0E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16679E-1	-7.9875E-1	-9.13138E0	-9.14197E0	4.72069E-3	9.35078E-2	2.72806E1	-3.26725E1	-3.25997E1	2.6807E1	1.2026E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0071E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16703E-1	-7.99298E-1	-9.1316E0	-9.1419E0	5.00679E-3	9.37939E-2	2.73275E1	-3.27068E1	-3.26319E1	2.68016E1	1.19872E-7	2.51693E-3	2.51693E-3	6.32418E-3	2.98026E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.17013E-1	-7.98821E-1	-9.13136E0	-9.14228E0	4.88758E-3	9.36031E-2	2.72781E1	-3.26603E1	-3.27065E1	2.67758E1	1.19953E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16989E-1	-7.9875E-1	-9.13155E0	-9.14204E0	4.8399E-3	9.34839E-2	2.72947E1	-3.26573E1	-3.25264E1	2.68123E1	1.20487E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16751E-1	-7.9875E-1	-9.13136E0	-9.14197E0	5.00679E-3	9.36508E-2	2.73107E1	-3.26578E1	-3.26572E1	2.68225E1	1.20092E-7	2.52131E-3	2.52131E-3	6.29157E-3	2.99845E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.16965E-1	-7.98845E-1	-9.13146E0	-9.14168E0	5.22137E-3	9.37223E-2	2.7321E1	-3.26638E1	-3.259E1	2.67902E1	1.20137E-7	2.51136E-3	2.51136E-3	6.32978E-3	3.0201E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.17108E-1	-7.98726E-1	-9.13117E0	-9.14195E0	4.8399E-3	9.34839E-2	2.73027E1	-3.26284E1	-3.26561E1	2.6801E1	1.20174E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.04505E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16774E-1	-7.99036E-1	-9.13117E0	-9.14187E0	4.76837E-3	9.36508E-2	2.72883E1	-3.26687E1	-3.26326E1	2.68022E1	1.20174E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.1706E-1	-7.98965E-1	-9.13141E0	-9.14199E0	5.05447E-3	9.3317E-2	2.72927E1	-3.26455E1	-3.25593E1	2.68142E1	1.20226E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.98222E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.17204E-1	-7.98631E-1	-9.13124E0	-9.14228E0	4.8399E-3	9.36508E-2	2.73021E1	-3.2662E1	-3.26307E1	2.67978E1	1.2026E-7	2.52169E-3	2.52169E-3	6.31278E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.17204E-1	-7.98392E-1	-9.13131E0	-9.14202E0	4.72069E-3	9.3627E-2	2.73296E1	-3.26529E1	-3.26731E1	2.68157E1	1.19902E-7	2.51203E-3	2.51203E-3	6.35059E-3	2.99941E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.1706E-1	-7.98512E-1	-9.13119E0	-9.1418E0	4.86374E-3	9.37939E-2	2.72898E1	-3.26697E1	-3.25417E1	2.67879E1	1.20122E-7	2.52647E-3	2.52647E-3	6.30192E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.16751E-1	-7.98678E-1	-9.13119E0	-9.14176E0	4.72069E-3	9.35078E-2	2.73033E1	-3.2632E1	-3.27023E1	2.684E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.16679E-1	-7.9844E-1	-9.13119E0	-9.1418E0	5.03063E-3	9.35316E-2	2.73234E1	-3.26738E1	-3.25847E1	2.68118E1	1.198E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.16607E-1	-7.98798E-1	-9.13138E0	-9.14199E0	4.91142E-3	9.3627E-2	2.72751E1	-3.26861E1	-3.27492E1	2.68046E1	1.20383E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00824E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.1687E-1	-7.98869E-1	-9.13157E0	-9.14187E0	4.86374E-3	9.38177E-2	2.7321E1	-3.26207E1	-3.26095E1	2.6829E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.16965E-1	-7.98655E-1	-9.13134E0	-9.14199E0	4.88758E-3	9.38654E-2	2.72898E1	-3.2615E1	-3.26903E1	2.68132E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98481E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.16894E-1	-7.98798E-1	-9.13148E0	-9.14197E0	4.76837E-3	9.34601E-2	2.72597E1	-3.27139E1	-3.25021E1	2.68227E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.97963E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.17013E-1	-7.98821E-1	-9.13146E0	-9.14199E0	4.95911E-3	9.38654E-2	2.72945E1	-3.26602E1	-3.27298E1	2.67812E1	1.19953E-7	2.51847E-3	2.51847E-3	6.26985E-3	3.0148E-1
