[Scan]
initial_time=2016-01-28T18:33:14
final_time=2016-01-28T18:33:35
ip_count=19
run=1026
dataset=4
scan=274
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08747E-4
ql1_vset=
ql1_vmon=-8.16393E-1
ql1_imon=1.37937E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=2.06738E-9
ql3_vset=
ql3_vmon=-9.13177E0
ql3_imon=4.9392E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-1.08826E-10
mult1=-9.58386E-9
mult2=-2.74456E-9
rf_tmon=-4.65061E-3
rf_agc=3.23242E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.07832E-3
ql5_imon=1.693E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65259E0
bslens_imon=2.75242E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18623E1
lens5a_imon=1.98097E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05177E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.09929E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02059E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05484E1
cs_ea1_imon=1.27392E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3744E0
lens1_imon=2.4696E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64671E1
os_ef1alow_imon=2.95932E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04351E1
cs_ea2_imon=1.42415E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84301E1
cs_ef1a_imon=3.00273E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.20534E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11373E1
os_restr1_imon=4.29205E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14779E1
os_ea1_imon=2.41107E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63604E1
os_ef1bup_imon=3.08656E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27597E0
cs_ionrep_imon=9.73474E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91841E2
cs_nozzle_imon=1.93192E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01759E1
cs_anode1_imon=2.04089E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.18619E-8
tplens_vset=1.4E-1
tplens_vmon=1.6396E0
tplens_imon=-2.77784E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26194E1
iondef3_imon=1.47777E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26494E1
iondef2_imon=1.58098E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0289E2
lens6_imon=2.98489E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.98424E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29373E0
ionrepsh_imon=9.25725E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33272E1
lens5b_imon=2.176E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74614E1
cs_ef2b_imon=3.1195E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49819E0
os_ea2_imon=-6.15698E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06056E2
lens4b_imon=2.00505E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71526E1
cs_ef2a_imon=3.17751E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04583E0
os_ef2alow_imon=-2.65665E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95761E-1
os_ef2bup_imon=-5.39248E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10918E1
os_restr2_imon=3.38298E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.3081E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01871E1
cs_anode2_imon=2.09253E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72967E1
iondef1_imon=1.09689E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.08279E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.18747E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8269E-1
olens1_imon=7.50507E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13076E0
cs_ionaccel_imon=-9.87461E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.4711E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56386E1
einzel_imon=7.70655E-6
window_vset=0.0E0
window_vmon=1.73933E-1
window_imon=-1.11845E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39047E-4
mask2_vset=0.0E0
mask2_vmon=-1.86612E1
mask2_imon=-6.65599E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=7.5787E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.96531E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=6.86615E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23195E0
defgridb_imon=5.91485E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33199E1
os_fil1_imon=9.43574E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07379E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6205E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30561E1
cs_fil1_imon=9.25173E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29387E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62971E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20001E-2
os_fil2_imon=-2.6625E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02196E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.20444E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33954E-1
cs_fil2_imon=-2.66874E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.86711E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.218E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40064E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.66672E-1
res40_imon=-2.48075E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.17132E-1	-7.98512E-1	-9.13157E0	-9.14176E0	4.76837E-3	9.36031E-2	2.72709E1	-3.26714E1	-3.25057E1	2.68036E1	1.20244E-7	2.52139E-3	2.52139E-3	6.32978E-3	2.99613E-1
2.0E0	4.7E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.17132E-1	-7.98774E-1	-9.13136E0	-9.14195E0	4.76837E-3	9.377E-2	2.73112E1	-3.26756E1	-3.27117E1	2.68319E1	1.20243E-7	2.52236E-3	2.52236E-3	6.32858E-3	3.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.17132E-1	-7.98631E-1	-9.13146E0	-9.14195E0	4.41074E-3	9.36508E-2	2.73387E1	-3.26573E1	-3.26036E1	2.68331E1	1.19829E-7	2.52179E-3	2.52179E-3	6.3131E-3	2.9944E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.17037E-1	-7.98893E-1	-9.13131E0	-9.14195E0	4.8399E-3	9.38177E-2	2.72981E1	-3.26718E1	-3.25408E1	2.68148E1	1.1974E-7	2.51603E-3	2.51603E-3	6.32328E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.16631E-1	-7.98345E-1	-9.13138E0	-9.14192E0	4.57764E-3	9.3627E-2	2.73155E1	-3.26591E1	-3.27019E1	2.68364E1	1.19902E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.01995E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16679E-1	-7.98535E-1	-9.13169E0	-9.14156E0	4.72069E-3	9.35793E-2	2.72921E1	-3.26579E1	-3.26242E1	2.67862E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16488E-1	-7.98702E-1	-9.13119E0	-9.14207E0	4.673E-3	9.36031E-2	2.73157E1	-3.26708E1	-3.26443E1	2.67968E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16417E-1	-7.98726E-1	-9.13155E0	-9.1419E0	4.69685E-3	9.35793E-2	2.73321E1	-3.26585E1	-3.2611E1	2.68208E1	1.20004E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16894E-1	-7.98321E-1	-9.13129E0	-9.14178E0	4.86374E-3	9.34601E-2	2.73009E1	-3.26506E1	-3.262E1	2.68004E1	1.20226E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.16703E-1	-7.98345E-1	-9.13136E0	-9.14228E0	4.86374E-3	9.37223E-2	2.73219E1	-3.26657E1	-3.26134E1	2.67818E1	1.20209E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.00966E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16631E-1	-7.98345E-1	-9.13138E0	-9.14202E0	5.26905E-3	9.37223E-2	2.73375E1	-3.26573E1	-3.26585E1	2.67923E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.03449E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16321E-1	-7.98512E-1	-9.13162E0	-9.14199E0	5.22137E-3	9.33647E-2	2.73213E1	-3.26759E1	-3.26272E1	2.68052E1	1.20174E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09657E0	-8.16464E-1	-7.98392E-1	-9.13124E0	-9.14216E0	4.91142E-3	9.33409E-2	2.7321E1	-3.26549E1	-3.258E1	2.67926E1	1.198E-7	2.5131E-3	2.5131E-3	6.3074E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.17084E-1	-7.98678E-1	-9.13115E0	-9.14197E0	4.86374E-3	9.32932E-2	2.72996E1	-3.26419E1	-3.26432E1	2.68196E1	1.20487E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.97963E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09526E0	-8.17037E-1	-7.98583E-1	-9.13148E0	-9.14228E0	4.8399E-3	9.35078E-2	2.73086E1	-3.2659E1	-3.26909E1	2.67926E1	1.19757E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.17156E-1	-7.98607E-1	-9.13148E0	-9.1419E0	4.95911E-3	9.377E-2	2.72733E1	-3.26573E1	-3.26128E1	2.67824E1	1.20069E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00824E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.16965E-1	-7.98655E-1	-9.13153E0	-9.14214E0	5.22137E-3	9.377E-2	2.73027E1	-3.2675E1	-3.25942E1	2.68059E1	1.19913E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16441E-1	-7.98678E-1	-9.13153E0	-9.14214E0	4.79221E-3	9.36747E-2	2.73039E1	-3.26803E1	-3.26195E1	2.68364E1	1.20004E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.01738E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.1656E-1	-7.98583E-1	-9.13155E0	-9.1424E0	5.24521E-3	9.377E-2	2.72909E1	-3.26596E1	-3.259E1	2.68128E1	1.19979E-7	2.51686E-3	2.51686E-3	6.32087E-3	3.0264E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.16393E-1	-7.98559E-1	-9.13177E0	-9.14199E0	5.07832E-3	9.35793E-2	2.72967E1	-3.26494E1	-3.26194E1	2.67992E1					
